MEMS Silicon Oscillating Accelerometers and Readout Circuits:
Most MEMS accelerometers on the market today are capacitive accelerometers that are based on the displacement sensing mechanism. This book is intended to cover recent developments of MEMS silicon oscillating accelerometers (SOA), also referred to as MEMS resonant accelerometer. As contrast to the ca...
Gespeichert in:
| 1. Verfasser: | |
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| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Aalborg :
River Publishers,
2019.
|
| Schriftenreihe: | River Publishers series in circuits and systems.
|
| Schlagworte: | |
| Online-Zugang: | Volltext |
| Zusammenfassung: | Most MEMS accelerometers on the market today are capacitive accelerometers that are based on the displacement sensing mechanism. This book is intended to cover recent developments of MEMS silicon oscillating accelerometers (SOA), also referred to as MEMS resonant accelerometer. As contrast to the capacitive accelerometer, the MEMS SOA is based on the force sensing mechanism, where the input acceleration is converted to a frequency output. MEMS Silicon Oscillating Accelerometers and Readout Circuits consists of six chapters and covers both MEMS sensor and readout circuit, and provides an in-depth coverage on the design and modelling of the MEMS SOA with several recently reported prototypes. The book is not only useful to researchers and engineers who are familiar with the topic, but also appeals to those who have general interests in MEMS inertial sensors. The book includes extensive references that provide further information on this topic. |
| Beschreibung: | 4.7 Experiment Results of a Prototype PLL-based MEMS SOA |
| Beschreibung: | 1 online resource (314 pages) |
| ISBN: | 8770220441 9788770220446 9781003338826 1003338828 9781000796896 1000796892 9781000793734 1000793737 |
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| 245 | 1 | 0 | |a MEMS Silicon Oscillating Accelerometers and Readout Circuits |
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| 505 | 0 | |a Front Cover; Half Title Page; RIVER PUBLISHERS SERIES IN CIRCUITS AND SYSTEMS; Title Page; Copyright Page; Contents; Preface; List of Contributors; List of Figures; List of Tables; List of Abbreviations; List of Notations; Chapter 1 -- Mechanical Design of Micromechanical Silicon Oscillating Accelerometer; 1.1 Introduction; 1.2 Mechanical Structure Design; 1.2.1 Theory of Operation; 1.2.2 Modelling of DETF Resonator for Closed-form Analysis; 1.2.3 Micro Lever Mechanism and Amplification Factor; 1.2.4 System Amplification Factor n0; 1.2.5 Scale Factor; 1.2.6 Bias; 1.2.7 Thermal Sensitivity | |
| 505 | 8 | |a 1.2.8 Stiffness Nonlinearity1.3 Fabrication and Testing; 1.3.1 SOA Fabrication; 1.3.2 Testing; 1.4 Conclusion; References; Chapter 2 -- Front-end Amplifiers for MEMS Silicon Oscillating Accelerometers; 2.1 Capacitive Sensing in MEMS Sensors; 2.2 Front-end Amplifiers for MEMS Oscillators; 2.2.1 Single-Stage Resistive Feedback TIA; 2.2.1.1 Stability and bandwidth; 2.2.1.2 Input-referred noise; 2.2.2 Two-Stage Resistive Feedback TIA; 2.2.3 T-Network Resistive Feedback TIA; 2.2.4 Charge-Sensing Amplifier (CSA); 2.2.5 Capacitive Feedback TIA; 2.3 Front-end Amplifier for MEMS SOA | |
| 505 | 8 | |a 2.3.1 Concept of MEMS SOA and its Front-end2.3.2 Continuous-Time Integrator-Differentiator-Based TIA; 2.3.3 Discrete-Time Integrator-Differentiator-Based Amplifier; 2.3.4 Front-end Based on Passive Charge Sensing; 2.4 Summary; References; Chapter 3 -- MEMS Silicon Oscillating Accelerometer Readout Circuit; 3.1 Introduction; 3.1.1 Concept of MEMS Silicon Oscillating Accelerometer (SOA); 3.1.2 Readout Circuits for MEMS SOA; 3.1.3 Acceleration Noise Characterization; 3.2 Readout Circuit; 3.2.1 MEMS Oscillator; 3.2.1.1 Front-end amplifier; 3.2.1.2 Oscillation-sustaining circuit | |
| 505 | 8 | |a 3.2.2 Amplitude Control3.2.2.1 Amplitude-stiffness effect; 3.2.2.2 Noise model of the AAC loop; 3.2.3 Phase Noise of the MEMS Oscillator; 3.3 Circuit Implementation; 3.3.1 Overall Readout Circuit at System Level; 3.3.2 Front-end Amplifier; 3.3.3 AAC Circuits; 3.3.4 Amplitude Detector; 3.3.5 Buffer; 3.3.6 Error Amplifier; 3.3.7 Variable Gain Amplifier (VGA); 3.4 Performance; 3.5 Conclusion; References; Chapter 4 -- An MEM Silicon Oscillating Accelerometer Employing a PLL and a Noise Shaping Frequency-to-Digital Converter; 4.1 Introduction; 4.2 PLL-Based MEMS SOA; 4.2.1 Noise Aliasing | |
| 505 | 8 | |a 4.2.2 Start-up Issue4.2.3 PLL Phase Tracking; 4.3 PLL-Based Sigma-Delta FDC; 4.3.1 A Brief Review of Existing FDCs; 4.3.1.1 Reset counter-based FDC; 4.3.1.2 Delta-sigma FDC (FDC); 4.3.1.3 PLL-based FDC (PLL-FDC); 4.3.2 A Modified PLL-based FDC (MPLL-FDC); 4.3.3 Analysis of Quantization Error in MPLL-FDC; 4.4 Stability of the PLL with a Hybrid PFD; 4.5 Noises in PLL-Based MEMS SOA; 4.6 Key Circuit Designs for PLL-based MEMS SOA; 4.6.1 Analog Front-end Amplifier; 4.6.2 Hybrid Mode Phase Frequency Detector; 4.6.3 Phase-Lock Loop with FDC | |
| 500 | |a 4.7 Experiment Results of a Prototype PLL-based MEMS SOA | ||
| 520 | |a Most MEMS accelerometers on the market today are capacitive accelerometers that are based on the displacement sensing mechanism. This book is intended to cover recent developments of MEMS silicon oscillating accelerometers (SOA), also referred to as MEMS resonant accelerometer. As contrast to the capacitive accelerometer, the MEMS SOA is based on the force sensing mechanism, where the input acceleration is converted to a frequency output. MEMS Silicon Oscillating Accelerometers and Readout Circuits consists of six chapters and covers both MEMS sensor and readout circuit, and provides an in-depth coverage on the design and modelling of the MEMS SOA with several recently reported prototypes. The book is not only useful to researchers and engineers who are familiar with the topic, but also appeals to those who have general interests in MEMS inertial sensors. The book includes extensive references that provide further information on this topic. | ||
| 545 | 0 | |a Yong Ping Xu | |
| 650 | 0 | |a Accelerometers. |0 http://id.loc.gov/authorities/subjects/sh85000350 | |
| 650 | 0 | |a Microelectromechanical systems. |0 http://id.loc.gov/authorities/subjects/sh97007351 | |
| 650 | 6 | |a Accéléromètres. | |
| 650 | 6 | |a Microsystèmes électromécaniques. | |
| 650 | 7 | |a accelerometers. |2 aat | |
| 650 | 7 | |a SCIENCE / Energy |2 bisacsh | |
| 650 | 7 | |a TECHNOLOGY / Electronics / Microelectronics |2 bisacsh | |
| 650 | 7 | |a Accelerometers |2 fast | |
| 650 | 7 | |a Microelectromechanical systems |2 fast | |
| 758 | |i has work: |a MEMS Silicon Oscillating Accelerometers and Readout Circuits (Work) |1 https://id.oclc.org/worldcat/entity/E39PCYqtcG76FVfrBkkT4DcCcd |4 https://id.oclc.org/worldcat/ontology/hasWork | ||
| 776 | 0 | 8 | |i Print version: |a Xu, Yong Ping. |t MEMS Silicon Oscillating Accelerometers and Readout Circuits. |d Aalborg : River Publishers, ©2019 |z 9788770220453 |
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| contents | Front Cover; Half Title Page; RIVER PUBLISHERS SERIES IN CIRCUITS AND SYSTEMS; Title Page; Copyright Page; Contents; Preface; List of Contributors; List of Figures; List of Tables; List of Abbreviations; List of Notations; Chapter 1 -- Mechanical Design of Micromechanical Silicon Oscillating Accelerometer; 1.1 Introduction; 1.2 Mechanical Structure Design; 1.2.1 Theory of Operation; 1.2.2 Modelling of DETF Resonator for Closed-form Analysis; 1.2.3 Micro Lever Mechanism and Amplification Factor; 1.2.4 System Amplification Factor n0; 1.2.5 Scale Factor; 1.2.6 Bias; 1.2.7 Thermal Sensitivity 1.2.8 Stiffness Nonlinearity1.3 Fabrication and Testing; 1.3.1 SOA Fabrication; 1.3.2 Testing; 1.4 Conclusion; References; Chapter 2 -- Front-end Amplifiers for MEMS Silicon Oscillating Accelerometers; 2.1 Capacitive Sensing in MEMS Sensors; 2.2 Front-end Amplifiers for MEMS Oscillators; 2.2.1 Single-Stage Resistive Feedback TIA; 2.2.1.1 Stability and bandwidth; 2.2.1.2 Input-referred noise; 2.2.2 Two-Stage Resistive Feedback TIA; 2.2.3 T-Network Resistive Feedback TIA; 2.2.4 Charge-Sensing Amplifier (CSA); 2.2.5 Capacitive Feedback TIA; 2.3 Front-end Amplifier for MEMS SOA 2.3.1 Concept of MEMS SOA and its Front-end2.3.2 Continuous-Time Integrator-Differentiator-Based TIA; 2.3.3 Discrete-Time Integrator-Differentiator-Based Amplifier; 2.3.4 Front-end Based on Passive Charge Sensing; 2.4 Summary; References; Chapter 3 -- MEMS Silicon Oscillating Accelerometer Readout Circuit; 3.1 Introduction; 3.1.1 Concept of MEMS Silicon Oscillating Accelerometer (SOA); 3.1.2 Readout Circuits for MEMS SOA; 3.1.3 Acceleration Noise Characterization; 3.2 Readout Circuit; 3.2.1 MEMS Oscillator; 3.2.1.1 Front-end amplifier; 3.2.1.2 Oscillation-sustaining circuit 3.2.2 Amplitude Control3.2.2.1 Amplitude-stiffness effect; 3.2.2.2 Noise model of the AAC loop; 3.2.3 Phase Noise of the MEMS Oscillator; 3.3 Circuit Implementation; 3.3.1 Overall Readout Circuit at System Level; 3.3.2 Front-end Amplifier; 3.3.3 AAC Circuits; 3.3.4 Amplitude Detector; 3.3.5 Buffer; 3.3.6 Error Amplifier; 3.3.7 Variable Gain Amplifier (VGA); 3.4 Performance; 3.5 Conclusion; References; Chapter 4 -- An MEM Silicon Oscillating Accelerometer Employing a PLL and a Noise Shaping Frequency-to-Digital Converter; 4.1 Introduction; 4.2 PLL-Based MEMS SOA; 4.2.1 Noise Aliasing 4.2.2 Start-up Issue4.2.3 PLL Phase Tracking; 4.3 PLL-Based Sigma-Delta FDC; 4.3.1 A Brief Review of Existing FDCs; 4.3.1.1 Reset counter-based FDC; 4.3.1.2 Delta-sigma FDC (FDC); 4.3.1.3 PLL-based FDC (PLL-FDC); 4.3.2 A Modified PLL-based FDC (MPLL-FDC); 4.3.3 Analysis of Quantization Error in MPLL-FDC; 4.4 Stability of the PLL with a Hybrid PFD; 4.5 Noises in PLL-Based MEMS SOA; 4.6 Key Circuit Designs for PLL-based MEMS SOA; 4.6.1 Analog Front-end Amplifier; 4.6.2 Hybrid Mode Phase Frequency Detector; 4.6.3 Phase-Lock Loop with FDC |
| ctrlnum | (OCoLC)1090023490 |
| dewey-full | 681.2 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 681 - Precision instruments and other devices |
| dewey-raw | 681.2 |
| dewey-search | 681.2 |
| dewey-sort | 3681.2 |
| dewey-tens | 680 - Manufacture of products for specific uses |
| discipline | Handwerk und Gewerbe / Verschiedene Technologien |
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Accelerometer (SOA); 3.1.2 Readout Circuits for MEMS SOA; 3.1.3 Acceleration Noise Characterization; 3.2 Readout Circuit; 3.2.1 MEMS Oscillator; 3.2.1.1 Front-end amplifier; 3.2.1.2 Oscillation-sustaining circuit</subfield></datafield><datafield tag="505" ind1="8" ind2=" "><subfield code="a">3.2.2 Amplitude Control3.2.2.1 Amplitude-stiffness effect; 3.2.2.2 Noise model of the AAC loop; 3.2.3 Phase Noise of the MEMS Oscillator; 3.3 Circuit Implementation; 3.3.1 Overall Readout Circuit at System Level; 3.3.2 Front-end Amplifier; 3.3.3 AAC Circuits; 3.3.4 Amplitude Detector; 3.3.5 Buffer; 3.3.6 Error Amplifier; 3.3.7 Variable Gain Amplifier (VGA); 3.4 Performance; 3.5 Conclusion; References; Chapter 4 -- An MEM Silicon Oscillating Accelerometer Employing a PLL and a Noise Shaping Frequency-to-Digital Converter; 4.1 Introduction; 4.2 PLL-Based MEMS SOA; 4.2.1 Noise Aliasing</subfield></datafield><datafield tag="505" ind1="8" ind2=" "><subfield code="a">4.2.2 Start-up Issue4.2.3 PLL Phase Tracking; 4.3 PLL-Based Sigma-Delta FDC; 4.3.1 A Brief Review of Existing FDCs; 4.3.1.1 Reset counter-based FDC; 4.3.1.2 Delta-sigma FDC (FDC); 4.3.1.3 PLL-based FDC (PLL-FDC); 4.3.2 A Modified PLL-based FDC (MPLL-FDC); 4.3.3 Analysis of Quantization Error in MPLL-FDC; 4.4 Stability of the PLL with a Hybrid PFD; 4.5 Noises in PLL-Based MEMS SOA; 4.6 Key Circuit Designs for PLL-based MEMS SOA; 4.6.1 Analog Front-end Amplifier; 4.6.2 Hybrid Mode Phase Frequency Detector; 4.6.3 Phase-Lock Loop with FDC</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">4.7 Experiment Results of a Prototype PLL-based MEMS SOA</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Most MEMS accelerometers on the market today are capacitive accelerometers that are based on the displacement sensing mechanism. This book is intended to cover recent developments of MEMS silicon oscillating accelerometers (SOA), also referred to as MEMS resonant accelerometer. As contrast to the capacitive accelerometer, the MEMS SOA is based on the force sensing mechanism, where the input acceleration is converted to a frequency output. MEMS Silicon Oscillating Accelerometers and Readout Circuits consists of six chapters and covers both MEMS sensor and readout circuit, and provides an in-depth coverage on the design and modelling of the MEMS SOA with several recently reported prototypes. The book is not only useful to researchers and engineers who are familiar with the topic, but also appeals to those who have general interests in MEMS inertial sensors. The book includes extensive references that provide further information on this topic.</subfield></datafield><datafield tag="545" ind1="0" ind2=" "><subfield code="a">Yong Ping Xu</subfield></datafield><datafield tag="650" ind1=" " ind2="0"><subfield code="a">Accelerometers.</subfield><subfield code="0">http://id.loc.gov/authorities/subjects/sh85000350</subfield></datafield><datafield tag="650" ind1=" " ind2="0"><subfield code="a">Microelectromechanical systems.</subfield><subfield code="0">http://id.loc.gov/authorities/subjects/sh97007351</subfield></datafield><datafield tag="650" ind1=" " ind2="6"><subfield code="a">Accéléromètres.</subfield></datafield><datafield tag="650" ind1=" " ind2="6"><subfield code="a">Microsystèmes électromécaniques.</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">accelerometers.</subfield><subfield code="2">aat</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">SCIENCE / Energy</subfield><subfield code="2">bisacsh</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">TECHNOLOGY / Electronics / Microelectronics</subfield><subfield code="2">bisacsh</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Accelerometers</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Microelectromechanical systems</subfield><subfield code="2">fast</subfield></datafield><datafield tag="758" ind1=" " ind2=" "><subfield code="i">has work:</subfield><subfield code="a">MEMS Silicon Oscillating Accelerometers and Readout Circuits (Work)</subfield><subfield code="1">https://id.oclc.org/worldcat/entity/E39PCYqtcG76FVfrBkkT4DcCcd</subfield><subfield code="4">https://id.oclc.org/worldcat/ontology/hasWork</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Print version:</subfield><subfield code="a">Xu, Yong Ping.</subfield><subfield code="t">MEMS Silicon Oscillating Accelerometers and Readout Circuits.</subfield><subfield code="d">Aalborg : River Publishers, ©2019</subfield><subfield code="z">9788770220453</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">River Publishers series in circuits and systems.</subfield><subfield code="0">http://id.loc.gov/authorities/names/no2016146406</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="l">FWS01</subfield><subfield code="p">ZDB-4-EBA</subfield><subfield code="q">FWS_PDA_EBA</subfield><subfield code="u">https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=2112226</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="936" ind1=" " ind2=" "><subfield code="a">BATCHLOAD</subfield></datafield><datafield tag="938" ind1=" " ind2=" "><subfield code="a">Askews and Holts Library Services</subfield><subfield code="b">ASKH</subfield><subfield code="n">AH36062242</subfield></datafield><datafield tag="938" ind1=" " ind2=" "><subfield code="a">EBSCOhost</subfield><subfield code="b">EBSC</subfield><subfield code="n">2112226</subfield></datafield><datafield tag="938" ind1=" " ind2=" "><subfield code="a">YBP Library Services</subfield><subfield code="b">YANK</subfield><subfield code="n">16110695</subfield></datafield><datafield tag="994" ind1=" " ind2=" "><subfield code="a">92</subfield><subfield code="b">GEBAY</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-4-EBA</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-863</subfield></datafield></record></collection> |
| id | ZDB-4-EBA-on1090023490 |
| illustrated | Not Illustrated |
| indexdate | 2024-11-27T13:29:24Z |
| institution | BVB |
| isbn | 8770220441 9788770220446 9781003338826 1003338828 9781000796896 1000796892 9781000793734 1000793737 |
| language | English |
| oclc_num | 1090023490 |
| open_access_boolean | |
| owner | MAIN DE-863 DE-BY-FWS |
| owner_facet | MAIN DE-863 DE-BY-FWS |
| physical | 1 online resource (314 pages) |
| psigel | ZDB-4-EBA |
| publishDate | 2019 |
| publishDateSearch | 2019 |
| publishDateSort | 2019 |
| publisher | River Publishers, |
| record_format | marc |
| series | River Publishers series in circuits and systems. |
| series2 | River Publishers Series in Circuits and Systems Ser. |
| spelling | Xu, Yong Ping. MEMS Silicon Oscillating Accelerometers and Readout Circuits Aalborg : River Publishers, 2019. 1 online resource (314 pages) text txt rdacontent computer c rdamedia online resource cr rdacarrier River Publishers Series in Circuits and Systems Ser. Print version record. Front Cover; Half Title Page; RIVER PUBLISHERS SERIES IN CIRCUITS AND SYSTEMS; Title Page; Copyright Page; Contents; Preface; List of Contributors; List of Figures; List of Tables; List of Abbreviations; List of Notations; Chapter 1 -- Mechanical Design of Micromechanical Silicon Oscillating Accelerometer; 1.1 Introduction; 1.2 Mechanical Structure Design; 1.2.1 Theory of Operation; 1.2.2 Modelling of DETF Resonator for Closed-form Analysis; 1.2.3 Micro Lever Mechanism and Amplification Factor; 1.2.4 System Amplification Factor n0; 1.2.5 Scale Factor; 1.2.6 Bias; 1.2.7 Thermal Sensitivity 1.2.8 Stiffness Nonlinearity1.3 Fabrication and Testing; 1.3.1 SOA Fabrication; 1.3.2 Testing; 1.4 Conclusion; References; Chapter 2 -- Front-end Amplifiers for MEMS Silicon Oscillating Accelerometers; 2.1 Capacitive Sensing in MEMS Sensors; 2.2 Front-end Amplifiers for MEMS Oscillators; 2.2.1 Single-Stage Resistive Feedback TIA; 2.2.1.1 Stability and bandwidth; 2.2.1.2 Input-referred noise; 2.2.2 Two-Stage Resistive Feedback TIA; 2.2.3 T-Network Resistive Feedback TIA; 2.2.4 Charge-Sensing Amplifier (CSA); 2.2.5 Capacitive Feedback TIA; 2.3 Front-end Amplifier for MEMS SOA 2.3.1 Concept of MEMS SOA and its Front-end2.3.2 Continuous-Time Integrator-Differentiator-Based TIA; 2.3.3 Discrete-Time Integrator-Differentiator-Based Amplifier; 2.3.4 Front-end Based on Passive Charge Sensing; 2.4 Summary; References; Chapter 3 -- MEMS Silicon Oscillating Accelerometer Readout Circuit; 3.1 Introduction; 3.1.1 Concept of MEMS Silicon Oscillating Accelerometer (SOA); 3.1.2 Readout Circuits for MEMS SOA; 3.1.3 Acceleration Noise Characterization; 3.2 Readout Circuit; 3.2.1 MEMS Oscillator; 3.2.1.1 Front-end amplifier; 3.2.1.2 Oscillation-sustaining circuit 3.2.2 Amplitude Control3.2.2.1 Amplitude-stiffness effect; 3.2.2.2 Noise model of the AAC loop; 3.2.3 Phase Noise of the MEMS Oscillator; 3.3 Circuit Implementation; 3.3.1 Overall Readout Circuit at System Level; 3.3.2 Front-end Amplifier; 3.3.3 AAC Circuits; 3.3.4 Amplitude Detector; 3.3.5 Buffer; 3.3.6 Error Amplifier; 3.3.7 Variable Gain Amplifier (VGA); 3.4 Performance; 3.5 Conclusion; References; Chapter 4 -- An MEM Silicon Oscillating Accelerometer Employing a PLL and a Noise Shaping Frequency-to-Digital Converter; 4.1 Introduction; 4.2 PLL-Based MEMS SOA; 4.2.1 Noise Aliasing 4.2.2 Start-up Issue4.2.3 PLL Phase Tracking; 4.3 PLL-Based Sigma-Delta FDC; 4.3.1 A Brief Review of Existing FDCs; 4.3.1.1 Reset counter-based FDC; 4.3.1.2 Delta-sigma FDC (FDC); 4.3.1.3 PLL-based FDC (PLL-FDC); 4.3.2 A Modified PLL-based FDC (MPLL-FDC); 4.3.3 Analysis of Quantization Error in MPLL-FDC; 4.4 Stability of the PLL with a Hybrid PFD; 4.5 Noises in PLL-Based MEMS SOA; 4.6 Key Circuit Designs for PLL-based MEMS SOA; 4.6.1 Analog Front-end Amplifier; 4.6.2 Hybrid Mode Phase Frequency Detector; 4.6.3 Phase-Lock Loop with FDC 4.7 Experiment Results of a Prototype PLL-based MEMS SOA Most MEMS accelerometers on the market today are capacitive accelerometers that are based on the displacement sensing mechanism. This book is intended to cover recent developments of MEMS silicon oscillating accelerometers (SOA), also referred to as MEMS resonant accelerometer. As contrast to the capacitive accelerometer, the MEMS SOA is based on the force sensing mechanism, where the input acceleration is converted to a frequency output. MEMS Silicon Oscillating Accelerometers and Readout Circuits consists of six chapters and covers both MEMS sensor and readout circuit, and provides an in-depth coverage on the design and modelling of the MEMS SOA with several recently reported prototypes. The book is not only useful to researchers and engineers who are familiar with the topic, but also appeals to those who have general interests in MEMS inertial sensors. The book includes extensive references that provide further information on this topic. Yong Ping Xu Accelerometers. http://id.loc.gov/authorities/subjects/sh85000350 Microelectromechanical systems. http://id.loc.gov/authorities/subjects/sh97007351 Accéléromètres. Microsystèmes électromécaniques. accelerometers. aat SCIENCE / Energy bisacsh TECHNOLOGY / Electronics / Microelectronics bisacsh Accelerometers fast Microelectromechanical systems fast has work: MEMS Silicon Oscillating Accelerometers and Readout Circuits (Work) https://id.oclc.org/worldcat/entity/E39PCYqtcG76FVfrBkkT4DcCcd https://id.oclc.org/worldcat/ontology/hasWork Print version: Xu, Yong Ping. MEMS Silicon Oscillating Accelerometers and Readout Circuits. Aalborg : River Publishers, ©2019 9788770220453 River Publishers series in circuits and systems. http://id.loc.gov/authorities/names/no2016146406 FWS01 ZDB-4-EBA FWS_PDA_EBA https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=2112226 Volltext |
| spellingShingle | Xu, Yong Ping MEMS Silicon Oscillating Accelerometers and Readout Circuits River Publishers series in circuits and systems. Front Cover; Half Title Page; RIVER PUBLISHERS SERIES IN CIRCUITS AND SYSTEMS; Title Page; Copyright Page; Contents; Preface; List of Contributors; List of Figures; List of Tables; List of Abbreviations; List of Notations; Chapter 1 -- Mechanical Design of Micromechanical Silicon Oscillating Accelerometer; 1.1 Introduction; 1.2 Mechanical Structure Design; 1.2.1 Theory of Operation; 1.2.2 Modelling of DETF Resonator for Closed-form Analysis; 1.2.3 Micro Lever Mechanism and Amplification Factor; 1.2.4 System Amplification Factor n0; 1.2.5 Scale Factor; 1.2.6 Bias; 1.2.7 Thermal Sensitivity 1.2.8 Stiffness Nonlinearity1.3 Fabrication and Testing; 1.3.1 SOA Fabrication; 1.3.2 Testing; 1.4 Conclusion; References; Chapter 2 -- Front-end Amplifiers for MEMS Silicon Oscillating Accelerometers; 2.1 Capacitive Sensing in MEMS Sensors; 2.2 Front-end Amplifiers for MEMS Oscillators; 2.2.1 Single-Stage Resistive Feedback TIA; 2.2.1.1 Stability and bandwidth; 2.2.1.2 Input-referred noise; 2.2.2 Two-Stage Resistive Feedback TIA; 2.2.3 T-Network Resistive Feedback TIA; 2.2.4 Charge-Sensing Amplifier (CSA); 2.2.5 Capacitive Feedback TIA; 2.3 Front-end Amplifier for MEMS SOA 2.3.1 Concept of MEMS SOA and its Front-end2.3.2 Continuous-Time Integrator-Differentiator-Based TIA; 2.3.3 Discrete-Time Integrator-Differentiator-Based Amplifier; 2.3.4 Front-end Based on Passive Charge Sensing; 2.4 Summary; References; Chapter 3 -- MEMS Silicon Oscillating Accelerometer Readout Circuit; 3.1 Introduction; 3.1.1 Concept of MEMS Silicon Oscillating Accelerometer (SOA); 3.1.2 Readout Circuits for MEMS SOA; 3.1.3 Acceleration Noise Characterization; 3.2 Readout Circuit; 3.2.1 MEMS Oscillator; 3.2.1.1 Front-end amplifier; 3.2.1.2 Oscillation-sustaining circuit 3.2.2 Amplitude Control3.2.2.1 Amplitude-stiffness effect; 3.2.2.2 Noise model of the AAC loop; 3.2.3 Phase Noise of the MEMS Oscillator; 3.3 Circuit Implementation; 3.3.1 Overall Readout Circuit at System Level; 3.3.2 Front-end Amplifier; 3.3.3 AAC Circuits; 3.3.4 Amplitude Detector; 3.3.5 Buffer; 3.3.6 Error Amplifier; 3.3.7 Variable Gain Amplifier (VGA); 3.4 Performance; 3.5 Conclusion; References; Chapter 4 -- An MEM Silicon Oscillating Accelerometer Employing a PLL and a Noise Shaping Frequency-to-Digital Converter; 4.1 Introduction; 4.2 PLL-Based MEMS SOA; 4.2.1 Noise Aliasing 4.2.2 Start-up Issue4.2.3 PLL Phase Tracking; 4.3 PLL-Based Sigma-Delta FDC; 4.3.1 A Brief Review of Existing FDCs; 4.3.1.1 Reset counter-based FDC; 4.3.1.2 Delta-sigma FDC (FDC); 4.3.1.3 PLL-based FDC (PLL-FDC); 4.3.2 A Modified PLL-based FDC (MPLL-FDC); 4.3.3 Analysis of Quantization Error in MPLL-FDC; 4.4 Stability of the PLL with a Hybrid PFD; 4.5 Noises in PLL-Based MEMS SOA; 4.6 Key Circuit Designs for PLL-based MEMS SOA; 4.6.1 Analog Front-end Amplifier; 4.6.2 Hybrid Mode Phase Frequency Detector; 4.6.3 Phase-Lock Loop with FDC Accelerometers. http://id.loc.gov/authorities/subjects/sh85000350 Microelectromechanical systems. http://id.loc.gov/authorities/subjects/sh97007351 Accéléromètres. Microsystèmes électromécaniques. accelerometers. aat SCIENCE / Energy bisacsh TECHNOLOGY / Electronics / Microelectronics bisacsh Accelerometers fast Microelectromechanical systems fast |
| subject_GND | http://id.loc.gov/authorities/subjects/sh85000350 http://id.loc.gov/authorities/subjects/sh97007351 |
| title | MEMS Silicon Oscillating Accelerometers and Readout Circuits |
| title_auth | MEMS Silicon Oscillating Accelerometers and Readout Circuits |
| title_exact_search | MEMS Silicon Oscillating Accelerometers and Readout Circuits |
| title_full | MEMS Silicon Oscillating Accelerometers and Readout Circuits |
| title_fullStr | MEMS Silicon Oscillating Accelerometers and Readout Circuits |
| title_full_unstemmed | MEMS Silicon Oscillating Accelerometers and Readout Circuits |
| title_short | MEMS Silicon Oscillating Accelerometers and Readout Circuits |
| title_sort | mems silicon oscillating accelerometers and readout circuits |
| topic | Accelerometers. http://id.loc.gov/authorities/subjects/sh85000350 Microelectromechanical systems. http://id.loc.gov/authorities/subjects/sh97007351 Accéléromètres. Microsystèmes électromécaniques. accelerometers. aat SCIENCE / Energy bisacsh TECHNOLOGY / Electronics / Microelectronics bisacsh Accelerometers fast Microelectromechanical systems fast |
| topic_facet | Accelerometers. Microelectromechanical systems. Accéléromètres. Microsystèmes électromécaniques. accelerometers. SCIENCE / Energy TECHNOLOGY / Electronics / Microelectronics Accelerometers Microelectromechanical systems |
| url | https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=2112226 |
| work_keys_str_mv | AT xuyongping memssiliconoscillatingaccelerometersandreadoutcircuits |