Systematic analysis of the impact of line-edge roughness on the X-ray scattering pattern:
Saved in:
| Main Author: | |
|---|---|
| Format: | Thesis Electronic eBook |
| Language: | English |
| Published: |
Berlin
2021
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| Subjects: | |
| Online Access: | Volltext |
| Physical Description: | 1 Online-Ressource (vi, 138 Seiten) Illustrationen, Diagramme |
| DOI: | 10.14279/depositonce-12320 |
Staff View
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| spelling | Fernández Herrero, Analía Verfasser (DE-588)1242100954 aut Systematic analysis of the impact of line-edge roughness on the X-ray scattering pattern vorgelegt von M.Sc. Analía Fernández Herrero Berlin 2021 1 Online-Ressource (vi, 138 Seiten) Illustrationen, Diagramme txt rdacontent c rdamedia cr rdacarrier Dissertation Technische Universität Berlin 2021 Röntgenstreuung (DE-588)4178324-4 gnd rswk-swf Rauigkeitsmessung (DE-588)4177041-9 gnd rswk-swf Oberfläche (DE-588)4042907-6 gnd rswk-swf Nanostruktur (DE-588)4204530-7 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Röntgenstreuung (DE-588)4178324-4 s Nanostruktur (DE-588)4204530-7 s Oberfläche (DE-588)4042907-6 s Rauigkeitsmessung (DE-588)4177041-9 s DE-604 Erscheint auch als Druck-Ausgabe (DE-604)BV047488623 https://doi.org/10.14279/depositonce-12320 Resolving-System kostenfrei Volltext |
| spellingShingle | Fernández Herrero, Analía Systematic analysis of the impact of line-edge roughness on the X-ray scattering pattern Röntgenstreuung (DE-588)4178324-4 gnd Rauigkeitsmessung (DE-588)4177041-9 gnd Oberfläche (DE-588)4042907-6 gnd Nanostruktur (DE-588)4204530-7 gnd |
| subject_GND | (DE-588)4178324-4 (DE-588)4177041-9 (DE-588)4042907-6 (DE-588)4204530-7 (DE-588)4113937-9 |
| title | Systematic analysis of the impact of line-edge roughness on the X-ray scattering pattern |
| title_auth | Systematic analysis of the impact of line-edge roughness on the X-ray scattering pattern |
| title_exact_search | Systematic analysis of the impact of line-edge roughness on the X-ray scattering pattern |
| title_exact_search_txtP | Systematic analysis of the impact of line-edge roughness on the X-ray scattering pattern |
| title_full | Systematic analysis of the impact of line-edge roughness on the X-ray scattering pattern vorgelegt von M.Sc. Analía Fernández Herrero |
| title_fullStr | Systematic analysis of the impact of line-edge roughness on the X-ray scattering pattern vorgelegt von M.Sc. Analía Fernández Herrero |
| title_full_unstemmed | Systematic analysis of the impact of line-edge roughness on the X-ray scattering pattern vorgelegt von M.Sc. Analía Fernández Herrero |
| title_short | Systematic analysis of the impact of line-edge roughness on the X-ray scattering pattern |
| title_sort | systematic analysis of the impact of line edge roughness on the x ray scattering pattern |
| topic | Röntgenstreuung (DE-588)4178324-4 gnd Rauigkeitsmessung (DE-588)4177041-9 gnd Oberfläche (DE-588)4042907-6 gnd Nanostruktur (DE-588)4204530-7 gnd |
| topic_facet | Röntgenstreuung Rauigkeitsmessung Oberfläche Nanostruktur Hochschulschrift |
| url | https://doi.org/10.14279/depositonce-12320 |
| work_keys_str_mv | AT fernandezherreroanalia systematicanalysisoftheimpactoflineedgeroughnessonthexrayscatteringpattern |