APA (7th ed.) Citation

Lin, B. J. (2021). Optical lithography: Here is why (Second edition.). SPIE Press. https://doi.org/10.1117/3.2586123

Chicago Style (17th ed.) Citation

Lin, Burn Jeng. Optical Lithography: Here Is Why. Second edition. Bellingham, Washington, USA: SPIE Press, 2021. https://doi.org/10.1117/3.2586123.

MLA (9th ed.) Citation

Lin, Burn Jeng. Optical Lithography: Here Is Why. Second edition. SPIE Press, 2021. https://doi.org/10.1117/3.2586123.