APA (7th ed.) Citation

(2020). Handbook of silicon based MEMS materials and technologies (third edition.). Elsevier, William Andrew.

Chicago Style (17th ed.) Citation

Handbook of Silicon Based MEMS Materials and Technologies. third edition. Amsterdam [u.a.]: Elsevier, William Andrew, 2020.

MLA (9th ed.) Citation

Handbook of Silicon Based MEMS Materials and Technologies. third edition. Elsevier, William Andrew, 2020.

Warning: These citations may not always be 100% accurate.