Modeling of film deposition for microelectronic applications:
Physics of Thin Films is one of the longest running continuing series in thin film science, consisting of 22 volumes since 1963. The series contains quality studies of the properties of various thin filmsmaterials and systems. In order to be able to reflect the development of today's science an...
Saved in:
| Format: | Electronic eBook |
|---|---|
| Language: | English |
| Published: |
San Diego
Academic Press
© 1996
|
| Series: | Thin films
v. 22 |
| Subjects: | |
| Online Access: | FLA01 Volltext |
| Summary: | Physics of Thin Films is one of the longest running continuing series in thin film science, consisting of 22 volumes since 1963. The series contains quality studies of the properties of various thin filmsmaterials and systems. In order to be able to reflect the development of today's science and to cover all modern aspects of thin films, the series, starting with Volume 20, has moved beyond the basic physics of thin films. It now addresses the most important aspects of both inorganic and organic thin films, in both their theoretical as well as technological aspects. Therefore, in order to reflect the modern technology-oriented problems, the title has been slightly modified from Physics of Thin Films to Thin Films |
| Item Description: | Includes bibliographical references and index |
| Physical Description: | 1 online resource (xiv, 291 pages) illustrations |
| ISBN: | 9780125330220 0125330227 |
Staff View
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| isbn | 9780125330220 0125330227 |
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| spelling | Modeling of film deposition for microelectronic applications edited by Stephen Rossnagel San Diego Academic Press © 1996 1 online resource (xiv, 291 pages) illustrations txt rdacontent c rdamedia cr rdacarrier Thin films v. 22 Includes bibliographical references and index Physics of Thin Films is one of the longest running continuing series in thin film science, consisting of 22 volumes since 1963. The series contains quality studies of the properties of various thin filmsmaterials and systems. In order to be able to reflect the development of today's science and to cover all modern aspects of thin films, the series, starting with Volume 20, has moved beyond the basic physics of thin films. It now addresses the most important aspects of both inorganic and organic thin films, in both their theoretical as well as technological aspects. Therefore, in order to reflect the modern technology-oriented problems, the title has been slightly modified from Physics of Thin Films to Thin Films Thin films / Computer simulation fast Couches minces ram Revêtements ram Thin films Computer simulation Congresses (DE-588)1071861417 Konferenzschrift gnd-content Rossnagel, Stephen M. Sonstige (DE-588)1158086601 oth http://www.sciencedirect.com/science/book/9780125330220 Verlag URL des Erstveröffentlichers Volltext |
| spellingShingle | Modeling of film deposition for microelectronic applications Thin films / Computer simulation fast Couches minces ram Revêtements ram Thin films Computer simulation Congresses |
| subject_GND | (DE-588)1071861417 |
| title | Modeling of film deposition for microelectronic applications |
| title_auth | Modeling of film deposition for microelectronic applications |
| title_exact_search | Modeling of film deposition for microelectronic applications |
| title_full | Modeling of film deposition for microelectronic applications edited by Stephen Rossnagel |
| title_fullStr | Modeling of film deposition for microelectronic applications edited by Stephen Rossnagel |
| title_full_unstemmed | Modeling of film deposition for microelectronic applications edited by Stephen Rossnagel |
| title_short | Modeling of film deposition for microelectronic applications |
| title_sort | modeling of film deposition for microelectronic applications |
| topic | Thin films / Computer simulation fast Couches minces ram Revêtements ram Thin films Computer simulation Congresses |
| topic_facet | Thin films / Computer simulation Couches minces Revêtements Thin films Computer simulation Congresses Konferenzschrift |
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