Simultaneous Focused Electron Beam Induced Deposition and Etching in UHV with Ru(CO)4I2 as Precursor:
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Bibliographic Details
Main Authors: Bilgilisoy, Elif (Author), Yu, Jo-Chi (Author), Preischl, Christian (Author), McElwee-White, Lisa (Author), Steinrück, Hans-Peter (Author), Marbach, Hubertus (Author)
Format: Electronic eBook
Language:English
Published: Erlangen ; Nürnberg Friedrich-Alexander-Universität Erlangen-Nürnberg 2022
Edition:Postprint
Online Access:Volltext
Volltext
Volltext
Item Description:Aus: ACS Applied Nano Materials 5.3 (2022): 3855–3865. <https://pubs.acs.org/doi/10.1021/acsanm.1c04481>
Physical Description:1 Online-Ressource PDF

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