(2020). Handbook of silicon based MEMS materials and technologies (third edition.). Elsevier, William Andrew.
Chicago Style (17th ed.) CitationHandbook of Silicon Based MEMS Materials and Technologies. third edition. Amsterdam [u.a.]: Elsevier, William Andrew, 2020.
MLA (9th ed.) CitationHandbook of Silicon Based MEMS Materials and Technologies. third edition. Elsevier, William Andrew, 2020.
Warning: These citations may not always be 100% accurate.