Plasma processing and processing science /:
Gespeichert in:
| Körperschaften: | , , |
|---|---|
| Weitere Verfasser: | |
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Washington, D.C. :
National Academy Press,
1995.
|
| Schriftenreihe: | NRL strategic series.
|
| Schlagworte: | |
| Online-Zugang: | Volltext |
| Beschreibung: | Committee chair: Francis F. Chen. This work was performed under Department of Navy Contract N00014-93-C-0089 issued by the Office of Naval Research under contract authority NR 201-124. |
| Beschreibung: | 1 online resource (x, 35 pages) |
| ISBN: | 0309575168 9780309575164 |
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| 245 | 0 | 0 | |a Plasma processing and processing science / |c Panel on Plasma Processing, Naval Studies Board, Commission on Physical Sciences, Mathematics, and Applications, National Research Council. |
| 260 | |a Washington, D.C. : |b National Academy Press, |c 1995. | ||
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| 500 | |a This work was performed under Department of Navy Contract N00014-93-C-0089 issued by the Office of Naval Research under contract authority NR 201-124. | ||
| 588 | 0 | |a Print version record. | |
| 505 | 0 | |a Plasma Processing and Processing Science -- Copyright -- Preface -- Contents -- Chapter 1 Introduction and Summary -- Chapter 2 Modeling and Simulation of Plasma Processing -- RESEARCH OPPORTUNITIES -- Requirements of the Microelectronics Fabrication Industry -- Multidimensional Models -- Plasma Chemistry -- Surface Chemistry -- Electromagnetics -- Current Status of Modeling and Simulation -- Particle-in-Cell Simulations -- Kinetic Models -- Fluid or Hydrodynamic Models -- Hybrid Models -- A ROLE FOR NRL -- Chapter 3 Semiconductor Processing | |
| 505 | 8 | |a RESEARCH OPPORTUNITIESA ROLE FOR NRL -- Development and Characterization of Precompetitive Materials and Processes -- Comparative Analysis and Characterization of Tools and Processes in Development -- Sensor Development for Control and Fingerprinting of Manufacturing Processes -- Chapter 4 Plasma Deposition and Polymerization -- RESEARCH OPPORTUNITIES -- Semiconductor Fabrication -- Barrier Coatings -- Fibrous Materials -- Optical Coatings and Photonics -- Plasma Polymerization -- A ROLE FOR NRL -- Chapter 5 Ion Implantation and Surface Modification | |
| 505 | 8 | |a RESEARCH OPPORTUNITIESIntroduction -- Plasma and Ion Beam Implantation Technology -- Ion Beam Implantation -- Plasma Source Ion Implantation -- Applications -- Implantation of Metals -- Implantation of Nonmetals -- A ROLE FOR NRL -- Chapter 6 Thermal Plasmas -- RESEARCH OPPORTUNITIES -- Introduction -- Plasma Spraying -- Plasma Chemical Vapor Deposition -- Plasma Waste Destruction -- Plasma Metallurgy -- Thermal Plasma Synthesis -- Plasma Consolidation -- A ROLE FOR NRL -- Thermal Plasma Waste Destruction -- Plasma Chemical Vapor Deposition | |
| 505 | 8 | |a Diamond FilmsCubic Boron Nitride Films -- Carbon Nitride -- Chapter 7 Flat Panel Displays -- RESEARCH OPPORTUNITIES -- Introduction -- Passive Matrix Liquid Crystal Display -- Active Matrix Liquid Crystal Display -- Amorphous Silicon -- Polycrystalline Silicon -- Transfer Silicon -- Thin Film Electroluminescent Displays -- Digital Micromirror Devices -- Plasma Displays -- Field Emission Displays -- A ROLE FOR NRL -- Chapter 8 Low-Temperature Plasma Physics -- RESEARCH OPPORTUNITIES -- A ROLE FOR NRL -- Chapter 9 Conclusions and Recommendations | |
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| 650 | 0 | |a Plasma etching. |0 http://id.loc.gov/authorities/subjects/sh85103070 | |
| 650 | 6 | |a Technique des plasmas. | |
| 650 | 6 | |a Semi-conducteurs |x Attaque chimique. | |
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| author_GND | http://id.loc.gov/authorities/names/n83193109 |
| author_corporate | National Research Council (U.S.). Panel on Plasma Processing National Research Council (U.S.). Naval Studies Board National Research Council (U.S.). Commission on Physical Sciences, Mathematics, and Applications |
| author_corporate_role | |
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| contents | Plasma Processing and Processing Science -- Copyright -- Preface -- Contents -- Chapter 1 Introduction and Summary -- Chapter 2 Modeling and Simulation of Plasma Processing -- RESEARCH OPPORTUNITIES -- Requirements of the Microelectronics Fabrication Industry -- Multidimensional Models -- Plasma Chemistry -- Surface Chemistry -- Electromagnetics -- Current Status of Modeling and Simulation -- Particle-in-Cell Simulations -- Kinetic Models -- Fluid or Hydrodynamic Models -- Hybrid Models -- A ROLE FOR NRL -- Chapter 3 Semiconductor Processing RESEARCH OPPORTUNITIESA ROLE FOR NRL -- Development and Characterization of Precompetitive Materials and Processes -- Comparative Analysis and Characterization of Tools and Processes in Development -- Sensor Development for Control and Fingerprinting of Manufacturing Processes -- Chapter 4 Plasma Deposition and Polymerization -- RESEARCH OPPORTUNITIES -- Semiconductor Fabrication -- Barrier Coatings -- Fibrous Materials -- Optical Coatings and Photonics -- Plasma Polymerization -- A ROLE FOR NRL -- Chapter 5 Ion Implantation and Surface Modification RESEARCH OPPORTUNITIESIntroduction -- Plasma and Ion Beam Implantation Technology -- Ion Beam Implantation -- Plasma Source Ion Implantation -- Applications -- Implantation of Metals -- Implantation of Nonmetals -- A ROLE FOR NRL -- Chapter 6 Thermal Plasmas -- RESEARCH OPPORTUNITIES -- Introduction -- Plasma Spraying -- Plasma Chemical Vapor Deposition -- Plasma Waste Destruction -- Plasma Metallurgy -- Thermal Plasma Synthesis -- Plasma Consolidation -- A ROLE FOR NRL -- Thermal Plasma Waste Destruction -- Plasma Chemical Vapor Deposition Diamond FilmsCubic Boron Nitride Films -- Carbon Nitride -- Chapter 7 Flat Panel Displays -- RESEARCH OPPORTUNITIES -- Introduction -- Passive Matrix Liquid Crystal Display -- Active Matrix Liquid Crystal Display -- Amorphous Silicon -- Polycrystalline Silicon -- Transfer Silicon -- Thin Film Electroluminescent Displays -- Digital Micromirror Devices -- Plasma Displays -- Field Emission Displays -- A ROLE FOR NRL -- Chapter 8 Low-Temperature Plasma Physics -- RESEARCH OPPORTUNITIES -- A ROLE FOR NRL -- Chapter 9 Conclusions and Recommendations |
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| dewey-search | 621.044 |
| dewey-sort | 3621.044 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Werkstoffwissenschaften / Fertigungstechnik |
| format | Electronic eBook |
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| id | ZDB-4-EBA-ocm58567010 |
| illustrated | Not Illustrated |
| indexdate | 2024-11-27T13:15:42Z |
| institution | BVB |
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| isbn | 0309575168 9780309575164 |
| language | English |
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| owner_facet | MAIN DE-863 DE-BY-FWS |
| physical | 1 online resource (x, 35 pages) |
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| publishDate | 1995 |
| publishDateSearch | 1995 |
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| publisher | National Academy Press, |
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| series | NRL strategic series. |
| series2 | NRL strategic series |
| spelling | Plasma processing and processing science / Panel on Plasma Processing, Naval Studies Board, Commission on Physical Sciences, Mathematics, and Applications, National Research Council. Washington, D.C. : National Academy Press, 1995. 1 online resource (x, 35 pages) text txt rdacontent computer c rdamedia online resource cr rdacarrier data file rda NRL strategic series Committee chair: Francis F. Chen. This work was performed under Department of Navy Contract N00014-93-C-0089 issued by the Office of Naval Research under contract authority NR 201-124. Print version record. Plasma Processing and Processing Science -- Copyright -- Preface -- Contents -- Chapter 1 Introduction and Summary -- Chapter 2 Modeling and Simulation of Plasma Processing -- RESEARCH OPPORTUNITIES -- Requirements of the Microelectronics Fabrication Industry -- Multidimensional Models -- Plasma Chemistry -- Surface Chemistry -- Electromagnetics -- Current Status of Modeling and Simulation -- Particle-in-Cell Simulations -- Kinetic Models -- Fluid or Hydrodynamic Models -- Hybrid Models -- A ROLE FOR NRL -- Chapter 3 Semiconductor Processing RESEARCH OPPORTUNITIESA ROLE FOR NRL -- Development and Characterization of Precompetitive Materials and Processes -- Comparative Analysis and Characterization of Tools and Processes in Development -- Sensor Development for Control and Fingerprinting of Manufacturing Processes -- Chapter 4 Plasma Deposition and Polymerization -- RESEARCH OPPORTUNITIES -- Semiconductor Fabrication -- Barrier Coatings -- Fibrous Materials -- Optical Coatings and Photonics -- Plasma Polymerization -- A ROLE FOR NRL -- Chapter 5 Ion Implantation and Surface Modification RESEARCH OPPORTUNITIESIntroduction -- Plasma and Ion Beam Implantation Technology -- Ion Beam Implantation -- Plasma Source Ion Implantation -- Applications -- Implantation of Metals -- Implantation of Nonmetals -- A ROLE FOR NRL -- Chapter 6 Thermal Plasmas -- RESEARCH OPPORTUNITIES -- Introduction -- Plasma Spraying -- Plasma Chemical Vapor Deposition -- Plasma Waste Destruction -- Plasma Metallurgy -- Thermal Plasma Synthesis -- Plasma Consolidation -- A ROLE FOR NRL -- Thermal Plasma Waste Destruction -- Plasma Chemical Vapor Deposition Diamond FilmsCubic Boron Nitride Films -- Carbon Nitride -- Chapter 7 Flat Panel Displays -- RESEARCH OPPORTUNITIES -- Introduction -- Passive Matrix Liquid Crystal Display -- Active Matrix Liquid Crystal Display -- Amorphous Silicon -- Polycrystalline Silicon -- Transfer Silicon -- Thin Film Electroluminescent Displays -- Digital Micromirror Devices -- Plasma Displays -- Field Emission Displays -- A ROLE FOR NRL -- Chapter 8 Low-Temperature Plasma Physics -- RESEARCH OPPORTUNITIES -- A ROLE FOR NRL -- Chapter 9 Conclusions and Recommendations English. Plasma engineering. http://id.loc.gov/authorities/subjects/sh85103069 Semiconductors Etching. http://id.loc.gov/authorities/subjects/sh85119910 Plasma etching. http://id.loc.gov/authorities/subjects/sh85103070 Technique des plasmas. Semi-conducteurs Attaque chimique. Gravure par plasma. TECHNOLOGY & ENGINEERING Mechanical. bisacsh Plasma engineering fast Plasma etching fast Semiconductors Etching fast Chen, Francis F., 1929- https://id.oclc.org/worldcat/entity/E39PBJkXBcj499jTbVTK73V6Kd http://id.loc.gov/authorities/names/n83193109 National Research Council (U.S.). Panel on Plasma Processing. http://id.loc.gov/authorities/names/no2012105425 National Research Council (U.S.). Naval Studies Board. http://id.loc.gov/authorities/names/n92118836 National Research Council (U.S.). Commission on Physical Sciences, Mathematics, and Applications. http://id.loc.gov/authorities/names/n90636483 Print version: Plasma processing and processing science. Washington, D.C. : National Academy Press, 1995 (OCoLC)32785090 NRL strategic series. http://id.loc.gov/authorities/names/n97111290 FWS01 ZDB-4-EBA FWS_PDA_EBA https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=123670 Volltext |
| spellingShingle | Plasma processing and processing science / NRL strategic series. Plasma Processing and Processing Science -- Copyright -- Preface -- Contents -- Chapter 1 Introduction and Summary -- Chapter 2 Modeling and Simulation of Plasma Processing -- RESEARCH OPPORTUNITIES -- Requirements of the Microelectronics Fabrication Industry -- Multidimensional Models -- Plasma Chemistry -- Surface Chemistry -- Electromagnetics -- Current Status of Modeling and Simulation -- Particle-in-Cell Simulations -- Kinetic Models -- Fluid or Hydrodynamic Models -- Hybrid Models -- A ROLE FOR NRL -- Chapter 3 Semiconductor Processing RESEARCH OPPORTUNITIESA ROLE FOR NRL -- Development and Characterization of Precompetitive Materials and Processes -- Comparative Analysis and Characterization of Tools and Processes in Development -- Sensor Development for Control and Fingerprinting of Manufacturing Processes -- Chapter 4 Plasma Deposition and Polymerization -- RESEARCH OPPORTUNITIES -- Semiconductor Fabrication -- Barrier Coatings -- Fibrous Materials -- Optical Coatings and Photonics -- Plasma Polymerization -- A ROLE FOR NRL -- Chapter 5 Ion Implantation and Surface Modification RESEARCH OPPORTUNITIESIntroduction -- Plasma and Ion Beam Implantation Technology -- Ion Beam Implantation -- Plasma Source Ion Implantation -- Applications -- Implantation of Metals -- Implantation of Nonmetals -- A ROLE FOR NRL -- Chapter 6 Thermal Plasmas -- RESEARCH OPPORTUNITIES -- Introduction -- Plasma Spraying -- Plasma Chemical Vapor Deposition -- Plasma Waste Destruction -- Plasma Metallurgy -- Thermal Plasma Synthesis -- Plasma Consolidation -- A ROLE FOR NRL -- Thermal Plasma Waste Destruction -- Plasma Chemical Vapor Deposition Diamond FilmsCubic Boron Nitride Films -- Carbon Nitride -- Chapter 7 Flat Panel Displays -- RESEARCH OPPORTUNITIES -- Introduction -- Passive Matrix Liquid Crystal Display -- Active Matrix Liquid Crystal Display -- Amorphous Silicon -- Polycrystalline Silicon -- Transfer Silicon -- Thin Film Electroluminescent Displays -- Digital Micromirror Devices -- Plasma Displays -- Field Emission Displays -- A ROLE FOR NRL -- Chapter 8 Low-Temperature Plasma Physics -- RESEARCH OPPORTUNITIES -- A ROLE FOR NRL -- Chapter 9 Conclusions and Recommendations Plasma engineering. http://id.loc.gov/authorities/subjects/sh85103069 Semiconductors Etching. http://id.loc.gov/authorities/subjects/sh85119910 Plasma etching. http://id.loc.gov/authorities/subjects/sh85103070 Technique des plasmas. Semi-conducteurs Attaque chimique. Gravure par plasma. TECHNOLOGY & ENGINEERING Mechanical. bisacsh Plasma engineering fast Plasma etching fast Semiconductors Etching fast |
| subject_GND | http://id.loc.gov/authorities/subjects/sh85103069 http://id.loc.gov/authorities/subjects/sh85119910 http://id.loc.gov/authorities/subjects/sh85103070 |
| title | Plasma processing and processing science / |
| title_auth | Plasma processing and processing science / |
| title_exact_search | Plasma processing and processing science / |
| title_full | Plasma processing and processing science / Panel on Plasma Processing, Naval Studies Board, Commission on Physical Sciences, Mathematics, and Applications, National Research Council. |
| title_fullStr | Plasma processing and processing science / Panel on Plasma Processing, Naval Studies Board, Commission on Physical Sciences, Mathematics, and Applications, National Research Council. |
| title_full_unstemmed | Plasma processing and processing science / Panel on Plasma Processing, Naval Studies Board, Commission on Physical Sciences, Mathematics, and Applications, National Research Council. |
| title_short | Plasma processing and processing science / |
| title_sort | plasma processing and processing science |
| topic | Plasma engineering. http://id.loc.gov/authorities/subjects/sh85103069 Semiconductors Etching. http://id.loc.gov/authorities/subjects/sh85119910 Plasma etching. http://id.loc.gov/authorities/subjects/sh85103070 Technique des plasmas. Semi-conducteurs Attaque chimique. Gravure par plasma. TECHNOLOGY & ENGINEERING Mechanical. bisacsh Plasma engineering fast Plasma etching fast Semiconductors Etching fast |
| topic_facet | Plasma engineering. Semiconductors Etching. Plasma etching. Technique des plasmas. Semi-conducteurs Attaque chimique. Gravure par plasma. TECHNOLOGY & ENGINEERING Mechanical. Plasma engineering Plasma etching Semiconductors Etching |
| url | https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=123670 |
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