Elektronenstrahlschreiber mit Feldemissionskathode:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Abschlussarbeit Buch |
| Sprache: | German |
| Veröffentlicht: |
1985
|
| Schlagworte: | |
| Beschreibung: | 103 S. Ill. |
Internformat
MARC
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| 337 | |b n |2 rdamedia | ||
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| 502 | |a Tübingen, Univ., Diss., 1985 | ||
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Datensatz im Suchindex
| _version_ | 1804114872845205504 |
|---|---|
| any_adam_object | |
| author | Benner, Gerd |
| author_facet | Benner, Gerd |
| author_role | aut |
| author_sort | Benner, Gerd |
| author_variant | g b gb |
| building | Verbundindex |
| bvnumber | BV000412735 |
| classification_tum | ELT 286d PHY 322d |
| ctrlnum | (OCoLC)642932440 (DE-599)BVBBV000412735 |
| discipline | Physik Elektrotechnik |
| format | Thesis Book |
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| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV000412735 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T15:13:38Z |
| institution | BVB |
| language | German |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-000254271 |
| oclc_num | 642932440 |
| open_access_boolean | |
| owner | DE-12 DE-19 DE-BY-UBM DE-91 DE-BY-TUM DE-384 DE-703 DE-355 DE-BY-UBR DE-29T DE-706 DE-83 DE-188 |
| owner_facet | DE-12 DE-19 DE-BY-UBM DE-91 DE-BY-TUM DE-384 DE-703 DE-355 DE-BY-UBR DE-29T DE-706 DE-83 DE-188 |
| physical | 103 S. Ill. |
| psigel | TUB-nveb |
| publishDate | 1985 |
| publishDateSearch | 1985 |
| publishDateSort | 1985 |
| record_format | marc |
| spelling | Benner, Gerd Verfasser aut Elektronenstrahlschreiber mit Feldemissionskathode 1985 103 S. Ill. txt rdacontent n rdamedia nc rdacarrier Tübingen, Univ., Diss., 1985 Elektronenstrahllithografie (DE-588)4151897-4 gnd rswk-swf Feldemissionskathode (DE-588)4263441-6 gnd rswk-swf Elektronenstrahlschreiben (DE-588)4151901-2 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Elektronenstrahlschreiben (DE-588)4151901-2 s Feldemissionskathode (DE-588)4263441-6 s DE-604 Elektronenstrahllithografie (DE-588)4151897-4 s |
| spellingShingle | Benner, Gerd Elektronenstrahlschreiber mit Feldemissionskathode Elektronenstrahllithografie (DE-588)4151897-4 gnd Feldemissionskathode (DE-588)4263441-6 gnd Elektronenstrahlschreiben (DE-588)4151901-2 gnd |
| subject_GND | (DE-588)4151897-4 (DE-588)4263441-6 (DE-588)4151901-2 (DE-588)4113937-9 |
| title | Elektronenstrahlschreiber mit Feldemissionskathode |
| title_auth | Elektronenstrahlschreiber mit Feldemissionskathode |
| title_exact_search | Elektronenstrahlschreiber mit Feldemissionskathode |
| title_full | Elektronenstrahlschreiber mit Feldemissionskathode |
| title_fullStr | Elektronenstrahlschreiber mit Feldemissionskathode |
| title_full_unstemmed | Elektronenstrahlschreiber mit Feldemissionskathode |
| title_short | Elektronenstrahlschreiber mit Feldemissionskathode |
| title_sort | elektronenstrahlschreiber mit feldemissionskathode |
| topic | Elektronenstrahllithografie (DE-588)4151897-4 gnd Feldemissionskathode (DE-588)4263441-6 gnd Elektronenstrahlschreiben (DE-588)4151901-2 gnd |
| topic_facet | Elektronenstrahllithografie Feldemissionskathode Elektronenstrahlschreiben Hochschulschrift |
| work_keys_str_mv | AT bennergerd elektronenstrahlschreibermitfeldemissionskathode |