Micro mechanical transducers: pressure sensors, accelerometers, and gyroscopes
Some years ago, silicon-based mechanical sensors, like pressure sensors, accelerometers and gyroscopes, started their successful advance. Every year, hundreds of millions of these devices are sold, mainly for medical and automotive applications. The airbag sensor on which research already started se...
Saved in:
| Main Author: | |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Amsterdam New York
Elsevier
2000
|
| Series: | Handbook of sensors and actuators
v. 8 |
| Subjects: | |
| Online Access: | FLA01 Volltext Volltext |
| Summary: | Some years ago, silicon-based mechanical sensors, like pressure sensors, accelerometers and gyroscopes, started their successful advance. Every year, hundreds of millions of these devices are sold, mainly for medical and automotive applications. The airbag sensor on which research already started several decades ago at Stanford University can be found in every new car and has saved already numerous lives. Pressure sensors are also used in modern electronic blood pressure equipment. Many other mechanical sensors, mostly invisible to the public, perform useful functions in countless industrial and consumer products. The underlying physics and technology of silicon-based mechanical sensors is rather complex and is treated in numerous publications scattered throughout the literature. Therefore, a clear need existed for a handbook that thoroughly and systematically reviews the present basic knowledge on these devices. After a short introduction, Professor Bao discusses the main issues relevant to silicon-based mechanical sensors. First a thorough treatment of stress and strain in diaphragms and beams is presented. Next, vibration of mechanical structures is illuminated, followed by a chapter on air damping. These basic chapters are then succeeded by chapters in which capacitive and piezoresistive sensing techniques are amply discussed. The book concludes with chapters on commercially available pressure sensors, accelerometers and resonant sensors in which the above principles are applied. Everybody, involved in designing silicon-based mechanical sensors, will find a wealth of useful information in the book, assisting the designer in obtaining highly optimized devices |
| Item Description: | Includes bibliographical references and index |
| Physical Description: | 1 online resource (xiv, 378 pages) illustrations : digital, HTML and PDF files |
| ISBN: | 044450558X 9780444505583 9780080524030 0080524036 |
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| series2 | Handbook of sensors and actuators |
| spelling | Bao, Min-Hang Verfasser aut Micro mechanical transducers pressure sensors, accelerometers, and gyroscopes Min-Hang Bao Amsterdam New York Elsevier 2000 1 online resource (xiv, 378 pages) illustrations : digital, HTML and PDF files txt rdacontent c rdamedia cr rdacarrier Handbook of sensors and actuators v. 8 Includes bibliographical references and index Some years ago, silicon-based mechanical sensors, like pressure sensors, accelerometers and gyroscopes, started their successful advance. Every year, hundreds of millions of these devices are sold, mainly for medical and automotive applications. The airbag sensor on which research already started several decades ago at Stanford University can be found in every new car and has saved already numerous lives. Pressure sensors are also used in modern electronic blood pressure equipment. Many other mechanical sensors, mostly invisible to the public, perform useful functions in countless industrial and consumer products. The underlying physics and technology of silicon-based mechanical sensors is rather complex and is treated in numerous publications scattered throughout the literature. Therefore, a clear need existed for a handbook that thoroughly and systematically reviews the present basic knowledge on these devices. After a short introduction, Professor Bao discusses the main issues relevant to silicon-based mechanical sensors. First a thorough treatment of stress and strain in diaphragms and beams is presented. Next, vibration of mechanical structures is illuminated, followed by a chapter on air damping. These basic chapters are then succeeded by chapters in which capacitive and piezoresistive sensing techniques are amply discussed. The book concludes with chapters on commercially available pressure sensors, accelerometers and resonant sensors in which the above principles are applied. Everybody, involved in designing silicon-based mechanical sensors, will find a wealth of useful information in the book, assisting the designer in obtaining highly optimized devices English TECHNOLOGY & ENGINEERING / Sensors bisacsh Microelectromechanical systems fast Transducers fast Transducers Handbooks, manuals, etc Microelectromechanical systems Handbooks, manuals, etc Messgrößenumformer (DE-588)4169513-6 gnd rswk-swf Mikromechanik (DE-588)4205811-9 gnd rswk-swf Messgrößenumformer (DE-588)4169513-6 s Mikromechanik (DE-588)4205811-9 s 1\p DE-604 http://www.sciencedirect.com/science/book/9780444505583 Verlag URL des Erstveröffentlichers Volltext http://www.sciencedirect.com/science/handbooks/13862766/8 Verlag URL des Erstveröffentlichers Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Bao, Min-Hang Micro mechanical transducers pressure sensors, accelerometers, and gyroscopes TECHNOLOGY & ENGINEERING / Sensors bisacsh Microelectromechanical systems fast Transducers fast Transducers Handbooks, manuals, etc Microelectromechanical systems Handbooks, manuals, etc Messgrößenumformer (DE-588)4169513-6 gnd Mikromechanik (DE-588)4205811-9 gnd |
| subject_GND | (DE-588)4169513-6 (DE-588)4205811-9 |
| title | Micro mechanical transducers pressure sensors, accelerometers, and gyroscopes |
| title_auth | Micro mechanical transducers pressure sensors, accelerometers, and gyroscopes |
| title_exact_search | Micro mechanical transducers pressure sensors, accelerometers, and gyroscopes |
| title_full | Micro mechanical transducers pressure sensors, accelerometers, and gyroscopes Min-Hang Bao |
| title_fullStr | Micro mechanical transducers pressure sensors, accelerometers, and gyroscopes Min-Hang Bao |
| title_full_unstemmed | Micro mechanical transducers pressure sensors, accelerometers, and gyroscopes Min-Hang Bao |
| title_short | Micro mechanical transducers |
| title_sort | micro mechanical transducers pressure sensors accelerometers and gyroscopes |
| title_sub | pressure sensors, accelerometers, and gyroscopes |
| topic | TECHNOLOGY & ENGINEERING / Sensors bisacsh Microelectromechanical systems fast Transducers fast Transducers Handbooks, manuals, etc Microelectromechanical systems Handbooks, manuals, etc Messgrößenumformer (DE-588)4169513-6 gnd Mikromechanik (DE-588)4205811-9 gnd |
| topic_facet | TECHNOLOGY & ENGINEERING / Sensors Microelectromechanical systems Transducers Transducers Handbooks, manuals, etc Microelectromechanical systems Handbooks, manuals, etc Messgrößenumformer Mikromechanik |
| url | http://www.sciencedirect.com/science/book/9780444505583 http://www.sciencedirect.com/science/handbooks/13862766/8 |
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