Atomic layer deposition of metal oxides and chalcogenides for high performance transistors:
Saved in:
| Main Author: | |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Berlin
Humboldt-Universität zu Berlin
2022
|
| Edition: | [Zweitveröffentlichung] |
| Online Access: | Volltext |
| Physical Description: | 1 Online-Ressource |
| DOI: | 10.18452/25753 |
Staff View
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Record in the Search Index
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| indexdate | 2024-07-10T09:40:25Z |
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| spelling | Pinna, Nicola Verfasser aut Atomic layer deposition of metal oxides and chalcogenides for high performance transistors Chengxu Shen, Zhigang Yin, Fionn Collins, Nicola Pinna [Zweitveröffentlichung] Berlin Humboldt-Universität zu Berlin 2022 1 Online-Ressource txt rdacontent c rdamedia cr rdacarrier Sonderdruck aus Advanced Science 9, (2022), 23, 2104599 10.1002/advs.202104599 https://doi.org/10.18452/25753 Verlag kostenfrei Volltext |
| spellingShingle | Pinna, Nicola Atomic layer deposition of metal oxides and chalcogenides for high performance transistors |
| title | Atomic layer deposition of metal oxides and chalcogenides for high performance transistors |
| title_auth | Atomic layer deposition of metal oxides and chalcogenides for high performance transistors |
| title_exact_search | Atomic layer deposition of metal oxides and chalcogenides for high performance transistors |
| title_exact_search_txtP | Atomic layer deposition of metal oxides and chalcogenides for high performance transistors |
| title_full | Atomic layer deposition of metal oxides and chalcogenides for high performance transistors Chengxu Shen, Zhigang Yin, Fionn Collins, Nicola Pinna |
| title_fullStr | Atomic layer deposition of metal oxides and chalcogenides for high performance transistors Chengxu Shen, Zhigang Yin, Fionn Collins, Nicola Pinna |
| title_full_unstemmed | Atomic layer deposition of metal oxides and chalcogenides for high performance transistors Chengxu Shen, Zhigang Yin, Fionn Collins, Nicola Pinna |
| title_short | Atomic layer deposition of metal oxides and chalcogenides for high performance transistors |
| title_sort | atomic layer deposition of metal oxides and chalcogenides for high performance transistors |
| url | https://doi.org/10.18452/25753 |
| work_keys_str_mv | AT pinnanicola atomiclayerdepositionofmetaloxidesandchalcogenidesforhighperformancetransistors |