APA (7th ed.) Citation

Tilli, M., Paulasto-Krückel, M., Petzold, M., Theuss, H., Motooka, T., & Lindroos, V. (2020). Handbook of silicon based MEMS materials and technologies (Third edition.). Elsevier.

Chicago Style (17th ed.) Citation

Tilli, Markku, Mervi Paulasto-Krückel, Matthias Petzold, Horst Theuss, Teruaki Motooka, and Veikko Lindroos. Handbook of Silicon Based MEMS Materials and Technologies. Third edition. Amsterdam ; Oxford ; Cambridge, MA: Elsevier, 2020.

MLA (9th ed.) Citation

Tilli, Markku, et al. Handbook of Silicon Based MEMS Materials and Technologies. Third edition. Elsevier, 2020.