APA (7th ed.) Citation

(1996). Modeling of film deposition for microelectronic applications. Academic Press.

Chicago Style (17th ed.) Citation

Modeling of Film Deposition for Microelectronic Applications. San Diego: Academic Press, 1996.

MLA (9th ed.) Citation

Modeling of Film Deposition for Microelectronic Applications. Academic Press, 1996.

Warning: These citations may not always be 100% accurate.