Metallic oxynitride thin films by reactive sputtering and related deposition methods :: processes, properties and applications /
This e-book provides valuable information about the process modeling, fabrication and characterization of metallic oxynitride-based thin films produced by reactive sputtering and some related deposition processes.
Saved in:
| Main Author: | |
|---|---|
| Other Authors: | , |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Sharjah :
Bentham Science Publishers,
2013.
|
| Subjects: | |
| Online Access: | DE-862 DE-863 |
| Summary: | This e-book provides valuable information about the process modeling, fabrication and characterization of metallic oxynitride-based thin films produced by reactive sputtering and some related deposition processes. |
| Physical Description: | 1 online resource (363 pages) |
| ISBN: | 9781608051564 1608051560 |
Staff View
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| contents | Cover ; Title ; Contents ; About the Editors ; Foreword ; Preface ; List of Contributors ; Part 1 ; Chapter 01 ; Chapter 02 ; Chapter 03 ; Part 2 ; Chapter 04 ; Chapter 05 ; Chapter 06 ; Chapter 07 ; Chapter 08 ; Part 3 ; Chapter 09 ; Chapter 10 ; Chapter 11 ; Chapter 12 ; Author index ; Subject index. |
| ctrlnum | (OCoLC)854975260 |
| dewey-full | 621.3815/2 |
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| indexdate | 2025-04-11T08:41:31Z |
| institution | BVB |
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| language | English |
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| spelling | Vaz, Filipe. Metallic oxynitride thin films by reactive sputtering and related deposition methods : processes, properties and applications / Filipe Vaz. Sharjah : Bentham Science Publishers, 2013. 1 online resource (363 pages) text txt rdacontent computer c rdamedia online resource cr rdacarrier This e-book provides valuable information about the process modeling, fabrication and characterization of metallic oxynitride-based thin films produced by reactive sputtering and some related deposition processes. Print version record. Cover ; Title ; Contents ; About the Editors ; Foreword ; Preface ; List of Contributors ; Part 1 ; Chapter 01 ; Chapter 02 ; Chapter 03 ; Part 2 ; Chapter 04 ; Chapter 05 ; Chapter 06 ; Chapter 07 ; Chapter 08 ; Part 3 ; Chapter 09 ; Chapter 10 ; Chapter 11 ; Chapter 12 ; Author index ; Subject index. Thin films. http://id.loc.gov/authorities/subjects/sh85134864 Couches minces. TECHNOLOGY & ENGINEERING Mechanical. bisacsh Thin films fast Martin, Nicolas. https://id.oclc.org/worldcat/entity/E39PCjvXTH8wkmWQYtbYkHJrG3 http://id.loc.gov/authorities/names/n94801558 Fenker, Martin. has work: Metallic oxynitride thin films by reactive sputtering and related deposition methods (Text) https://id.oclc.org/worldcat/entity/E39PCFXWKMjV4g3p7FGwvcTMWC https://id.oclc.org/worldcat/ontology/hasWork Print version: Vaz, Filipe. Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods : Processes, Properties and Applications. Sharjah : Bentham Science Publishers, ©2013 9781608051571 |
| spellingShingle | Vaz, Filipe Metallic oxynitride thin films by reactive sputtering and related deposition methods : processes, properties and applications / Cover ; Title ; Contents ; About the Editors ; Foreword ; Preface ; List of Contributors ; Part 1 ; Chapter 01 ; Chapter 02 ; Chapter 03 ; Part 2 ; Chapter 04 ; Chapter 05 ; Chapter 06 ; Chapter 07 ; Chapter 08 ; Part 3 ; Chapter 09 ; Chapter 10 ; Chapter 11 ; Chapter 12 ; Author index ; Subject index. Thin films. http://id.loc.gov/authorities/subjects/sh85134864 Couches minces. TECHNOLOGY & ENGINEERING Mechanical. bisacsh Thin films fast |
| subject_GND | http://id.loc.gov/authorities/subjects/sh85134864 |
| title | Metallic oxynitride thin films by reactive sputtering and related deposition methods : processes, properties and applications / |
| title_auth | Metallic oxynitride thin films by reactive sputtering and related deposition methods : processes, properties and applications / |
| title_exact_search | Metallic oxynitride thin films by reactive sputtering and related deposition methods : processes, properties and applications / |
| title_full | Metallic oxynitride thin films by reactive sputtering and related deposition methods : processes, properties and applications / Filipe Vaz. |
| title_fullStr | Metallic oxynitride thin films by reactive sputtering and related deposition methods : processes, properties and applications / Filipe Vaz. |
| title_full_unstemmed | Metallic oxynitride thin films by reactive sputtering and related deposition methods : processes, properties and applications / Filipe Vaz. |
| title_short | Metallic oxynitride thin films by reactive sputtering and related deposition methods : |
| title_sort | metallic oxynitride thin films by reactive sputtering and related deposition methods processes properties and applications |
| title_sub | processes, properties and applications / |
| topic | Thin films. http://id.loc.gov/authorities/subjects/sh85134864 Couches minces. TECHNOLOGY & ENGINEERING Mechanical. bisacsh Thin films fast |
| topic_facet | Thin films. Couches minces. TECHNOLOGY & ENGINEERING Mechanical. Thin films |
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