Semiconductor industrial hygiene handbook: monitoring, ventilation, equipment, and ergonomics
This book provides a review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. Chapters include industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal...
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| Main Author: | |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Park Ridge, N.J., U.S.A.
Noyes Publications
© 1995
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| Series: | Materials science and process technology series
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| Subjects: | |
| Online Access: | FLA01 Volltext |
| Summary: | This book provides a review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. Chapters include industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal protective equipment, plan review, and records retention. While much of the information in these chapters can be applied to all industries, the focus and orientation is specific to issues in the semiconductor industry |
| Item Description: | Includes bibliographical references and index |
| Physical Description: | 1 online resource (xv, 348 pages) illustrations |
| ISBN: | 1591241448 9781591241447 9780815513698 0815513690 |
Staff View
MARC
| LEADER | 00000nmm a2200000zc 4500 | ||
|---|---|---|---|
| 001 | BV046124809 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | cr|uuu---uuuuu | ||
| 008 | 190827s1995 |||| o||u| ||||||eng d | ||
| 020 | |a 1591241448 |9 1-59124-144-8 | ||
| 020 | |a 9781591241447 |9 978-1-59124-144-7 | ||
| 020 | |a 9780815513698 |9 978-0-8155-1369-8 | ||
| 020 | |a 0815513690 |9 0-8155-1369-0 | ||
| 035 | |a (ZDB-33-ESD)ocm49708613 | ||
| 035 | |a (OCoLC)49708613 | ||
| 035 | |a (DE-599)BVBBV046124809 | ||
| 040 | |a DE-604 |b ger |e rda | ||
| 041 | 0 | |a eng | |
| 082 | 0 | |a 621.3815/20289 |2 22 | |
| 100 | 1 | |a Williams, Michael E. |d 1949- |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Semiconductor industrial hygiene handbook |b monitoring, ventilation, equipment, and ergonomics |c by Michael E. Williams and David G. Baldwin ; contributing author, Paul C. Manz |
| 264 | 1 | |a Park Ridge, N.J., U.S.A. |b Noyes Publications |c © 1995 | |
| 300 | |a 1 online resource (xv, 348 pages) |b illustrations | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 490 | 0 | |a Materials science and process technology series | |
| 500 | |a Includes bibliographical references and index | ||
| 520 | |a This book provides a review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. Chapters include industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal protective equipment, plan review, and records retention. While much of the information in these chapters can be applied to all industries, the focus and orientation is specific to issues in the semiconductor industry | ||
| 650 | 7 | |a Industrial hygiene |2 fast | |
| 650 | 7 | |a Semiconductor industry / Employees / Health and hygiene |2 fast | |
| 650 | 4 | |a Semiconductor industry |x Employees |x Health and hygiene | |
| 650 | 4 | |a Industrial hygiene | |
| 700 | 1 | |a Baldwin, David G. |e Sonstige |4 oth | |
| 700 | 1 | |a Manz, Paul C. |e Sonstige |4 oth | |
| 856 | 4 | 0 | |u http://www.sciencedirect.com/science/book/9780815513698 |x Verlag |z URL des Erstveröffentlichers |3 Volltext |
| 912 | |a ZDB-33-ESD | ||
| 999 | |a oai:aleph.bib-bvb.de:BVB01-031505263 | ||
| 966 | e | |u http://www.sciencedirect.com/science/book/9780815513698 |l FLA01 |p ZDB-33-ESD |q FLA_PDA_ESD |x Verlag |3 Volltext | |
Record in the Search Index
| _version_ | 1804180443217526784 |
|---|---|
| any_adam_object | |
| author | Williams, Michael E. 1949- |
| author_facet | Williams, Michael E. 1949- |
| author_role | aut |
| author_sort | Williams, Michael E. 1949- |
| author_variant | m e w me mew |
| building | Verbundindex |
| bvnumber | BV046124809 |
| collection | ZDB-33-ESD |
| ctrlnum | (ZDB-33-ESD)ocm49708613 (OCoLC)49708613 (DE-599)BVBBV046124809 |
| dewey-full | 621.3815/20289 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/20289 |
| dewey-search | 621.3815/20289 |
| dewey-sort | 3621.3815 520289 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic eBook |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>02338nmm a2200445zc 4500</leader><controlfield tag="001">BV046124809</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">190827s1995 |||| o||u| ||||||eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">1591241448</subfield><subfield code="9">1-59124-144-8</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9781591241447</subfield><subfield code="9">978-1-59124-144-7</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780815513698</subfield><subfield code="9">978-0-8155-1369-8</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0815513690</subfield><subfield code="9">0-8155-1369-0</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(ZDB-33-ESD)ocm49708613</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)49708613</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV046124809</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rda</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.3815/20289</subfield><subfield code="2">22</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Williams, Michael E.</subfield><subfield code="d">1949-</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Semiconductor industrial hygiene handbook</subfield><subfield code="b">monitoring, ventilation, equipment, and ergonomics</subfield><subfield code="c">by Michael E. Williams and David G. Baldwin ; contributing author, Paul C. Manz</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Park Ridge, N.J., U.S.A.</subfield><subfield code="b">Noyes Publications</subfield><subfield code="c">© 1995</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 online resource (xv, 348 pages)</subfield><subfield code="b">illustrations</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Materials science and process technology series</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Includes bibliographical references and index</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">This book provides a review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. Chapters include industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal protective equipment, plan review, and records retention. While much of the information in these chapters can be applied to all industries, the focus and orientation is specific to issues in the semiconductor industry</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Industrial hygiene</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Semiconductor industry / Employees / Health and hygiene</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconductor industry</subfield><subfield code="x">Employees</subfield><subfield code="x">Health and hygiene</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Industrial hygiene</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Baldwin, David G.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Manz, Paul C.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">http://www.sciencedirect.com/science/book/9780815513698</subfield><subfield code="x">Verlag</subfield><subfield code="z">URL des Erstveröffentlichers</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-33-ESD</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-031505263</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">http://www.sciencedirect.com/science/book/9780815513698</subfield><subfield code="l">FLA01</subfield><subfield code="p">ZDB-33-ESD</subfield><subfield code="q">FLA_PDA_ESD</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield></record></collection> |
| id | DE-604.BV046124809 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T08:35:50Z |
| institution | BVB |
| isbn | 1591241448 9781591241447 9780815513698 0815513690 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-031505263 |
| oclc_num | 49708613 |
| open_access_boolean | |
| physical | 1 online resource (xv, 348 pages) illustrations |
| psigel | ZDB-33-ESD ZDB-33-ESD FLA_PDA_ESD |
| publishDate | 1995 |
| publishDateSearch | 1995 |
| publishDateSort | 1995 |
| publisher | Noyes Publications |
| record_format | marc |
| series2 | Materials science and process technology series |
| spelling | Williams, Michael E. 1949- Verfasser aut Semiconductor industrial hygiene handbook monitoring, ventilation, equipment, and ergonomics by Michael E. Williams and David G. Baldwin ; contributing author, Paul C. Manz Park Ridge, N.J., U.S.A. Noyes Publications © 1995 1 online resource (xv, 348 pages) illustrations txt rdacontent c rdamedia cr rdacarrier Materials science and process technology series Includes bibliographical references and index This book provides a review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. Chapters include industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal protective equipment, plan review, and records retention. While much of the information in these chapters can be applied to all industries, the focus and orientation is specific to issues in the semiconductor industry Industrial hygiene fast Semiconductor industry / Employees / Health and hygiene fast Semiconductor industry Employees Health and hygiene Industrial hygiene Baldwin, David G. Sonstige oth Manz, Paul C. Sonstige oth http://www.sciencedirect.com/science/book/9780815513698 Verlag URL des Erstveröffentlichers Volltext |
| spellingShingle | Williams, Michael E. 1949- Semiconductor industrial hygiene handbook monitoring, ventilation, equipment, and ergonomics Industrial hygiene fast Semiconductor industry / Employees / Health and hygiene fast Semiconductor industry Employees Health and hygiene Industrial hygiene |
| title | Semiconductor industrial hygiene handbook monitoring, ventilation, equipment, and ergonomics |
| title_auth | Semiconductor industrial hygiene handbook monitoring, ventilation, equipment, and ergonomics |
| title_exact_search | Semiconductor industrial hygiene handbook monitoring, ventilation, equipment, and ergonomics |
| title_full | Semiconductor industrial hygiene handbook monitoring, ventilation, equipment, and ergonomics by Michael E. Williams and David G. Baldwin ; contributing author, Paul C. Manz |
| title_fullStr | Semiconductor industrial hygiene handbook monitoring, ventilation, equipment, and ergonomics by Michael E. Williams and David G. Baldwin ; contributing author, Paul C. Manz |
| title_full_unstemmed | Semiconductor industrial hygiene handbook monitoring, ventilation, equipment, and ergonomics by Michael E. Williams and David G. Baldwin ; contributing author, Paul C. Manz |
| title_short | Semiconductor industrial hygiene handbook |
| title_sort | semiconductor industrial hygiene handbook monitoring ventilation equipment and ergonomics |
| title_sub | monitoring, ventilation, equipment, and ergonomics |
| topic | Industrial hygiene fast Semiconductor industry / Employees / Health and hygiene fast Semiconductor industry Employees Health and hygiene Industrial hygiene |
| topic_facet | Industrial hygiene Semiconductor industry / Employees / Health and hygiene Semiconductor industry Employees Health and hygiene |
| url | http://www.sciencedirect.com/science/book/9780815513698 |
| work_keys_str_mv | AT williamsmichaele semiconductorindustrialhygienehandbookmonitoringventilationequipmentandergonomics AT baldwindavidg semiconductorindustrialhygienehandbookmonitoringventilationequipmentandergonomics AT manzpaulc semiconductorindustrialhygienehandbookmonitoringventilationequipmentandergonomics |