Handbook of silicon based MEMS materials and technologies:
Gespeichert in:
| Weitere Verfasser: | , , , , , |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Amsterdam ; Oxford ; Cambridge, MA
Elsevier
[2020]
|
| Ausgabe: | Third edition |
| Schriftenreihe: | Micro & nano technologies series
|
| Schlagworte: | |
| Online-Zugang: | TUM01 |
| Beschreibung: | 1 Online-Ressource Illustrationen, Diagramme |
| ISBN: | 9780128177877 |
Internformat
MARC
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| 245 | 1 | 0 | |a Handbook of silicon based MEMS materials and technologies |c edited by Markku Tilli, Mervi Paulasto-Kröckel, Matthias Petzold, Horst Theuss, Teruaki Motooka, Veikko Lindroos |
| 250 | |a Third edition | ||
| 264 | 1 | |a Amsterdam ; Oxford ; Cambridge, MA |b Elsevier |c [2020] | |
| 300 | |a 1 Online-Ressource |b Illustrationen, Diagramme | ||
| 336 | |b txt |2 rdacontent | ||
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| 490 | 0 | |a Micro & nano technologies series | |
| 650 | 4 | |a Microelectromechanical systems | |
| 650 | 4 | |a Microelectromechanical systems / Materials | |
| 650 | 4 | |a Silicon / Electric properties | |
| 650 | 4 | |a Microelectromechanical systems | |
| 650 | 4 | |a Microelectromechanical systems |x Materials | |
| 650 | 4 | |a Silicon |x Electric properties | |
| 650 | 0 | 7 | |a Silicium |0 (DE-588)4077445-4 |2 gnd |9 rswk-swf |
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Datensatz im Suchindex
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| dewey-ones | 621 - Applied physics |
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| dewey-sort | 3621.38152 |
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| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| discipline_str_mv | Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | Third edition |
| format | Electronic eBook |
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| id | DE-604.BV047143656 |
| illustrated | Not Illustrated |
| index_date | 2024-07-03T16:36:16Z |
| indexdate | 2024-07-10T09:03:51Z |
| institution | BVB |
| isbn | 9780128177877 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-032549529 |
| oclc_num | 1238063089 |
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| physical | 1 Online-Ressource Illustrationen, Diagramme |
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| publishDate | 2020 |
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| publisher | Elsevier |
| record_format | marc |
| series2 | Micro & nano technologies series |
| spelling | Handbook of silicon based MEMS materials and technologies edited by Markku Tilli, Mervi Paulasto-Kröckel, Matthias Petzold, Horst Theuss, Teruaki Motooka, Veikko Lindroos Third edition Amsterdam ; Oxford ; Cambridge, MA Elsevier [2020] 1 Online-Ressource Illustrationen, Diagramme txt rdacontent c rdamedia cr rdacarrier Micro & nano technologies series Microelectromechanical systems Microelectromechanical systems / Materials Silicon / Electric properties Microelectromechanical systems Materials Silicon Electric properties Silicium (DE-588)4077445-4 gnd rswk-swf Mikrobearbeitung (DE-588)4582923-8 gnd rswk-swf MEMS (DE-588)4824724-8 gnd rswk-swf MEMS (DE-588)4824724-8 s Silicium (DE-588)4077445-4 s Mikrobearbeitung (DE-588)4582923-8 s DE-604 Tilli, Markku edt Paulasto-Krückel, Mervi edt Petzold, Matthias (DE-588)1074550404 edt Theuss, Horst edt Motooka, Teruaki edt Lindroos, Veikko edt Erscheint auch als Druck-Ausgabe 978-0-12-817786-0 |
| spellingShingle | Handbook of silicon based MEMS materials and technologies Microelectromechanical systems Microelectromechanical systems / Materials Silicon / Electric properties Microelectromechanical systems Materials Silicon Electric properties Silicium (DE-588)4077445-4 gnd Mikrobearbeitung (DE-588)4582923-8 gnd MEMS (DE-588)4824724-8 gnd |
| subject_GND | (DE-588)4077445-4 (DE-588)4582923-8 (DE-588)4824724-8 |
| title | Handbook of silicon based MEMS materials and technologies |
| title_auth | Handbook of silicon based MEMS materials and technologies |
| title_exact_search | Handbook of silicon based MEMS materials and technologies |
| title_exact_search_txtP | Handbook of silicon based MEMS materials and technologies |
| title_full | Handbook of silicon based MEMS materials and technologies edited by Markku Tilli, Mervi Paulasto-Kröckel, Matthias Petzold, Horst Theuss, Teruaki Motooka, Veikko Lindroos |
| title_fullStr | Handbook of silicon based MEMS materials and technologies edited by Markku Tilli, Mervi Paulasto-Kröckel, Matthias Petzold, Horst Theuss, Teruaki Motooka, Veikko Lindroos |
| title_full_unstemmed | Handbook of silicon based MEMS materials and technologies edited by Markku Tilli, Mervi Paulasto-Kröckel, Matthias Petzold, Horst Theuss, Teruaki Motooka, Veikko Lindroos |
| title_short | Handbook of silicon based MEMS materials and technologies |
| title_sort | handbook of silicon based mems materials and technologies |
| topic | Microelectromechanical systems Microelectromechanical systems / Materials Silicon / Electric properties Microelectromechanical systems Materials Silicon Electric properties Silicium (DE-588)4077445-4 gnd Mikrobearbeitung (DE-588)4582923-8 gnd MEMS (DE-588)4824724-8 gnd |
| topic_facet | Microelectromechanical systems Microelectromechanical systems / Materials Silicon / Electric properties Microelectromechanical systems Materials Silicon Electric properties Silicium Mikrobearbeitung MEMS |
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