Simultaneous Focused Electron Beam Induced Deposition and Etching in UHV with Ru(CO)4I2 as Precursor - Bilgilisoy, Elif; Yu, Jo-Chi; Preischl, Christian; McElwee-White, Lisa; Steinrück, Hans-Peter; Marbach, Hubertus (Friedrich-Alexander-Universität Erlangen-Nürnberg, 2022)
Aus: ACS Applied Nano Materials 5.3 (2022): 3855–3865. <https://pubs.acs.org/doi/10.1021/acsanm.1c04481>