Chemistry of Atomic Layer Deposition:
This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface-precursor interaction governs atomic layer deposition processes. The underlying prin...
Saved in:
| Main Author: | |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Berlin ; Boston
De Gruyter
[2021]
|
| Series: | De Gruyter Textbook
|
| Subjects: | |
| Online Access: | DE-1046 DE-1043 DE-858 DE-859 DE-860 DE-739 Volltext |
| Summary: | This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface-precursor interaction governs atomic layer deposition processes. The underlying principles in atomic layer deposition rely on the chemistry of a precursor with a surface |
| Item Description: | Description based on online resource; title from PDF title page (publisher's Web site, viewed 29. Nov 2021) |
| Physical Description: | 1 Online-Ressource (VIII, 105 pages) |
| ISBN: | 9783110712537 |
| DOI: | 10.1515/9783110712537 |
Staff View
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| discipline_str_mv | Chemie / Pharmazie Physik Werkstoffwissenschaften / Fertigungstechnik |
| doi_str_mv | 10.1515/9783110712537 |
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| index_date | 2024-07-03T18:47:54Z |
| indexdate | 2025-02-19T17:32:08Z |
| institution | BVB |
| isbn | 9783110712537 |
| language | English |
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| physical | 1 Online-Ressource (VIII, 105 pages) |
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| spelling | Barry, Seán Thomas Verfasser aut Chemistry of Atomic Layer Deposition Seán Thomas Barry Berlin ; Boston De Gruyter [2021] © 2022 1 Online-Ressource (VIII, 105 pages) txt rdacontent c rdamedia cr rdacarrier De Gruyter Textbook Description based on online resource; title from PDF title page (publisher's Web site, viewed 29. Nov 2021) This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface-precursor interaction governs atomic layer deposition processes. The underlying principles in atomic layer deposition rely on the chemistry of a precursor with a surface In English Beschichtungen Materialwissenschaften Oberflächen Wekstoffwissenschaften Technology & Engineering / Materials Science / General bisacsh Atomlagenabscheidung (DE-588)7712127-2 gnd rswk-swf Atomlagenabscheidung (DE-588)7712127-2 s DE-604 Erscheint auch als Druck-Ausgabe 9783110712513 https://doi.org/10.1515/9783110712537 Verlag URL des Erstveröffentlichers Volltext |
| spellingShingle | Barry, Seán Thomas Chemistry of Atomic Layer Deposition Beschichtungen Materialwissenschaften Oberflächen Wekstoffwissenschaften Technology & Engineering / Materials Science / General bisacsh Atomlagenabscheidung (DE-588)7712127-2 gnd |
| subject_GND | (DE-588)7712127-2 |
| title | Chemistry of Atomic Layer Deposition |
| title_auth | Chemistry of Atomic Layer Deposition |
| title_exact_search | Chemistry of Atomic Layer Deposition |
| title_exact_search_txtP | Chemistry of Atomic Layer Deposition |
| title_full | Chemistry of Atomic Layer Deposition Seán Thomas Barry |
| title_fullStr | Chemistry of Atomic Layer Deposition Seán Thomas Barry |
| title_full_unstemmed | Chemistry of Atomic Layer Deposition Seán Thomas Barry |
| title_short | Chemistry of Atomic Layer Deposition |
| title_sort | chemistry of atomic layer deposition |
| topic | Beschichtungen Materialwissenschaften Oberflächen Wekstoffwissenschaften Technology & Engineering / Materials Science / General bisacsh Atomlagenabscheidung (DE-588)7712127-2 gnd |
| topic_facet | Beschichtungen Materialwissenschaften Oberflächen Wekstoffwissenschaften Technology & Engineering / Materials Science / General Atomlagenabscheidung |
| url | https://doi.org/10.1515/9783110712537 |
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