Introduction to spectroscopic ellipsometry of thin film materials: instrumentation, data analysis, and applications
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| Main Authors: | , , |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Weinheim
Wiley-VCH
[2022]
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| Subjects: | |
| Online Access: | DE-91 |
| Physical Description: | 1 Online-Ressource (x, 187 Seiten) Illustrationen |
| ISBN: | 9783527833948 |
Staff View
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| author | Wee, Andrew T. S. Yin, Xinmao Tang, Chi Sin |
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| discipline | Physik |
| format | Electronic eBook |
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| index_date | 2024-07-03T21:07:15Z |
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| institution | BVB |
| isbn | 9783527833948 |
| language | English |
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| physical | 1 Online-Ressource (x, 187 Seiten) Illustrationen |
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| spelling | Wee, Andrew T. S. Verfasser (DE-588)138993882 aut Introduction to spectroscopic ellipsometry of thin film materials instrumentation, data analysis, and applications Andrew T.S. Wee, Xinmao Yin, Chi Sin Tang Weinheim Wiley-VCH [2022] © 2022 1 Online-Ressource (x, 187 Seiten) Illustrationen txt rdacontent c rdamedia cr rdacarrier Dünne Schicht (DE-588)4136925-7 gnd rswk-swf Ellipsometrie (DE-588)4152025-7 gnd rswk-swf Spektroskopie (DE-588)4056138-0 gnd rswk-swf Electronic books Dünne Schicht (DE-588)4136925-7 s Ellipsometrie (DE-588)4152025-7 s Spektroskopie (DE-588)4056138-0 s DE-604 Yin, Xinmao Verfasser (DE-588)1263061060 aut Tang, Chi Sin Verfasser (DE-588)1263061850 aut Erscheint auch als Yin, Xinmao Introduction to Spectroscopic Ellipsometry of Thin Film Materials Newark : John Wiley & Sons, Incorporated,c2022 Druck-Ausgabe 978-3-527-34951-7 |
| spellingShingle | Wee, Andrew T. S. Yin, Xinmao Tang, Chi Sin Introduction to spectroscopic ellipsometry of thin film materials instrumentation, data analysis, and applications Dünne Schicht (DE-588)4136925-7 gnd Ellipsometrie (DE-588)4152025-7 gnd Spektroskopie (DE-588)4056138-0 gnd |
| subject_GND | (DE-588)4136925-7 (DE-588)4152025-7 (DE-588)4056138-0 |
| title | Introduction to spectroscopic ellipsometry of thin film materials instrumentation, data analysis, and applications |
| title_auth | Introduction to spectroscopic ellipsometry of thin film materials instrumentation, data analysis, and applications |
| title_exact_search | Introduction to spectroscopic ellipsometry of thin film materials instrumentation, data analysis, and applications |
| title_exact_search_txtP | Introduction to spectroscopic ellipsometry of thin film materials instrumentation, data analysis, and applications |
| title_full | Introduction to spectroscopic ellipsometry of thin film materials instrumentation, data analysis, and applications Andrew T.S. Wee, Xinmao Yin, Chi Sin Tang |
| title_fullStr | Introduction to spectroscopic ellipsometry of thin film materials instrumentation, data analysis, and applications Andrew T.S. Wee, Xinmao Yin, Chi Sin Tang |
| title_full_unstemmed | Introduction to spectroscopic ellipsometry of thin film materials instrumentation, data analysis, and applications Andrew T.S. Wee, Xinmao Yin, Chi Sin Tang |
| title_short | Introduction to spectroscopic ellipsometry of thin film materials |
| title_sort | introduction to spectroscopic ellipsometry of thin film materials instrumentation data analysis and applications |
| title_sub | instrumentation, data analysis, and applications |
| topic | Dünne Schicht (DE-588)4136925-7 gnd Ellipsometrie (DE-588)4152025-7 gnd Spektroskopie (DE-588)4056138-0 gnd |
| topic_facet | Dünne Schicht Ellipsometrie Spektroskopie |
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