Silicon science and advanced micro-device engineering I :: selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan /

This special issue contains the proceedings of a joint meeting of the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), organized by the International Education and Research Center for Silicon Science and...

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Körperschaften: International Symposium on Silicon Science Kiryū-shi, Japan, Gunma Daigaku. International Education and Research Center for Silicon Science, Gunma Daigaku. Advanced Technology Research Center, International Conference on Advanced Micro-Device Engineering
Weitere Verfasser: Hanaizumi, Osamu, Unno, Masafumi
Format: Elektronisch Tagungsbericht E-Book
Sprache:English
Veröffentlicht: Stafa-Zurich ; Enfield, N.H. : Trans Tech Publications, 2011.
Schriftenreihe:Key engineering materials ; v. 459.
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Online-Zugang:Volltext
Zusammenfassung:This special issue contains the proceedings of a joint meeting of the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), organized by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center, Gunma University, held on the 10th and 11th of December 2009 in Kiryu, Japan. The scope of these proceedings encompasses: "Materials Science," "Chemical Science and Technology," "Nano-Science and Technology," "Photonics Devices and Technology," "Novel Measurement and System Technology," and "Information and Communication Engineering."
Beschreibung:1 online resource (xii, 282 pages) : illustrations
Bibliographie:Includes bibliographical references and indexes.
ISBN:9783038134817
3038134813
ISSN:1013-9826 ;