Thin film and depth profile analysis:
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Berlin u.a.
Springer
1984
|
| Schriftenreihe: | Topics in current physics
37 |
| Schlagworte: | |
| Beschreibung: | XI, 205 S. Ill. |
| ISBN: | 3540133208 0387133208 |
Internformat
MARC
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| 245 | 1 | 0 | |a Thin film and depth profile analysis |c ed. by H. Oechsener. With contributions by H.-W. Etzkorn ... |
| 264 | 1 | |a Berlin u.a. |b Springer |c 1984 | |
| 300 | |a XI, 205 S. |b Ill. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Topics in current physics |v 37 | |
| 650 | 4 | |a Sputtering (Physics) | |
| 650 | 4 | |a Surface chemistry | |
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Datensatz im Suchindex
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| discipline | Physik |
| format | Book |
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| genre_facet | Aufsatzsammlung Oberflächen-Mikroanalyse Tiefenprofil |
| id | DE-604.BV000297890 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T15:11:52Z |
| institution | BVB |
| isbn | 3540133208 0387133208 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-000181618 |
| oclc_num | 10710535 |
| open_access_boolean | |
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| owner_facet | DE-12 DE-91G DE-BY-TUM DE-355 DE-BY-UBR DE-29T DE-11 DE-188 DE-83 |
| physical | XI, 205 S. Ill. |
| publishDate | 1984 |
| publishDateSearch | 1984 |
| publishDateSort | 1984 |
| publisher | Springer |
| record_format | marc |
| series | Topics in current physics |
| series2 | Topics in current physics |
| spelling | Thin film and depth profile analysis ed. by H. Oechsener. With contributions by H.-W. Etzkorn ... Berlin u.a. Springer 1984 XI, 205 S. Ill. txt rdacontent n rdamedia nc rdacarrier Topics in current physics 37 Sputtering (Physics) Surface chemistry Thin films Surfaces Dünnschichttechnik (DE-588)4136339-5 gnd rswk-swf Oberflächenchemie (DE-588)4126166-5 gnd rswk-swf Sputtern (DE-588)4182614-0 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 gnd rswk-swf Oberflächenanalyse (DE-588)4172243-7 gnd rswk-swf Tiefenprofilmessung (DE-588)4185422-6 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content Oberflächen-Mikroanalyse gnd rswk-swf Tiefenprofil gnd rswk-swf Dünne Schicht (DE-588)4136925-7 s Oberflächenanalyse (DE-588)4172243-7 s DE-604 Tiefenprofil f Oberflächen-Mikroanalyse f Sputtern (DE-588)4182614-0 s Tiefenprofilmessung (DE-588)4185422-6 s Dünnschichttechnik (DE-588)4136339-5 s Oberflächenchemie (DE-588)4126166-5 s Oechsner, Hans Sonstige oth Etzkorn, Heinz-Werner Sonstige oth Topics in current physics 37 (DE-604)BV000000233 37 |
| spellingShingle | Thin film and depth profile analysis Topics in current physics Sputtering (Physics) Surface chemistry Thin films Surfaces Dünnschichttechnik (DE-588)4136339-5 gnd Oberflächenchemie (DE-588)4126166-5 gnd Sputtern (DE-588)4182614-0 gnd Dünne Schicht (DE-588)4136925-7 gnd Oberflächenanalyse (DE-588)4172243-7 gnd Tiefenprofilmessung (DE-588)4185422-6 gnd |
| subject_GND | (DE-588)4136339-5 (DE-588)4126166-5 (DE-588)4182614-0 (DE-588)4136925-7 (DE-588)4172243-7 (DE-588)4185422-6 (DE-588)4143413-4 |
| title | Thin film and depth profile analysis |
| title_auth | Thin film and depth profile analysis |
| title_exact_search | Thin film and depth profile analysis |
| title_full | Thin film and depth profile analysis ed. by H. Oechsener. With contributions by H.-W. Etzkorn ... |
| title_fullStr | Thin film and depth profile analysis ed. by H. Oechsener. With contributions by H.-W. Etzkorn ... |
| title_full_unstemmed | Thin film and depth profile analysis ed. by H. Oechsener. With contributions by H.-W. Etzkorn ... |
| title_short | Thin film and depth profile analysis |
| title_sort | thin film and depth profile analysis |
| topic | Sputtering (Physics) Surface chemistry Thin films Surfaces Dünnschichttechnik (DE-588)4136339-5 gnd Oberflächenchemie (DE-588)4126166-5 gnd Sputtern (DE-588)4182614-0 gnd Dünne Schicht (DE-588)4136925-7 gnd Oberflächenanalyse (DE-588)4172243-7 gnd Tiefenprofilmessung (DE-588)4185422-6 gnd |
| topic_facet | Sputtering (Physics) Surface chemistry Thin films Surfaces Dünnschichttechnik Oberflächenchemie Sputtern Dünne Schicht Oberflächenanalyse Tiefenprofilmessung Aufsatzsammlung Oberflächen-Mikroanalyse Tiefenprofil |
| volume_link | (DE-604)BV000000233 |
| work_keys_str_mv | AT oechsnerhans thinfilmanddepthprofileanalysis AT etzkornheinzwerner thinfilmanddepthprofileanalysis |