DIY MEMS: Fabricating Microelectromechanical Systems in Open Use Labs
Saved in:
| Main Author: | |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Cham
Springer International Publishing
2019
Cham Springer |
| Edition: | 1st ed. 2019 |
| Subjects: | |
| Online Access: | TUM01 UBM01 UBT01 Volltext |
| Physical Description: | 1 Online-Ressource (XVI, 188 p. 19 illus., 4 illus. in color) |
| ISBN: | 9783030330736 |
| DOI: | 10.1007/978-3-030-33073-6 |
Staff View
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Record in the Search Index
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| dewey-full | 621.3815 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
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| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
| doi_str_mv | 10.1007/978-3-030-33073-6 |
| edition | 1st ed. 2019 |
| format | Electronic eBook |
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| id | DE-604.BV046284593 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T08:40:33Z |
| institution | BVB |
| isbn | 9783030330736 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-031662173 |
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| owner_facet | DE-91 DE-BY-TUM DE-19 DE-BY-UBM DE-703 |
| physical | 1 Online-Ressource (XVI, 188 p. 19 illus., 4 illus. in color) |
| psigel | ZDB-2-PHA ZDB-2-PHA_2019_Fremddaten |
| publishDate | 2019 |
| publishDateSearch | 2019 |
| publishDateSort | 2019 |
| publisher | Springer International Publishing Springer |
| record_format | marc |
| spelling | Munro, Deborah Verfasser aut DIY MEMS Fabricating Microelectromechanical Systems in Open Use Labs by Deborah Munro 1st ed. 2019 Cham Springer International Publishing 2019 Cham Springer 1 Online-Ressource (XVI, 188 p. 19 illus., 4 illus. in color) txt rdacontent c rdamedia cr rdacarrier Electronic Circuits and Devices Electronics and Microelectronics, Instrumentation Biomedical Engineering/Biotechnology Nanotechnology and Microengineering Industrial and Production Engineering Electronic circuits Electronics Microelectronics Biomedical engineering Nanotechnology Industrial engineering Production engineering MEMS (DE-588)4824724-8 gnd rswk-swf MEMS (DE-588)4824724-8 s DE-604 Erscheint auch als Druck-Ausgabe 978-3-030-33072-9 Erscheint auch als Druck-Ausgabe 978-3-030-33074-3 Erscheint auch als Druck-Ausgabe 978-3-030-33075-0 https://doi.org/10.1007/978-3-030-33073-6 Verlag URL des Erstveröffentlichers Volltext |
| spellingShingle | Munro, Deborah DIY MEMS Fabricating Microelectromechanical Systems in Open Use Labs Electronic Circuits and Devices Electronics and Microelectronics, Instrumentation Biomedical Engineering/Biotechnology Nanotechnology and Microengineering Industrial and Production Engineering Electronic circuits Electronics Microelectronics Biomedical engineering Nanotechnology Industrial engineering Production engineering MEMS (DE-588)4824724-8 gnd |
| subject_GND | (DE-588)4824724-8 |
| title | DIY MEMS Fabricating Microelectromechanical Systems in Open Use Labs |
| title_auth | DIY MEMS Fabricating Microelectromechanical Systems in Open Use Labs |
| title_exact_search | DIY MEMS Fabricating Microelectromechanical Systems in Open Use Labs |
| title_full | DIY MEMS Fabricating Microelectromechanical Systems in Open Use Labs by Deborah Munro |
| title_fullStr | DIY MEMS Fabricating Microelectromechanical Systems in Open Use Labs by Deborah Munro |
| title_full_unstemmed | DIY MEMS Fabricating Microelectromechanical Systems in Open Use Labs by Deborah Munro |
| title_short | DIY MEMS |
| title_sort | diy mems fabricating microelectromechanical systems in open use labs |
| title_sub | Fabricating Microelectromechanical Systems in Open Use Labs |
| topic | Electronic Circuits and Devices Electronics and Microelectronics, Instrumentation Biomedical Engineering/Biotechnology Nanotechnology and Microengineering Industrial and Production Engineering Electronic circuits Electronics Microelectronics Biomedical engineering Nanotechnology Industrial engineering Production engineering MEMS (DE-588)4824724-8 gnd |
| topic_facet | Electronic Circuits and Devices Electronics and Microelectronics, Instrumentation Biomedical Engineering/Biotechnology Nanotechnology and Microengineering Industrial and Production Engineering Electronic circuits Electronics Microelectronics Biomedical engineering Nanotechnology Industrial engineering Production engineering MEMS |
| url | https://doi.org/10.1007/978-3-030-33073-6 |
| work_keys_str_mv | AT munrodeborah diymemsfabricatingmicroelectromechanicalsystemsinopenuselabs |