Handbook of silicon based MEMS materials and technologies:
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Amsterdam [u.a.]
Elsevier, William Andrew
2020
|
| Edition: | third edition |
| Series: | Micro & nano technologies series
|
| Subjects: | |
| Physical Description: | XXIX, 996 Seiten Illustrationen, Diagramme |
| ISBN: | 9780128177860 |
Staff View
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| id | DE-604.BV046796682 |
| illustrated | Illustrated |
| index_date | 2024-07-03T14:54:42Z |
| indexdate | 2024-07-10T08:54:05Z |
| institution | BVB |
| isbn | 9780128177860 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-032205527 |
| oclc_num | 1164638748 |
| open_access_boolean | |
| owner | DE-1043 DE-83 |
| owner_facet | DE-1043 DE-83 |
| physical | XXIX, 996 Seiten Illustrationen, Diagramme |
| publishDate | 2020 |
| publishDateSearch | 2020 |
| publishDateSort | 2020 |
| publisher | Elsevier, William Andrew |
| record_format | marc |
| series2 | Micro & nano technologies series |
| spelling | Handbook of silicon based MEMS materials and technologies edited by Markku Tilli, Mervi Paulasto-Kröckel, Matthias Petzold, Horst Theuss, Teruaki Mootooka, Veikko Lindroos third edition Amsterdam [u.a.] Elsevier, William Andrew 2020 XXIX, 996 Seiten Illustrationen, Diagramme txt rdacontent n rdamedia nc rdacarrier Micro & nano technologies series Microelectromechanical systems Microelectromechanical systems / Materials Silicon / Electric properties Microelectromechanical systems Materials Silicon Electric properties MEMS (DE-588)4824724-8 gnd rswk-swf Mikrobearbeitung (DE-588)4582923-8 gnd rswk-swf Silicium (DE-588)4077445-4 gnd rswk-swf MEMS (DE-588)4824724-8 s Silicium (DE-588)4077445-4 s Mikrobearbeitung (DE-588)4582923-8 s DE-604 Tilli, Markku Sonstige oth |
| spellingShingle | Handbook of silicon based MEMS materials and technologies Microelectromechanical systems Microelectromechanical systems / Materials Silicon / Electric properties Microelectromechanical systems Materials Silicon Electric properties MEMS (DE-588)4824724-8 gnd Mikrobearbeitung (DE-588)4582923-8 gnd Silicium (DE-588)4077445-4 gnd |
| subject_GND | (DE-588)4824724-8 (DE-588)4582923-8 (DE-588)4077445-4 |
| title | Handbook of silicon based MEMS materials and technologies |
| title_auth | Handbook of silicon based MEMS materials and technologies |
| title_exact_search | Handbook of silicon based MEMS materials and technologies |
| title_exact_search_txtP | Handbook of silicon based MEMS materials and technologies |
| title_full | Handbook of silicon based MEMS materials and technologies edited by Markku Tilli, Mervi Paulasto-Kröckel, Matthias Petzold, Horst Theuss, Teruaki Mootooka, Veikko Lindroos |
| title_fullStr | Handbook of silicon based MEMS materials and technologies edited by Markku Tilli, Mervi Paulasto-Kröckel, Matthias Petzold, Horst Theuss, Teruaki Mootooka, Veikko Lindroos |
| title_full_unstemmed | Handbook of silicon based MEMS materials and technologies edited by Markku Tilli, Mervi Paulasto-Kröckel, Matthias Petzold, Horst Theuss, Teruaki Mootooka, Veikko Lindroos |
| title_short | Handbook of silicon based MEMS materials and technologies |
| title_sort | handbook of silicon based mems materials and technologies |
| topic | Microelectromechanical systems Microelectromechanical systems / Materials Silicon / Electric properties Microelectromechanical systems Materials Silicon Electric properties MEMS (DE-588)4824724-8 gnd Mikrobearbeitung (DE-588)4582923-8 gnd Silicium (DE-588)4077445-4 gnd |
| topic_facet | Microelectromechanical systems Microelectromechanical systems / Materials Silicon / Electric properties Microelectromechanical systems Materials Silicon Electric properties MEMS Mikrobearbeitung Silicium |
| work_keys_str_mv | AT tillimarkku handbookofsiliconbasedmemsmaterialsandtechnologies |