Handbook of deposition technologies for films and coatings :: science, applications and technology /

This 3e, edited by Peter M. Martin, PNNL 2005 Inventor of the Year, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. This long-awaited revision includes updated and new chapters on atomic layer deposition, cathodic arc deposition, sculpted thi...

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Bibliographic Details
Other Authors: Martin, Peter M.
Format: Electronic eBook
Language:English
Published: Amsterdam ; Boston : Elsevier, ©2010.
Edition:3rd ed.
Subjects:
Online Access:DE-862
DE-863
Summary:This 3e, edited by Peter M. Martin, PNNL 2005 Inventor of the Year, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. This long-awaited revision includes updated and new chapters on atomic layer deposition, cathodic arc deposition, sculpted thin films, polymer thin films and emerging technologies. Extensive material was added throughout the book, especially in the areas concerned with plasma-assisted vapor deposition processes and metallurgical coating applications. - Explains in depth the many recent improvements in depo.
Physical Description:1 online resource (xviii, 912 pages) : illustrations
Bibliography:Includes bibliographical references and index.
ISBN:9780080951942
0080951945
9780815520313
081552031X

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