APA (7th ed.) Citation

Guerrero, D. J. (2020). A lithographer's guide to patterning CMOS devices with directed self-assembly. SPIE Press. https://doi.org/10.1117/3.2567441

Chicago Style (17th ed.) Citation

Guerrero, Douglas J. A Lithographer's Guide to Patterning CMOS Devices with Directed Self-assembly. Bellingham, Washington, USA: SPIE Press, 2020. https://doi.org/10.1117/3.2567441.

MLA (9th ed.) Citation

Guerrero, Douglas J. A Lithographer's Guide to Patterning CMOS Devices with Directed Self-assembly. SPIE Press, 2020. https://doi.org/10.1117/3.2567441.