Ion implantation techniques: lectures given at the Ion Implantation School in connection with the 4. Internat. Conference on Ion Implantation: Equipement and Techniques, Berchtesgaden, Fed. Rep. of Germany, September 13 - 15, 1982
Gespeichert in:
| Format: | Tagungsbericht Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Berlin u.a.
Springer
1982
|
| Schriftenreihe: | Springer series in electrophysics
10 |
| Schlagworte: | |
| Beschreibung: | XII, 372 S. Ill., graph. Darst. |
| ISBN: | 3540118780 0387118780 |
Internformat
MARC
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Datensatz im Suchindex
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| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Conference Proceeding Book |
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| genre_facet | Konferenzschrift 1982 Berchtesgaden |
| id | DE-604.BV000038131 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T15:07:35Z |
| institution | BVB |
| institution_GND | (DE-588)2074140-6 (DE-588)16110772-2 |
| isbn | 3540118780 0387118780 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-000009314 |
| oclc_num | 74535424 |
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| physical | XII, 372 S. Ill., graph. Darst. |
| publishDate | 1982 |
| publishDateSearch | 1982 |
| publishDateSort | 1982 |
| publisher | Springer |
| record_format | marc |
| series | Springer series in electrophysics |
| series2 | Springer series in electrophysics |
| spelling | Ion implantation techniques lectures given at the Ion Implantation School in connection with the 4. Internat. Conference on Ion Implantation: Equipement and Techniques, Berchtesgaden, Fed. Rep. of Germany, September 13 - 15, 1982 ed.: H. Ryssel ... Berlin u.a. Springer 1982 XII, 372 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Springer series in electrophysics 10 Ionenimplantation (DE-588)4027606-5 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1982 Berchtesgaden gnd-content Ionenimplantation (DE-588)4027606-5 s DE-604 Ryssel, Heiner 1941- Sonstige (DE-588)108187802 oth International Conference on Ion Implantation Equipment and Techniques 4 1982 Berchtesgaden Sonstige (DE-588)2074140-6 oth International Ion Implantation School 1982 Berchtesgaden Sonstige (DE-588)16110772-2 oth Springer series in electrophysics 10 (DE-604)BV000000013 10 |
| spellingShingle | Ion implantation techniques lectures given at the Ion Implantation School in connection with the 4. Internat. Conference on Ion Implantation: Equipement and Techniques, Berchtesgaden, Fed. Rep. of Germany, September 13 - 15, 1982 Springer series in electrophysics Ionenimplantation (DE-588)4027606-5 gnd |
| subject_GND | (DE-588)4027606-5 (DE-588)1071861417 |
| title | Ion implantation techniques lectures given at the Ion Implantation School in connection with the 4. Internat. Conference on Ion Implantation: Equipement and Techniques, Berchtesgaden, Fed. Rep. of Germany, September 13 - 15, 1982 |
| title_auth | Ion implantation techniques lectures given at the Ion Implantation School in connection with the 4. Internat. Conference on Ion Implantation: Equipement and Techniques, Berchtesgaden, Fed. Rep. of Germany, September 13 - 15, 1982 |
| title_exact_search | Ion implantation techniques lectures given at the Ion Implantation School in connection with the 4. Internat. Conference on Ion Implantation: Equipement and Techniques, Berchtesgaden, Fed. Rep. of Germany, September 13 - 15, 1982 |
| title_full | Ion implantation techniques lectures given at the Ion Implantation School in connection with the 4. Internat. Conference on Ion Implantation: Equipement and Techniques, Berchtesgaden, Fed. Rep. of Germany, September 13 - 15, 1982 ed.: H. Ryssel ... |
| title_fullStr | Ion implantation techniques lectures given at the Ion Implantation School in connection with the 4. Internat. Conference on Ion Implantation: Equipement and Techniques, Berchtesgaden, Fed. Rep. of Germany, September 13 - 15, 1982 ed.: H. Ryssel ... |
| title_full_unstemmed | Ion implantation techniques lectures given at the Ion Implantation School in connection with the 4. Internat. Conference on Ion Implantation: Equipement and Techniques, Berchtesgaden, Fed. Rep. of Germany, September 13 - 15, 1982 ed.: H. Ryssel ... |
| title_short | Ion implantation techniques |
| title_sort | ion implantation techniques lectures given at the ion implantation school in connection with the 4 internat conference on ion implantation equipement and techniques berchtesgaden fed rep of germany september 13 15 1982 |
| title_sub | lectures given at the Ion Implantation School in connection with the 4. Internat. Conference on Ion Implantation: Equipement and Techniques, Berchtesgaden, Fed. Rep. of Germany, September 13 - 15, 1982 |
| topic | Ionenimplantation (DE-588)4027606-5 gnd |
| topic_facet | Ionenimplantation Konferenzschrift 1982 Berchtesgaden |
| volume_link | (DE-604)BV000000013 |
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