Catalytic chemical vapor deposition: technology and applications of Cat-CVD
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Bibliographic Details
Main Authors: Matsumura, Hideki (Author), Umemoto, Hironobu (Author), Gleason, Karen K. (Author), Schropp, Ruud E. I. 1959- (Author)
Format: Book
Language:English
Published: Weinheim Wiley-VCH [2019]
Subjects:
Online Access:http://www.wiley-vch.de/publish/dt/books/ISBN978-3-527-34523-6/
Physical Description:xvi, 421 Seiten Illustrationen, Diagramme
ISBN:9783527345236
352734523X

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