Verfügbarkeit: MEMS mechanical sensors /

MEMS mechanical sensors /:

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Bibliographische Detailangaben
Weitere Verfasser:	Beeby, Stephen
Format:	Elektronisch E-Book
Sprache:	English
Veröffentlicht:	Boston : Artech House, ©2004.
Schriftenreihe:	Microelectromechanical systems series.
Schlagworte:	Microelectromechanical systems. Detectors. Microsystèmes électromécaniques. TECHNOLOGY & ENGINEERING > Sensors. Detectors Microelectromechanical systems
Online-Zugang:	Volltext
Zusammenfassung:	Annotation
Beschreibung:	1 online resource (x, 269 pages) : illustrations
Bibliographie:	Includes bibliographical references and index.
ISBN:	1580538738 9781580538732 1580535364 9781580535366

Internformat

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contents	Introduction -- Materials and fabrication techniques -- MEMS simulation and design tools -- Mechanical sensor packaging -- Mechanical transduction techniques -- Pressure sensors -- Force and torque sensors -- Inertial sensors -- Flow sensors.
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spelling	MEMS mechanical sensors / Stephen Beeby [and others]. Boston : Artech House, ©2004. 1 online resource (x, 269 pages) : illustrations text txt rdacontent computer c rdamedia online resource cr rdacarrier data file Artech House microelectromechanical systems (MEMS) series Includes bibliographical references and index. Print version record. Annotation Engineers and researchers can turn to this reference time and time again when they need to overcome challenges in design, simulation, fabrication, and application of MEMS (microelectromechanical systems) sensors. Machine generated contents note: Ch. 1 Introduction -- Ch. 2 Materials and fabrication techniques -- Ch. 3 MEMS simulation and design tools -- Ch. 4 Mechanical sensor packaging -- Ch. 5 Mechanical transduction techniques -- Ch. 6 Pressure sensors -- Ch. 7 Force and torque sensors -- Ch. 8 Inertial sensors -- Ch. 9 Flow sensors. Microelectromechanical systems. http://id.loc.gov/authorities/subjects/sh97007351 Detectors. http://id.loc.gov/authorities/subjects/sh85037291 Microsystèmes électromécaniques. TECHNOLOGY & ENGINEERING Sensors. bisacsh Detectors. cct Microelectromechanical systems. cct Detectors fast Microelectromechanical systems fast Beeby, Stephen. Print version: MEMS mechanical sensors. Boston : Artech House, ©2004 1580535364 (DLC) 2004046158 (OCoLC)54692250 Microelectromechanical systems series. http://id.loc.gov/authorities/names/n99043021 FWS01 ZDB-4-EBA FWS_PDA_EBA https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=112165 Volltext
spellingShingle	MEMS mechanical sensors / Microelectromechanical systems series. Introduction -- Materials and fabrication techniques -- MEMS simulation and design tools -- Mechanical sensor packaging -- Mechanical transduction techniques -- Pressure sensors -- Force and torque sensors -- Inertial sensors -- Flow sensors. Microelectromechanical systems. http://id.loc.gov/authorities/subjects/sh97007351 Detectors. http://id.loc.gov/authorities/subjects/sh85037291 Microsystèmes électromécaniques. TECHNOLOGY & ENGINEERING Sensors. bisacsh Detectors. cct Microelectromechanical systems. cct Detectors fast Microelectromechanical systems fast
subject_GND	http://id.loc.gov/authorities/subjects/sh97007351 http://id.loc.gov/authorities/subjects/sh85037291
title	MEMS mechanical sensors /
title_alt	Introduction -- Materials and fabrication techniques -- MEMS simulation and design tools -- Mechanical sensor packaging -- Mechanical transduction techniques -- Pressure sensors -- Force and torque sensors -- Inertial sensors -- Flow sensors.
title_auth	MEMS mechanical sensors /
title_exact_search	MEMS mechanical sensors /
title_full	MEMS mechanical sensors / Stephen Beeby [and others].
title_fullStr	MEMS mechanical sensors / Stephen Beeby [and others].
title_full_unstemmed	MEMS mechanical sensors / Stephen Beeby [and others].
title_short	MEMS mechanical sensors /
title_sort	mems mechanical sensors
topic	Microelectromechanical systems. http://id.loc.gov/authorities/subjects/sh97007351 Detectors. http://id.loc.gov/authorities/subjects/sh85037291 Microsystèmes électromécaniques. TECHNOLOGY & ENGINEERING Sensors. bisacsh Detectors. cct Microelectromechanical systems. cct Detectors fast Microelectromechanical systems fast
topic_facet	Microelectromechanical systems. Detectors. Microsystèmes électromécaniques. TECHNOLOGY & ENGINEERING Sensors. Detectors Microelectromechanical systems
url	https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=112165
work_keys_str_mv	AT beebystephen memsmechanicalsensors

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