Micro-Products: Sensors, Integrated Circuits, Actuators

This book focuses on enabling technologies that facilitate designing, machining, and manufacturing of micro/nano systems used in different domains: electrical, mechanical, thermal, magnetic, optic, fluidic. It covers theories and practices relevant to areas of micro-systems to improve the industrial...

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Bibliographic Details
Main Author: Oza, Ankit D. (Author)
Format: Book
Language:English
Published: Berlin/Boston De Gruyter 2025
Series:ISSN
Advanced Mechanical Engineering
Subjects:
Summary:This book focuses on enabling technologies that facilitate designing, machining, and manufacturing of micro/nano systems used in different domains: electrical, mechanical, thermal, magnetic, optic, fluidic. It covers theories and practices relevant to areas of micro-systems to improve the industrial performance and reliability of integrated circuits, micro/nanosystems, micro actuators, and micro/nano sensors
Item Description:50 col. ill
Physical Description:250 Seiten 240 mm
ISBN:9783111424620

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