High density plasma sources: design, physics, and performance
This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and planarization, plasma enhanced chemical vapor deposition of thin films, sputtered deposition of metals and dielec...
Gespeichert in:
| Format: | Elektronisch E-Book |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Park Ridge, N.J.
Noyes Publications
© 1995
|
| Schriftenreihe: | Materials science and process technology series
|
| Schlagworte: | |
| Online-Zugang: | FLA01 URL des Erstveröffentlichers |
| Zusammenfassung: | This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and planarization, plasma enhanced chemical vapor deposition of thin films, sputtered deposition of metals and dielectrics, epitaxial growth of silicon and GaAs, and many other applications. This is a comprehensive survey and a detailed description of most advanced high density plasma sources used in plasma processing |
| Beschreibung: | Includes bibliographical references and index |
| Beschreibung: | 1 online resource (xx, 445 pages) illustrations |
| ISBN: | 1591240638 9781591240631 9780815513773 0815513771 9780080946160 008094616X 9780815517887 0815517882 |
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| 650 | 7 | |a TECHNOLOGY & ENGINEERING / Mechanical |2 bisacsh | |
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| 650 | 7 | |a Plasma density |2 fast | |
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Datensatz im Suchindex
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| dewey-full | 530.4/42 |
| dewey-hundreds | 500 - Natural sciences and mathematics |
| dewey-ones | 530 - Physics |
| dewey-raw | 530.4/42 |
| dewey-search | 530.4/42 |
| dewey-sort | 3530.4 242 |
| dewey-tens | 530 - Physics |
| discipline | Physik Werkstoffwissenschaften / Fertigungstechnik |
| format | Electronic eBook |
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| id | DE-604.BV046124917 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T08:35:51Z |
| institution | BVB |
| isbn | 1591240638 9781591240631 9780815513773 0815513771 9780080946160 008094616X 9780815517887 0815517882 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-031505371 |
| oclc_num | 49708645 |
| open_access_boolean | |
| physical | 1 online resource (xx, 445 pages) illustrations |
| psigel | ZDB-33-ESD ZDB-33-ESD FLA_PDA_ESD |
| publishDate | 1995 |
| publishDateSearch | 1995 |
| publishDateSort | 1995 |
| publisher | Noyes Publications |
| record_format | marc |
| series2 | Materials science and process technology series |
| spelling | High density plasma sources design, physics, and performance edited by Oleg A. Popov Park Ridge, N.J. Noyes Publications © 1995 1 online resource (xx, 445 pages) illustrations txt rdacontent c rdamedia cr rdacarrier Materials science and process technology series Includes bibliographical references and index This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and planarization, plasma enhanced chemical vapor deposition of thin films, sputtered deposition of metals and dielectrics, epitaxial growth of silicon and GaAs, and many other applications. This is a comprehensive survey and a detailed description of most advanced high density plasma sources used in plasma processing TECHNOLOGY & ENGINEERING / Mechanical bisacsh High temperature plasmas fast Plasma density fast Plasma generators fast Plasma density High temperature plasmas Plasma generators Heißes Plasma (DE-588)4350270-2 gnd rswk-swf Industrie (DE-588)4026779-9 gnd rswk-swf Hochleistungswerkstoff (DE-588)4312250-4 gnd rswk-swf Plasmaerzeugung (DE-588)4174826-8 gnd rswk-swf Polymere (DE-588)4046699-1 gnd rswk-swf Heißes Plasma (DE-588)4350270-2 s Plasmaerzeugung (DE-588)4174826-8 s 1\p DE-604 Industrie (DE-588)4026779-9 s Polymere (DE-588)4046699-1 s Hochleistungswerkstoff (DE-588)4312250-4 s DE-604 Popov, Oleg A. Sonstige oth Erscheint auch als Druck-Ausgabe 9780815517894 http://www.sciencedirect.com/science/book/9780815513773 Verlag URL des Erstveröffentlichers Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | High density plasma sources design, physics, and performance TECHNOLOGY & ENGINEERING / Mechanical bisacsh High temperature plasmas fast Plasma density fast Plasma generators fast Plasma density High temperature plasmas Plasma generators Heißes Plasma (DE-588)4350270-2 gnd Industrie (DE-588)4026779-9 gnd Hochleistungswerkstoff (DE-588)4312250-4 gnd Plasmaerzeugung (DE-588)4174826-8 gnd Polymere (DE-588)4046699-1 gnd |
| subject_GND | (DE-588)4350270-2 (DE-588)4026779-9 (DE-588)4312250-4 (DE-588)4174826-8 (DE-588)4046699-1 |
| title | High density plasma sources design, physics, and performance |
| title_auth | High density plasma sources design, physics, and performance |
| title_exact_search | High density plasma sources design, physics, and performance |
| title_full | High density plasma sources design, physics, and performance edited by Oleg A. Popov |
| title_fullStr | High density plasma sources design, physics, and performance edited by Oleg A. Popov |
| title_full_unstemmed | High density plasma sources design, physics, and performance edited by Oleg A. Popov |
| title_short | High density plasma sources |
| title_sort | high density plasma sources design physics and performance |
| title_sub | design, physics, and performance |
| topic | TECHNOLOGY & ENGINEERING / Mechanical bisacsh High temperature plasmas fast Plasma density fast Plasma generators fast Plasma density High temperature plasmas Plasma generators Heißes Plasma (DE-588)4350270-2 gnd Industrie (DE-588)4026779-9 gnd Hochleistungswerkstoff (DE-588)4312250-4 gnd Plasmaerzeugung (DE-588)4174826-8 gnd Polymere (DE-588)4046699-1 gnd |
| topic_facet | TECHNOLOGY & ENGINEERING / Mechanical High temperature plasmas Plasma density Plasma generators Heißes Plasma Industrie Hochleistungswerkstoff Plasmaerzeugung Polymere |
| url | http://www.sciencedirect.com/science/book/9780815513773 |
| work_keys_str_mv | AT popovolega highdensityplasmasourcesdesignphysicsandperformance |