APA (7th ed.) Citation

Yang, Z. (2022). Advanced MEMS/NEMS Fabrication and Sensors (1st ed. 2022.). Springer International Publishing. https://doi.org/10.1007/978-3-030-79749-2

Chicago Style (17th ed.) Citation

Yang, Zhuoqing. Advanced MEMS/NEMS Fabrication and Sensors. 1st ed. 2022. Cham: Springer International Publishing, 2022. https://doi.org/10.1007/978-3-030-79749-2.

MLA (9th ed.) Citation

Yang, Zhuoqing. Advanced MEMS/NEMS Fabrication and Sensors. 1st ed. 2022. Springer International Publishing, 2022. https://doi.org/10.1007/978-3-030-79749-2.