APA (7th ed.) Citation

Boyd, I. W. (1987). Laser processing of thin films and microstructures: Oxidation, deposition and etching of insulators. Springer.

Chicago Style (17th ed.) Citation

Boyd, Ian W. Laser Processing of Thin Films and Microstructures: Oxidation, Deposition and Etching of Insulators. Berlin [u.a.]: Springer, 1987.

MLA (9th ed.) Citation

Boyd, Ian W. Laser Processing of Thin Films and Microstructures: Oxidation, Deposition and Etching of Insulators. Springer, 1987.