Development of metallization systems for VLSI technology:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Abschlussarbeit Buch |
| Sprache: | English |
| Veröffentlicht: |
Uppsala
1983
|
| Schriftenreihe: | Uppsala Universitet: Acta Universitatis Upsaliensis / Abstracts of Uppsala diss. from the Fac. of Science
702 |
| Schlagworte: | |
| Beschreibung: | 19 S. |
| ISBN: | 9155414699 |
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Datensatz im Suchindex
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|---|---|
| any_adam_object | |
| author | Östling, Mikael |
| author_facet | Östling, Mikael |
| author_role | aut |
| author_sort | Östling, Mikael |
| author_variant | m ö mö |
| building | Verbundindex |
| bvnumber | BV000147725 |
| ctrlnum | (OCoLC)260134221 (DE-599)BVBBV000147725 |
| format | Thesis Book |
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| id | DE-604.BV000147725 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-09T15:09:24Z |
| institution | BVB |
| isbn | 9155414699 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-000082481 |
| oclc_num | 260134221 |
| open_access_boolean | |
| owner | DE-12 DE-188 |
| owner_facet | DE-12 DE-188 |
| physical | 19 S. |
| publishDate | 1983 |
| publishDateSearch | 1983 |
| publishDateSort | 1983 |
| record_format | marc |
| series2 | Uppsala Universitet: Acta Universitatis Upsaliensis / Abstracts of Uppsala diss. from the Fac. of Science |
| spelling | Östling, Mikael Verfasser aut Development of metallization systems for VLSI technology Uppsala 1983 19 S. txt rdacontent n rdamedia nc rdacarrier Uppsala Universitet: Acta Universitatis Upsaliensis / Abstracts of Uppsala diss. from the Fac. of Science 702 Vollst. zugl.: Uppsala, Univ., Diss., 1983 Mikroelektronik (DE-588)4039207-7 gnd rswk-swf Titansilicid (DE-588)4625009-8 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Titansilicid (DE-588)4625009-8 s Mikroelektronik (DE-588)4039207-7 s DE-604 Abstracts of Uppsala diss. from the Fac. of Science Uppsala Universitet: Acta Universitatis Upsaliensis 702 (DE-604)BV008006378 702 |
| spellingShingle | Östling, Mikael Development of metallization systems for VLSI technology Mikroelektronik (DE-588)4039207-7 gnd Titansilicid (DE-588)4625009-8 gnd |
| subject_GND | (DE-588)4039207-7 (DE-588)4625009-8 (DE-588)4113937-9 |
| title | Development of metallization systems for VLSI technology |
| title_auth | Development of metallization systems for VLSI technology |
| title_exact_search | Development of metallization systems for VLSI technology |
| title_full | Development of metallization systems for VLSI technology |
| title_fullStr | Development of metallization systems for VLSI technology |
| title_full_unstemmed | Development of metallization systems for VLSI technology |
| title_short | Development of metallization systems for VLSI technology |
| title_sort | development of metallization systems for vlsi technology |
| topic | Mikroelektronik (DE-588)4039207-7 gnd Titansilicid (DE-588)4625009-8 gnd |
| topic_facet | Mikroelektronik Titansilicid Hochschulschrift |
| volume_link | (DE-604)BV008006378 |
| work_keys_str_mv | AT ostlingmikael developmentofmetallizationsystemsforvlsitechnology |