Fundamental principles of engineering nanometrology:
The principles of engineering metrology applied to the micro- and nanoscale: essential reading for all scientists and engineers involved in the commercialisation of nanotechnology and measurement processes requiring accuracy at the nanoscale. The establishment of common standards will be an essentia...
Gespeichert in:
| 1. Verfasser: | |
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| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Oxford Amsterdam
William Andrew Elsevier Science
© 2010
|
| Ausgabe: | 1st ed |
| Schriftenreihe: | Micro & nano technologies
|
| Schlagworte: | |
| Online-Zugang: | FLA01 URL des Erstveröffentlichers |
| Zusammenfassung: | The principles of engineering metrology applied to the micro- and nanoscale: essential reading for all scientists and engineers involved in the commercialisation of nanotechnology and measurement processes requiring accuracy at the nanoscale. The establishment of common standards will be an essential key to unlocking the commercial potential of Micro- and Nanotechnologies (MNT), enabling fabrication plants to interchange parts, packaging and design rules. Effectively MNT standardization will provide the micro- and nanoscale equivalents of macro-scale nuts and bolts or house bricks. Currently there is a major thrust for standardization of MNT activities, with committees of the ISO, IEC and numerous national and regional committees being set up. In this book Professor Richard Leach, of the UK's National Physical Laboratory (NPL) makes a significant contribution to standardization in the field of MNT, extending the principles of engineering metrology to the micro- and nanoscale, with a focus on dimensional and mass metrology. The principles and techniques covered in this book form the essential toolkit for scientists and engineers involved in the commercialisation of nanotechnology and measurement processes requiring accuracy at the nanoscale. Key topics covered include: Basic metrological terminology, and the highly important topic of measurement uncertainty. Instrumentation, including an introduction to the laser Measurement of length using optical interferometry, including gauge block interferometry Displacement measurement and sensors Surface texture measurement, stylus, optical and scanning probe instruments, calibration, profile and areal characterisation Coordinate metrology Low mass and force metrology About the Author Professor Richard Leach is a Principal Research Scientist in the Mass & Dimensional Group, Engineering Measurement Division at the National Physical Laboratory (NPL), UK. |
| Beschreibung: | Includes bibliographical references and index |
| Beschreibung: | 1 online resource (xxvi, 321 pages) illustrations |
| ISBN: | 9780080964546 0080964540 1437778321 9781437778328 |
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| 520 | |a In this book Professor Richard Leach, of the UK's National Physical Laboratory (NPL) makes a significant contribution to standardization in the field of MNT, extending the principles of engineering metrology to the micro- and nanoscale, with a focus on dimensional and mass metrology. The principles and techniques covered in this book form the essential toolkit for scientists and engineers involved in the commercialisation of nanotechnology and measurement processes requiring accuracy at the nanoscale. Key topics covered include: Basic metrological terminology, and the highly important topic of measurement uncertainty. | ||
| 520 | |a Instrumentation, including an introduction to the laser Measurement of length using optical interferometry, including gauge block interferometry Displacement measurement and sensors Surface texture measurement, stylus, optical and scanning probe instruments, calibration, profile and areal characterisation Coordinate metrology Low mass and force metrology About the Author Professor Richard Leach is a Principal Research Scientist in the Mass & Dimensional Group, Engineering Measurement Division at the National Physical Laboratory (NPL), UK. | ||
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Datensatz im Suchindex
| _version_ | 1804180444426534912 |
|---|---|
| any_adam_object | |
| author | Leach, R. K. |
| author_facet | Leach, R. K. |
| author_role | aut |
| author_sort | Leach, R. K. |
| author_variant | r k l rk rkl |
| building | Verbundindex |
| bvnumber | BV046125388 |
| collection | ZDB-33-ESD |
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| dewey-ones | 620 - Engineering and allied operations |
| dewey-raw | 620.50287 |
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| dewey-tens | 620 - Engineering and allied operations |
| edition | 1st ed |
| format | Electronic eBook |
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| id | DE-604.BV046125388 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T08:35:51Z |
| institution | BVB |
| isbn | 9780080964546 0080964540 1437778321 9781437778328 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-031505842 |
| oclc_num | 528581485 |
| open_access_boolean | |
| physical | 1 online resource (xxvi, 321 pages) illustrations |
| psigel | ZDB-33-ESD ZDB-33-ESD FLA_PDA_ESD |
| publishDate | 2010 |
| publishDateSearch | 2010 |
| publishDateSort | 2010 |
| publisher | William Andrew Elsevier Science |
| record_format | marc |
| series2 | Micro & nano technologies |
| spelling | Leach, R. K. Verfasser aut Fundamental principles of engineering nanometrology by Richard K. Leach 1st ed Oxford Amsterdam William Andrew Elsevier Science © 2010 1 online resource (xxvi, 321 pages) illustrations txt rdacontent c rdamedia cr rdacarrier Micro & nano technologies Includes bibliographical references and index The principles of engineering metrology applied to the micro- and nanoscale: essential reading for all scientists and engineers involved in the commercialisation of nanotechnology and measurement processes requiring accuracy at the nanoscale. The establishment of common standards will be an essential key to unlocking the commercial potential of Micro- and Nanotechnologies (MNT), enabling fabrication plants to interchange parts, packaging and design rules. Effectively MNT standardization will provide the micro- and nanoscale equivalents of macro-scale nuts and bolts or house bricks. Currently there is a major thrust for standardization of MNT activities, with committees of the ISO, IEC and numerous national and regional committees being set up. In this book Professor Richard Leach, of the UK's National Physical Laboratory (NPL) makes a significant contribution to standardization in the field of MNT, extending the principles of engineering metrology to the micro- and nanoscale, with a focus on dimensional and mass metrology. The principles and techniques covered in this book form the essential toolkit for scientists and engineers involved in the commercialisation of nanotechnology and measurement processes requiring accuracy at the nanoscale. Key topics covered include: Basic metrological terminology, and the highly important topic of measurement uncertainty. Instrumentation, including an introduction to the laser Measurement of length using optical interferometry, including gauge block interferometry Displacement measurement and sensors Surface texture measurement, stylus, optical and scanning probe instruments, calibration, profile and areal characterisation Coordinate metrology Low mass and force metrology About the Author Professor Richard Leach is a Principal Research Scientist in the Mass & Dimensional Group, Engineering Measurement Division at the National Physical Laboratory (NPL), UK. TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS. bisacsh Metrology fast Microtechnology fast Nanotechnology fast Metrologie swd Nanostruktur swd Nanotechnologie swd Nanotechnologies eclas Métrologie eclas Nanotechnology Microtechnology Metrology Metrologie (DE-588)4169749-2 gnd rswk-swf Nanotechnologie (DE-588)4327470-5 gnd rswk-swf Nanostruktur (DE-588)4204530-7 gnd rswk-swf Nanostruktur (DE-588)4204530-7 s Nanotechnologie (DE-588)4327470-5 s Metrologie (DE-588)4169749-2 s 1\p DE-604 http://www.sciencedirect.com/science/book/9780080964546 Verlag URL des Erstveröffentlichers Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Leach, R. K. Fundamental principles of engineering nanometrology TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS. bisacsh Metrology fast Microtechnology fast Nanotechnology fast Metrologie swd Nanostruktur swd Nanotechnologie swd Nanotechnologies eclas Métrologie eclas Nanotechnology Microtechnology Metrology Metrologie (DE-588)4169749-2 gnd Nanotechnologie (DE-588)4327470-5 gnd Nanostruktur (DE-588)4204530-7 gnd |
| subject_GND | (DE-588)4169749-2 (DE-588)4327470-5 (DE-588)4204530-7 |
| title | Fundamental principles of engineering nanometrology |
| title_auth | Fundamental principles of engineering nanometrology |
| title_exact_search | Fundamental principles of engineering nanometrology |
| title_full | Fundamental principles of engineering nanometrology by Richard K. Leach |
| title_fullStr | Fundamental principles of engineering nanometrology by Richard K. Leach |
| title_full_unstemmed | Fundamental principles of engineering nanometrology by Richard K. Leach |
| title_short | Fundamental principles of engineering nanometrology |
| title_sort | fundamental principles of engineering nanometrology |
| topic | TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS. bisacsh Metrology fast Microtechnology fast Nanotechnology fast Metrologie swd Nanostruktur swd Nanotechnologie swd Nanotechnologies eclas Métrologie eclas Nanotechnology Microtechnology Metrology Metrologie (DE-588)4169749-2 gnd Nanotechnologie (DE-588)4327470-5 gnd Nanostruktur (DE-588)4204530-7 gnd |
| topic_facet | TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS. Metrology Microtechnology Nanotechnology Metrologie Nanostruktur Nanotechnologie Nanotechnologies Métrologie |
| url | http://www.sciencedirect.com/science/book/9780080964546 |
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