Chemical vapour deposition (CVD): adavances, technology, and applications
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| Format: | Book |
| Language: | English |
| Published: |
Boca Raton, Fla.
Taylor & Francis, CRC Press
[2019]
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| Series: | Series in materials science and engineering
|
| Subjects: | |
| Online Access: | Inhaltsverzeichnis |
| Physical Description: | XVII, 398 Seiten Illustrationen, Diagramme |
| ISBN: | 9781466597761 |
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MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV046150298 | ||
| 003 | DE-604 | ||
| 005 | 20191004 | ||
| 007 | t | ||
| 008 | 190906s2019 xxua||| |||| 00||| eng d | ||
| 010 | |a 018013160 | ||
| 020 | |a 9781466597761 |c hardback |9 978-1-4665-9776-1 | ||
| 035 | |a (OCoLC)1101431545 | ||
| 035 | |a (DE-599)BVBBV046150298 | ||
| 040 | |a DE-604 |b ger |e rda | ||
| 041 | 0 | |a eng | |
| 044 | |a xxu |c US | ||
| 049 | |a DE-29T | ||
| 050 | 0 | |a TS695 | |
| 082 | 0 | |a 620.1/15 |2 23 | |
| 245 | 1 | 0 | |a Chemical vapour deposition (CVD) |b adavances, technology, and applications |c Edited by Kwang Leong Choy |
| 264 | 1 | |a Boca Raton, Fla. |b Taylor & Francis, CRC Press |c [2019] | |
| 300 | |a XVII, 398 Seiten |b Illustrationen, Diagramme | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Series in materials science and engineering | |
| 650 | 4 | |a Chemical vapor deposition | |
| 650 | 4 | |a Nanostructured materials | |
| 700 | 1 | |a Choy, Kwang Leong |4 edt | |
| 856 | 4 | 2 | |m HEBIS Datenaustausch |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=031530451&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-031530451 | ||
Record in the Search Index
| _version_ | 1804180492500598784 |
|---|---|
| adam_text | Contents
Editor
Contributors
1 Introduction
Kwang Leong Choy and Cigang Xu
1 1 Chemical vapour deposition: Fundamentals and process principles
111 Definition
112A brief history and development of CVD
113 Fundamentals and process principles
1131 Thermodynamics/kinetics/mass transport of CVD
1132 CVD precursors delivery, properties, and chemistry
1133 CVD process parameters and control/monitoring to ensure
reliability and reproducibility
Advances in CVD deposition technologies, growth of materials, and applications 14
121 Large-area and high-volume production 15
122 Multiple functions 15
123 New materials and processes 15
Variant vacuum CVD methods 17
131 Vacuum-based methods 17
1311 Plasma-enhanced CVD 17
1312 Microwave-assisted CVD 20
1313 Metalorganic CVD 23
1314 Molecular-beam epitaxy 28
1315 Chemical-beam epitaxy 34
1316 Atomic layer deposition 37
1317 Energetic ion-assisted CVD 43
1318 Laser/photo-assisted CVD 49
132 Non-vacuum methods 51
1321 Atmospheric pressure CVD 51
1322 Atmospheric pressure MOCVD 58
1323 Aerosol-assisted CVD 58
1324 Electrostatic spray-assisted vapour deposition 62
1325 Flame-assisted CVD 69
xv
xvii
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Contents
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1 4
1 5
1 6
CVD of polymers , ec| materials to address energy,
CVD modelling and «** ^ process,ng advance
CVD and its qrafld challenges
1 7
1 8
1 9
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2225
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2 222
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222 10
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cvDand:Ta^
engineering, ana o
161 Energy
y62 Engineering
sust^nability, and versatility
1 v Summary
Acknowledgement
Cigang Xu and Kwang Leong Choy
2 1 Introduction „ prhanism structure, and properties
“ P2Tr1r^Sn7methods using solid precursors
2211 Condensation method
2212 Laser-ablation method
2213 Arc-discharge method
2214 Reactive sputtering method
2215 lon-beam-based method
222 Processing methods using liquid or vapour precursors
- * Thermal CVD method
MOCVD method
Spray pyrolysis/aerosol-assisted CVD
Flame synthesis
Flame spray pyrolysis
Laser pyrolysis
Plasma-based synthesis
MBE method
Ionisation method
Atomic layer deposition
223 Scale-up production
Scientific and technical issues and process control for producing high-performance
nanoparticles for applications in structural, clean energy, biomedical, and
environmental sectors
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2 3
2 3 1
2 3 2
2 3 3
2 3 4
Structural applications
Clean energy
Biomedical applications
Environmental
2 4 Summary
References
CVD of nanowires and nanotubes, r
Cigang Xu and Kwang Leong Choy
3 1 Introduction
3 2 Preparation, structure,
“3 0 1
mass
production, and industrialization
Preparation, structure, properties =,„,4
321 Carbon nanotubeSP d appllcatlons nanostructures
322 Si and Ge nanowires
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Contents ix
323 III—V ID nanomaterials
324 II—Vi ID nanomaterials
325 Oxides
326 Carbides
327 Nitrides
328 Elemental nanowires
329 Complex structures of ID nanomaterial
3 2 10 Structural applications
3 2 11 Clean energy applications
3 2 12 Biomedical applications
3 2 13 Environmental applications
3 3 Scale-up prototype production and industrialization of nanowires and nanotubes
331 Scale-up prototype production of nanowires and nanotubes
3311 Carbon nanotubes
3312 Multi-walled carbon nanotubes
3313 Bush-style MWNTs
3314 Double-walled carbon nanotubes
3315 Single-walled carbon nanotubes
3316 Bush-style SWNTs
3317 Other ID materials
332 Industrialization of nanotubes
3321 Industrialisation of multi-walled carbon nanotubes
3322 Industrialisation of single-walled carbon nanotubes
3323 Environment, health, and safety issues
3324 Summary and outlook
References
CVD of flat monolayer of 2D atomics honeycomb structure and their applications
Manoj Kumar Singh, Dhananjay K Sharma, Gonzalo Otero-lrurueta, and Maria J Hortigüela
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245
Introduction 245
Graphene 246
421 Electronic structure of single-layer graphene 246
422 Graphene properties and synthesis 248
4221 Graphene on single crystals grown under UHV conditions 248
4222 Liquid phase exfoliation 249
4223 Graphene on silicon carbide 250
4224 Graphene by state-of-the-art technique chemical vapour deposition 252
423 From the laboratory to the industry 253
424 Quality comparison 257 258 259
425 Doping of graphene
Silicene 431 Electronic structure of silicene 260
432 Synthesis of silicene on surfaces 4321 First synthesis of silicene on silver substrates 260 260 262 262
4322 Silicene on other substrates
433 Controversy - discrepancies 263
434 From the laboratory to the industry
x Contents
4 4 Germanene
441 Electronic structure of germanene
442 First synthesis of germanene on gold
443 Germanene on platinum
4 5 Conclusions
References
5 CVD of superlattice films and their applications
Guillaume Savelli
5 1 Introduction
511 Definitions
512 Superlattice band structures
513 Superlattices deposition techniques
5 2 CVD processing, deposition mechanisms, and structures
521 Superlattices processing steps
522 QWSL and QDSL deposition mechanisms
523 QWSL and QDSL structures
5 3 Main QWSL and QDSL properties
531 Mechanical properties
532 Electrical properties
533 Optical properties
534 Thermal properties
5 4 Applications
5411 Solar cells
5412 Avalanche photodiodes
5413 Inter-sub-band detectors
5414 VCSEL
542 Optoelectronics
543 Thermoelectrics
544 Future prospects
References
CVD coatings
Kwang Leong Choy
6 1 Advanced protective coatings for cutting tools
Thermal barrier coatings (TBCS)
621 Conventional thermally assisted CVD
622 Plasma-assisted CVD
623 Laser-ace -*--1—
6 2
6 3
6 4
6 5
6 6
6 7
6 8
— « iwiuai utermaw
622 Plasma-assisted CVD
623 Laser-assisted CVD
624 Electrostatic spray-assisted vapour depositi
Diffusion coatings
Thick silicon coatings
Thick metal coatings
Polymeric coatings
661 Applications
Fibre coatings and ceramic monofilament fibre prod
671 Boron fibres
672 SiC fibres
673 Applications
Optical fibres
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Contents xi
6 9 Free-standing shapes and 3D deposition
691 Thin free-standing foils and membranes
692 Thick disks and wafers
693 Near net-shape free-standing shaped articles
694 Free-standing micro-objects
Acknowledgement
References
CVD of nanocomposite coatings
Yuri Zhuk and Kwang Leong Choy
7 1 Thermal CVD of nanostructured tungsten carbide-based nanocomposite coatinqs
711 Background
712 Coating deposition method, structure, and composition
7121 Coating deposition method
7122 Nano-structure of Hardide coatings
7123 Types of Hardide coatings and their composition
713 Benefits of the coating nanostructure
7131 Combination of high hardness with enhanced toughness and
resistance to impact and deformations
7132 Coating retaining surface finish after operation in abrasive and
corrosive conditions
7133 Absence of porosity and corrosion-protective properties of
Hardide coating
7134 Enhanced wear and erosion resistance of Hardide coatings
714 Examples of Hardide nanocomposite coating applications
7141 Coating complex shapes and internal surfaces
7142 Coating severe-service ball valves and their performance
7143 Applications with oil drilling and downhole tools
7144 Applications in pumps
7145 Hardide as a hard chrome replacement
715 Summary
7 2 PECVD and LPCVD of hard/superhard ternary and quaternary nanocomposite
coatings
73A hybrid PVD and CVD of hard nanocomposite films
731 Single-layer nanocomposite film
732 Multilayered nanocomposite coatings
7 4 Laser-assisted CVD of oxide-based nanocomposite films
7 5 Sequential CVD deposition of oxide-based nanocomposite films
7 6 AACVD of oxide-based nanocomposite films and coatings
761 AACVD of Au in transition metal oxides nanocomposites
762 AACVD of Pt-SnOz nanocomposite coatings
763 AACVD of IF-WS2/Cr203 nanocomposite coatings
7 7 Low-pressure CVD of silicon/graphite nanocomposite electrode
7 8 CVD of polymer-silica aerogel-based nanocomposites
7 9 Conclusions
Acknowledgement
References
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xir Contents
Chemical vapour infiltration of composites and their applications
Maria-Beatrice Coltelli and Andrea Lazzeri
8 1 Introduction
Definitions
821 Fibres for CMCs
822 Preforms for CMCs
823 Matrices for CMCs
Variants and classification of CVI techniques
CVI Processing steps, deposition mechanisms, and chemistry
CVI equipment
Properties of CVI-produced composites
Numerical modelling of the CVI process
Correlations between process, morphology, and final application
Applications of CVI
Advantages and drawbacks of CVI
Recent investigations on CVI process
Perspectives and challenges for CVI
Summary
Acknowledgements
Additional readings
References
8 2
8 3
8 4
8 5
8 6
8 7
8 8
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8 10
8 11
8 12
8 13
Index
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|
| any_adam_object | 1 |
| author2 | Choy, Kwang Leong |
| author2_role | edt |
| author2_variant | k l c kl klc |
| author_facet | Choy, Kwang Leong |
| building | Verbundindex |
| bvnumber | BV046150298 |
| callnumber-first | T - Technology |
| callnumber-label | TS695 |
| callnumber-raw | TS695 |
| callnumber-search | TS695 |
| callnumber-sort | TS 3695 |
| callnumber-subject | TS - Manufactures |
| ctrlnum | (OCoLC)1101431545 (DE-599)BVBBV046150298 |
| dewey-full | 620.1/15 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 620 - Engineering and allied operations |
| dewey-raw | 620.1/15 |
| dewey-search | 620.1/15 |
| dewey-sort | 3620.1 215 |
| dewey-tens | 620 - Engineering and allied operations |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01295nam a2200349 c 4500</leader><controlfield tag="001">BV046150298</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20191004 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">190906s2019 xxua||| |||| 00||| eng d</controlfield><datafield tag="010" ind1=" " ind2=" "><subfield code="a">018013160</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9781466597761</subfield><subfield code="c">hardback</subfield><subfield code="9">978-1-4665-9776-1</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)1101431545</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV046150298</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rda</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="044" ind1=" " ind2=" "><subfield code="a">xxu</subfield><subfield code="c">US</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-29T</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TS695</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">620.1/15</subfield><subfield code="2">23</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Chemical vapour deposition (CVD)</subfield><subfield code="b">adavances, technology, and applications</subfield><subfield code="c">Edited by Kwang Leong Choy</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Boca Raton, Fla.</subfield><subfield code="b">Taylor & Francis, CRC Press</subfield><subfield code="c">[2019]</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XVII, 398 Seiten</subfield><subfield code="b">Illustrationen, Diagramme</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Series in materials science and engineering</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Chemical vapor deposition</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Nanostructured materials</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Choy, Kwang Leong</subfield><subfield code="4">edt</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">HEBIS Datenaustausch</subfield><subfield code="q">application/pdf</subfield><subfield code="u">http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=031530451&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA</subfield><subfield code="3">Inhaltsverzeichnis</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-031530451</subfield></datafield></record></collection> |
| id | DE-604.BV046150298 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T08:36:37Z |
| institution | BVB |
| isbn | 9781466597761 |
| language | English |
| lccn | 018013160 |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-031530451 |
| oclc_num | 1101431545 |
| open_access_boolean | |
| owner | DE-29T |
| owner_facet | DE-29T |
| physical | XVII, 398 Seiten Illustrationen, Diagramme |
| publishDate | 2019 |
| publishDateSearch | 2019 |
| publishDateSort | 2019 |
| publisher | Taylor & Francis, CRC Press |
| record_format | marc |
| series2 | Series in materials science and engineering |
| spelling | Chemical vapour deposition (CVD) adavances, technology, and applications Edited by Kwang Leong Choy Boca Raton, Fla. Taylor & Francis, CRC Press [2019] XVII, 398 Seiten Illustrationen, Diagramme txt rdacontent n rdamedia nc rdacarrier Series in materials science and engineering Chemical vapor deposition Nanostructured materials Choy, Kwang Leong edt HEBIS Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=031530451&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Chemical vapour deposition (CVD) adavances, technology, and applications Chemical vapor deposition Nanostructured materials |
| title | Chemical vapour deposition (CVD) adavances, technology, and applications |
| title_auth | Chemical vapour deposition (CVD) adavances, technology, and applications |
| title_exact_search | Chemical vapour deposition (CVD) adavances, technology, and applications |
| title_full | Chemical vapour deposition (CVD) adavances, technology, and applications Edited by Kwang Leong Choy |
| title_fullStr | Chemical vapour deposition (CVD) adavances, technology, and applications Edited by Kwang Leong Choy |
| title_full_unstemmed | Chemical vapour deposition (CVD) adavances, technology, and applications Edited by Kwang Leong Choy |
| title_short | Chemical vapour deposition (CVD) |
| title_sort | chemical vapour deposition cvd adavances technology and applications |
| title_sub | adavances, technology, and applications |
| topic | Chemical vapor deposition Nanostructured materials |
| topic_facet | Chemical vapor deposition Nanostructured materials |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=031530451&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT choykwangleong chemicalvapourdepositioncvdadavancestechnologyandapplications |