Introduction to MEMS & NEMS: micro and nanoscale electro mechanical systems
Microelectromechanical systems (MEMS) include a whole class of devices built at the microscale that couple mechanical motion to electrical signals, and vice versa. These include sensors, actuators, and resonators. NEMS is the nanoscale equivalent of MEMS, namely, nanoelectromechanical systems. NEMS...
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| Format: | Electronic Video |
| Language: | English |
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United States
IEEE
2013
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| Subjects: | |
| Online Access: | FHN01 TUM01 |
| Summary: | Microelectromechanical systems (MEMS) include a whole class of devices built at the microscale that couple mechanical motion to electrical signals, and vice versa. These include sensors, actuators, and resonators. NEMS is the nanoscale equivalent of MEMS, namely, nanoelectromechanical systems. NEMS provide several advantages over MEMS for certain applications, including higher frequencies and better accuracy. In this tutorial Dr. Tsakalakos discusses the materials and fabrication techniques for MEMS and related topics including microfluidics, electromechanics, MEMS sensors and actuators, polymer-based MEMS, and issues related to design and scaling, characterization and testing and packaging. He also reviews NEMS fabrication techniques and the advantages of NEMS as compared to MEMS. |
| Item Description: | Description based on online resource; title from title screen (IEEE Xplore Digital Library, viewed November 17, 2020) |
| Physical Description: | 1 Online-Resource (1 Videodatei, 60 Minuten) color illustrations |
| ISBN: | 9781467332200 |
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| spelling | Tsakalakos, Loucas Verfasser aut Introduction to MEMS & NEMS micro and nanoscale electro mechanical systems Loucas Tsakalakos Introduction to MEMS and NEMS United States IEEE 2013 1 Online-Resource (1 Videodatei, 60 Minuten) color illustrations tdi rdacontent c rdamedia cr rdacarrier Description based on online resource; title from title screen (IEEE Xplore Digital Library, viewed November 17, 2020) Microelectromechanical systems (MEMS) include a whole class of devices built at the microscale that couple mechanical motion to electrical signals, and vice versa. These include sensors, actuators, and resonators. NEMS is the nanoscale equivalent of MEMS, namely, nanoelectromechanical systems. NEMS provide several advantages over MEMS for certain applications, including higher frequencies and better accuracy. In this tutorial Dr. Tsakalakos discusses the materials and fabrication techniques for MEMS and related topics including microfluidics, electromechanics, MEMS sensors and actuators, polymer-based MEMS, and issues related to design and scaling, characterization and testing and packaging. He also reviews NEMS fabrication techniques and the advantages of NEMS as compared to MEMS. Nanoelectromechanical systems Polymers Fluidics Microfluidics Microelectromechanical systems Actuators (DE-588)4017102-4 Film gnd-content |
| spellingShingle | Tsakalakos, Loucas Introduction to MEMS & NEMS micro and nanoscale electro mechanical systems Nanoelectromechanical systems Polymers Fluidics Microfluidics Microelectromechanical systems Actuators |
| subject_GND | (DE-588)4017102-4 |
| title | Introduction to MEMS & NEMS micro and nanoscale electro mechanical systems |
| title_alt | Introduction to MEMS and NEMS |
| title_auth | Introduction to MEMS & NEMS micro and nanoscale electro mechanical systems |
| title_exact_search | Introduction to MEMS & NEMS micro and nanoscale electro mechanical systems |
| title_exact_search_txtP | Introduction to MEMS & NEMS micro and nanoscale electro mechanical systems |
| title_full | Introduction to MEMS & NEMS micro and nanoscale electro mechanical systems Loucas Tsakalakos |
| title_fullStr | Introduction to MEMS & NEMS micro and nanoscale electro mechanical systems Loucas Tsakalakos |
| title_full_unstemmed | Introduction to MEMS & NEMS micro and nanoscale electro mechanical systems Loucas Tsakalakos |
| title_short | Introduction to MEMS & NEMS |
| title_sort | introduction to mems nems micro and nanoscale electro mechanical systems |
| title_sub | micro and nanoscale electro mechanical systems |
| topic | Nanoelectromechanical systems Polymers Fluidics Microfluidics Microelectromechanical systems Actuators |
| topic_facet | Nanoelectromechanical systems Polymers Fluidics Microfluidics Microelectromechanical systems Actuators Film |
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