Comparison and investigation of various topography sensors using a multisensor measuring system:
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| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Kassel, Hess
Kassel University Press
2022
|
| Subjects: | |
| Online Access: | Inhaltsverzeichnis |
| Physical Description: | ix, 251 Seiten Illustrationen, Diagramme 21 cm x 14.8 cm |
| ISBN: | 9783737610698 373761069X |
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MARC
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| 020 | |a 9783737610698 |c : EUR 44.00 (DE), EUR 45.30 (AT), CHF 42.35 (freier Preis) |9 978-3-7376-1069-8 | ||
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| 100 | 1 | |a Hagemeier, Sebastian |e Verfasser |0 (DE-588)1273605810 |4 aut | |
| 245 | 1 | 0 | |a Comparison and investigation of various topography sensors using a multisensor measuring system |c Sebastian Hagemeier |
| 264 | 1 | |a Kassel, Hess |b Kassel University Press |c 2022 | |
| 300 | |a ix, 251 Seiten |b Illustrationen, Diagramme |c 21 cm x 14.8 cm | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 650 | 0 | 7 | |a Optischer Sensor |0 (DE-588)4075677-4 |2 gnd |9 rswk-swf |
| 653 | |a comparative measurements | ||
| 653 | |a confocal microscope | ||
| 653 | |a high-speed laser interferometer | ||
| 653 | |a coherence scanning interferometer | ||
| 653 | |a Multisensor | ||
| 655 | 7 | |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
| 689 | 0 | 0 | |a Optischer Sensor |0 (DE-588)4075677-4 |D s |
| 689 | 0 | |5 DE-604 | |
| 710 | 2 | |a kassel university press |0 (DE-588)1066127425 |4 pbl | |
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| 883 | 1 | |8 1\p |a vlb |d 20220915 |q DE-101 |u https://d-nb.info/provenance/plan#vlb | |
Record in the Search Index
| _version_ | 1804184468931477504 |
|---|---|
| adam_text | CONTENTS
VII
CONTENTS
1
INTRODUCTION
1
2
OPTICAL
FUNDAMENTALS
5
2.1
INTERFERENCE
..........................................................................................................
5
2.2
COHERENCE
.............................................................................................................
9
2.2.1
TEMPORAL
COHERENCE
.................................................................................
9
2.2.2
SPATIAL
COHERENCE
....................................................................................
14
2.3
LIGHT
MICROSCOPY
.................................................................................................
16
2.3.1
WORKING
PRINCIPLE
OF
A
MICROSCOPE
........................................................
16
2.3.2
ILLUMINATION
.............................................................................................
19
2.3.3
RESOLUTION
LIMIT
IN
OPTICAL
IMAGING
ACCORDING
TO
ABBE
..........................
22
2.3.4
RESOLUTION
LIMITS
FOR
COHERENT
AND
INCOHERENT
IMAGING
......................
24
3
MULTISENSOR
MEASURING
SYSTEM
31
3.1
MULTISENSOR
SETUP
................................................................................................
32
3.2
VIBRATION
COMPENSATION
...................................................................................
34
3.3
VIBRATIONS
CAUSED
BY
LATERAL
SCAN
AXES
...........................................................
35
4
STYLUS
INSTRUMENTS
37
4.1
TACTILE
STYLUS
INSTRUMENT
....................................................................................
37
4.1.1
WORKING
PRINCIPLE
...................................................................................
37
4.1.2
DEVIATIONS
CAUSED
BY
THE
STYLUS
TIP
.....................................................
39
4.1.3
MEASURING
SETUP
USED
IN
THE
MULTISENSOR
MEASURING
SYSTEM
.............
40
4.2
ATOMIC
FORCE
MICROSCOPE
....................................................................................
41
4.2.1
WORKING
PRINCIPLE
...................................................................................
41
4.2.2
MEASUREMENT
DEVIATIONS
OF
AN
AFM
......................................................
44
4.2.3
AFM
SETUP
USED
IN
THE
MULTISENSOR
MEASURING
SYSTEM
......................
45
5
COHERENCE
SCANNING
MIRAU
INTERFEROMETER
47
5.1
SIGNAL
FORMATION
IN
A
CSI
.........................................................................
51
5.2
SIGNAL
CHANGES
BY
DIFFERENT
SURFACE
MATERIALS
..................................................
58
5.3
INFLUENCE
OF
THE
REFERENCE
MIRROR
IN
A
MIRAU
SETUP
.........................................
60
5.4
LATERAL
RESOLUTION
...............................................................................................
63
5.5
SIGNAL
PROCESSING
...............................................................................................
67
5.5.1
ENVELOPE
ANALYSIS
....................................................................................
67
5.5.2
PHASE
ANALYSIS
..........................................................................................
71
5.5.3
PHASE
SHIFTING
INTERFEROMETRY
..............................................................
73
VIII
CONTENTS
5.6
INTERFEROMETER
SETUP
..........................................................................................
74
5.6.1
MEASURING
PROCESSES
...............................................................................
75
5.6.2
STROBOSCOPIC
ILLUMINATION
.....................................................................
77
5.6.3
PRACTICAL
REALIZATION
...............................................................................
78
6
CONFOCAL
MICROSCOPY 81
6.1
WORKING
PRINCIPLE
...............................................................................................
84
6.2
IMAGE
FORMATION
...................................................................................................
87
6.3
LATERAL
RESOLUTION
................................................................................................
90
6.4
FULL-FIELD
APPLICATION
.........................................................................................
92
6.5
INSTRUMENTAL
SETUP
............................................................................................
95
6.6
SIGNAL
ANALYSIS
......................................................................................................
98
6.6.1
CENTROID
METHOD
.....................................................................................
99
6.6.2
FITTING
METHOD
..........................................................................................
100
6.6.3
REFERENCE
SURFACE
.......................................................................................
103
7
HIGH-SPEED
INTERFEROMETRIC
POINT
SENSOR
105
7.1
BASIC
PRINCIPLE
........................................................................................................
ILL
7.2
SIGNAL
ANALYSIS
........................................................................................................
113
7.2.1
PHASE
RETRIEVAL
ALGORITHM
...........................................................................
113
7.2.2
EXTENDED
UNAMBIGUOUS
RANGE
..................................................................
115
7.3
LASER
INTERFEROMETRIC
PROFILOMETER
......................................................................
117
7.3.1
SENSOR
SETUPS
..............................................................................................
117
7.3.2
MODULATION
OF
THE
OPD
BY
AN
OSCILLATING
REFERENCE
MIRROR
...................
119
7.3.3
ILLUMINATION
UNIT
.......................................................................................
121
7.3.4
SIGNAL
ACQUISITION
AND
PROCESSING
............................................................
123
7.3.5
DETECTION
OF
THE
LATERAL
POSITION
...............................................................
127
7.3.6
REAL
TIME
FPGA
SIGNAL
PROCESSING
.........................................................
129
7.3.7
SENSOR
BEAM
CHARACTERIZATION
..................................................................
130
7.4
FURTHER
APPLICATIONS
OF
THE
LASER
INTERFEROMETRIC
SENSOR
.................................
134
7.4.1
LASER
INTERFEROMETRIC
DISTANCE
SENSOR
FOR
LENGTHS
MEASUREMENTS
...
134
7.4.2
CONCEPT
OF
A
HIGH-SPEED
SENSOR
FOR
MEASURING
CHANGED
LAYER
THICK
NESSES
.........................................................................................................
136
7.5
DISTORTIONS
...............................................................................................................
139
7.5.1
WAVELENGTH
DRIFT
.......................................................................................
139
7.5.2
INTERFERENCE
RESULTING
BY
MULTIPLE
REFLECTIONS
........................................
140
7.5.3
DEVIATIONS
RESULTING
BY
DATA
SAMPLING
.....................................................
142
7.5.4
INFLUENCES
OF
SPECKLE
................................................................................
143
8
COMPARISON
MEASUREMENTS
145
8.1
REPEATABILITY
.........................................................................................................
145
8.1.1
FULL-FIELD
TOPOGRAPHY
SENSORS
...................................................................
146
8.1.2
POINT-WISE
MEASURING
TOPOGRAPHY
SENSORS
...............................................
152
8.2
GROOVE
DEPTH
STANDARD
..........................................................................................
155
CONTENTS
IX
8.3
CHIRP
STRUCTURE
......................................................................................................
161
8.3.1
COARSE
CHIRP
................................................................................................
161
8.3.2
FINE
CHIRP
MEASURED
BY
AFM
AND
TACTILE
STYLUS
INSTRUMENT
.............
165
8.3.3
FINE
CHIRP
MEASURED
BY
MIRAU
BASED
CSI
...............................................
167
8.3.4
FINE
CHIRP
MEASURED
BY
SCM
...............................................................
169
8.3.5
FINE
CHIRP
MEASURED
BY
ICDS
AND
IPS
..................................................
170
8.4
RECTANGULAR
GRATING
................................................................................................
172
8.5
SINUSOIDAL
SURFACE
STRUCTURES
................................................................................
179
8.6
ROUGHNESS
STANDARDS
.............................................................................................
187
8.6.1
SUPERFINE
ROUGHNESS
STANDARD
.................................................................
189
8.6.2
FINE
ROUGHNESS
STANDARD
..........................................................................
191
8.6.3
MIDDLE
ROUGHNESS
STANDARD
.......................................................................
193
8.6.4
COARSE
ROUGHNESS
STANDARD
.......................................................................
195
8.7
SUMMARY
...............................................................................................................
197
9
CONCLUSION
&
OUTLOOK
199
BIBLIOGRAPHY
203
ABBREVATIONS
241
SYMBOLS
247
|
| adam_txt |
CONTENTS
VII
CONTENTS
1
INTRODUCTION
1
2
OPTICAL
FUNDAMENTALS
5
2.1
INTERFERENCE
.
5
2.2
COHERENCE
.
9
2.2.1
TEMPORAL
COHERENCE
.
9
2.2.2
SPATIAL
COHERENCE
.
14
2.3
LIGHT
MICROSCOPY
.
16
2.3.1
WORKING
PRINCIPLE
OF
A
MICROSCOPE
.
16
2.3.2
ILLUMINATION
.
19
2.3.3
RESOLUTION
LIMIT
IN
OPTICAL
IMAGING
ACCORDING
TO
ABBE
.
22
2.3.4
RESOLUTION
LIMITS
FOR
COHERENT
AND
INCOHERENT
IMAGING
.
24
3
MULTISENSOR
MEASURING
SYSTEM
31
3.1
MULTISENSOR
SETUP
.
32
3.2
VIBRATION
COMPENSATION
.
34
3.3
VIBRATIONS
CAUSED
BY
LATERAL
SCAN
AXES
.
35
4
STYLUS
INSTRUMENTS
37
4.1
TACTILE
STYLUS
INSTRUMENT
.
37
4.1.1
WORKING
PRINCIPLE
.
37
4.1.2
DEVIATIONS
CAUSED
BY
THE
STYLUS
TIP
.
39
4.1.3
MEASURING
SETUP
USED
IN
THE
MULTISENSOR
MEASURING
SYSTEM
.
40
4.2
ATOMIC
FORCE
MICROSCOPE
.
41
4.2.1
WORKING
PRINCIPLE
.
41
4.2.2
MEASUREMENT
DEVIATIONS
OF
AN
AFM
.
44
4.2.3
AFM
SETUP
USED
IN
THE
MULTISENSOR
MEASURING
SYSTEM
.
45
5
COHERENCE
SCANNING
MIRAU
INTERFEROMETER
47
5.1
SIGNAL
FORMATION
IN
A
CSI
.
51
5.2
SIGNAL
CHANGES
BY
DIFFERENT
SURFACE
MATERIALS
.
58
5.3
INFLUENCE
OF
THE
REFERENCE
MIRROR
IN
A
MIRAU
SETUP
.
60
5.4
LATERAL
RESOLUTION
.
63
5.5
SIGNAL
PROCESSING
.
67
5.5.1
ENVELOPE
ANALYSIS
.
67
5.5.2
PHASE
ANALYSIS
.
71
5.5.3
PHASE
SHIFTING
INTERFEROMETRY
.
73
VIII
CONTENTS
5.6
INTERFEROMETER
SETUP
.
74
5.6.1
MEASURING
PROCESSES
.
75
5.6.2
STROBOSCOPIC
ILLUMINATION
.
77
5.6.3
PRACTICAL
REALIZATION
.
78
6
CONFOCAL
MICROSCOPY 81
6.1
WORKING
PRINCIPLE
.
84
6.2
IMAGE
FORMATION
.
87
6.3
LATERAL
RESOLUTION
.
90
6.4
FULL-FIELD
APPLICATION
.
92
6.5
INSTRUMENTAL
SETUP
.
95
6.6
SIGNAL
ANALYSIS
.
98
6.6.1
CENTROID
METHOD
.
99
6.6.2
FITTING
METHOD
.
100
6.6.3
REFERENCE
SURFACE
.
103
7
HIGH-SPEED
INTERFEROMETRIC
POINT
SENSOR
105
7.1
BASIC
PRINCIPLE
.
ILL
7.2
SIGNAL
ANALYSIS
.
113
7.2.1
PHASE
RETRIEVAL
ALGORITHM
.
113
7.2.2
EXTENDED
UNAMBIGUOUS
RANGE
.
115
7.3
LASER
INTERFEROMETRIC
PROFILOMETER
.
117
7.3.1
SENSOR
SETUPS
.
117
7.3.2
MODULATION
OF
THE
OPD
BY
AN
OSCILLATING
REFERENCE
MIRROR
.
119
7.3.3
ILLUMINATION
UNIT
.
121
7.3.4
SIGNAL
ACQUISITION
AND
PROCESSING
.
123
7.3.5
DETECTION
OF
THE
LATERAL
POSITION
.
127
7.3.6
REAL
TIME
FPGA
SIGNAL
PROCESSING
.
129
7.3.7
SENSOR
BEAM
CHARACTERIZATION
.
130
7.4
FURTHER
APPLICATIONS
OF
THE
LASER
INTERFEROMETRIC
SENSOR
.
134
7.4.1
LASER
INTERFEROMETRIC
DISTANCE
SENSOR
FOR
LENGTHS
MEASUREMENTS
.
134
7.4.2
CONCEPT
OF
A
HIGH-SPEED
SENSOR
FOR
MEASURING
CHANGED
LAYER
THICK
NESSES
.
136
7.5
DISTORTIONS
.
139
7.5.1
WAVELENGTH
DRIFT
.
139
7.5.2
INTERFERENCE
RESULTING
BY
MULTIPLE
REFLECTIONS
.
140
7.5.3
DEVIATIONS
RESULTING
BY
DATA
SAMPLING
.
142
7.5.4
INFLUENCES
OF
SPECKLE
.
143
8
COMPARISON
MEASUREMENTS
145
8.1
REPEATABILITY
.
145
8.1.1
FULL-FIELD
TOPOGRAPHY
SENSORS
.
146
8.1.2
POINT-WISE
MEASURING
TOPOGRAPHY
SENSORS
.
152
8.2
GROOVE
DEPTH
STANDARD
.
155
CONTENTS
IX
8.3
CHIRP
STRUCTURE
.
161
8.3.1
COARSE
CHIRP
.
161
8.3.2
FINE
CHIRP
MEASURED
BY
AFM
AND
TACTILE
STYLUS
INSTRUMENT
.
165
8.3.3
FINE
CHIRP
MEASURED
BY
MIRAU
BASED
CSI
.
167
8.3.4
FINE
CHIRP
MEASURED
BY
SCM
.
169
8.3.5
FINE
CHIRP
MEASURED
BY
ICDS
AND
IPS
.
170
8.4
RECTANGULAR
GRATING
.
172
8.5
SINUSOIDAL
SURFACE
STRUCTURES
.
179
8.6
ROUGHNESS
STANDARDS
.
187
8.6.1
SUPERFINE
ROUGHNESS
STANDARD
.
189
8.6.2
FINE
ROUGHNESS
STANDARD
.
191
8.6.3
MIDDLE
ROUGHNESS
STANDARD
.
193
8.6.4
COARSE
ROUGHNESS
STANDARD
.
195
8.7
SUMMARY
.
197
9
CONCLUSION
&
OUTLOOK
199
BIBLIOGRAPHY
203
ABBREVATIONS
241
SYMBOLS
247 |
| any_adam_object | 1 |
| any_adam_object_boolean | 1 |
| author | Hagemeier, Sebastian |
| author_GND | (DE-588)1273605810 |
| author_facet | Hagemeier, Sebastian |
| author_role | aut |
| author_sort | Hagemeier, Sebastian |
| author_variant | s h sh |
| building | Verbundindex |
| bvnumber | BV048500382 |
| classification_rvk | ZQ 3123 |
| ctrlnum | (OCoLC)1345280540 (DE-599)DNB1268131288 |
| discipline | Mess-/Steuerungs-/Regelungs-/Automatisierungstechnik / Mechatronik |
| discipline_str_mv | Mess-/Steuerungs-/Regelungs-/Automatisierungstechnik / Mechatronik |
| format | Book |
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| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV048500382 |
| illustrated | Illustrated |
| index_date | 2024-07-03T20:44:24Z |
| indexdate | 2024-07-10T09:39:50Z |
| institution | BVB |
| institution_GND | (DE-588)1066127425 |
| isbn | 9783737610698 373761069X |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-033877681 |
| oclc_num | 1345280540 |
| open_access_boolean | |
| owner | DE-83 |
| owner_facet | DE-83 |
| physical | ix, 251 Seiten Illustrationen, Diagramme 21 cm x 14.8 cm |
| publishDate | 2022 |
| publishDateSearch | 2022 |
| publishDateSort | 2022 |
| publisher | Kassel University Press |
| record_format | marc |
| spelling | Hagemeier, Sebastian Verfasser (DE-588)1273605810 aut Comparison and investigation of various topography sensors using a multisensor measuring system Sebastian Hagemeier Kassel, Hess Kassel University Press 2022 ix, 251 Seiten Illustrationen, Diagramme 21 cm x 14.8 cm txt rdacontent n rdamedia nc rdacarrier Optischer Sensor (DE-588)4075677-4 gnd rswk-swf comparative measurements confocal microscope high-speed laser interferometer coherence scanning interferometer Multisensor (DE-588)4113937-9 Hochschulschrift gnd-content Optischer Sensor (DE-588)4075677-4 s DE-604 kassel university press (DE-588)1066127425 pbl DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=033877681&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis 1\p vlb 20220915 DE-101 https://d-nb.info/provenance/plan#vlb |
| spellingShingle | Hagemeier, Sebastian Comparison and investigation of various topography sensors using a multisensor measuring system Optischer Sensor (DE-588)4075677-4 gnd |
| subject_GND | (DE-588)4075677-4 (DE-588)4113937-9 |
| title | Comparison and investigation of various topography sensors using a multisensor measuring system |
| title_auth | Comparison and investigation of various topography sensors using a multisensor measuring system |
| title_exact_search | Comparison and investigation of various topography sensors using a multisensor measuring system |
| title_exact_search_txtP | Comparison and investigation of various topography sensors using a multisensor measuring system |
| title_full | Comparison and investigation of various topography sensors using a multisensor measuring system Sebastian Hagemeier |
| title_fullStr | Comparison and investigation of various topography sensors using a multisensor measuring system Sebastian Hagemeier |
| title_full_unstemmed | Comparison and investigation of various topography sensors using a multisensor measuring system Sebastian Hagemeier |
| title_short | Comparison and investigation of various topography sensors using a multisensor measuring system |
| title_sort | comparison and investigation of various topography sensors using a multisensor measuring system |
| topic | Optischer Sensor (DE-588)4075677-4 gnd |
| topic_facet | Optischer Sensor Hochschulschrift |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=033877681&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
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