Smart sensors and MEMS: intelligent devices and microsystems for industrial applications
Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications, Second Edition highlights new, important developments in the field, including the latest on magnetic sensors, temperature sensors and microreaction chambers. The book outlines the industrial applications for sm...
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| Weitere Verfasser: | , |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Duxford
Woodhead Publishing
[2018]
|
| Ausgabe: | Second edition |
| Schlagworte: | |
| Online-Zugang: | FAW01 FLA01 Volltext |
| Zusammenfassung: | Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications, Second Edition highlights new, important developments in the field, including the latest on magnetic sensors, temperature sensors and microreaction chambers. The book outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, among other topics. New sections include discussions on magnetic and temperature sensors and the industrial applications of smart micro-electro-mechanical systems (MEMS). The book is an invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry. In addition, engineers looking for industrial sensing, monitoring and automation solutions will find this a comprehensive source of information |
| Beschreibung: | Includes bibliographical references and index |
| Beschreibung: | 1 online resource |
| ISBN: | 9780081020562 0081020562 9780081020555 0081020554 |
Internformat
MARC
| LEADER | 00000nmm a2200000zc 4500 | ||
|---|---|---|---|
| 001 | BV045382964 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | cr|uuu---uuuuu | ||
| 008 | 181228s2018 |||| o||u| ||||||eng d | ||
| 020 | |a 9780081020562 |9 978-0-08-102056-2 | ||
| 020 | |a 0081020562 |9 0-08-102056-2 | ||
| 020 | |a 9780081020555 |9 978-0-08-102055-5 | ||
| 020 | |a 0081020554 |9 0-08-102055-4 | ||
| 035 | |a (ZDB-33-ESD)on1025341177 | ||
| 035 | |a (ZDB-33-EBS)on1025341177 | ||
| 035 | |a (OCoLC)1025341177 | ||
| 035 | |a (DE-599)BVBBV045382964 | ||
| 040 | |a DE-604 |b ger |e rda | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-1046 | ||
| 082 | 0 | |a 681.2 |2 23 | |
| 245 | 1 | 0 | |a Smart sensors and MEMS |b intelligent devices and microsystems for industrial applications |c edited by Stoyan Nihtianov, Antonio Luque |
| 250 | |a Second edition | ||
| 264 | 1 | |a Duxford |b Woodhead Publishing |c [2018] | |
| 264 | 4 | |c © 2018 | |
| 300 | |a 1 online resource | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 500 | |a Includes bibliographical references and index | ||
| 520 | |a Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications, Second Edition highlights new, important developments in the field, including the latest on magnetic sensors, temperature sensors and microreaction chambers. The book outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, among other topics. New sections include discussions on magnetic and temperature sensors and the industrial applications of smart micro-electro-mechanical systems (MEMS). The book is an invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry. In addition, engineers looking for industrial sensing, monitoring and automation solutions will find this a comprehensive source of information | ||
| 650 | 7 | |a TECHNOLOGY & ENGINEERING / Technical & Manufacturing Industries & Trades |2 bisacsh | |
| 650 | 7 | |a Detectors / Industrial applications |2 fast | |
| 650 | 4 | |a Detectors |x Industrial applications | |
| 650 | 4 | |a Microelectromechanical systems |x Industrial applications | |
| 650 | 0 | 7 | |a Mikrosystemtechnik |0 (DE-588)4221617-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Intelligenter Sensor |0 (DE-588)4293453-9 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a MEMS |0 (DE-588)4824724-8 |2 gnd |9 rswk-swf |
| 655 | 7 | |8 1\p |0 (DE-588)4143413-4 |a Aufsatzsammlung |2 gnd-content | |
| 689 | 0 | 0 | |a Intelligenter Sensor |0 (DE-588)4293453-9 |D s |
| 689 | 0 | 1 | |a Mikrosystemtechnik |0 (DE-588)4221617-5 |D s |
| 689 | 0 | 2 | |a MEMS |0 (DE-588)4824724-8 |D s |
| 689 | 0 | |8 2\p |5 DE-604 | |
| 700 | 1 | |a Nihtianov, Stoyan |4 edt | |
| 700 | 1 | |a Luque, A. |4 edt | |
| 856 | 4 | 0 | |u https://www.sciencedirect.com/science/book/9780081020555 |x Verlag |z URL des Erstveröffentlichers |3 Volltext |
| 912 | |a ZDB-33-ESD |a ZDB-33-EBS | ||
| 999 | |a oai:aleph.bib-bvb.de:BVB01-030769297 | ||
| 883 | 1 | |8 1\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
| 883 | 1 | |8 2\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
| 966 | e | |u https://www.sciencedirect.com/science/book/9780081020555 |l FAW01 |p ZDB-33-ESD |q FAW_PDA_ESD |x Verlag |3 Volltext | |
| 966 | e | |u https://www.sciencedirect.com/science/book/9780081020555 |l FLA01 |p ZDB-33-ESD |q FLA_PDA_ESD |x Verlag |3 Volltext | |
Datensatz im Suchindex
| _version_ | 1804179235583033344 |
|---|---|
| any_adam_object | |
| author2 | Nihtianov, Stoyan Luque, A. |
| author2_role | edt edt |
| author2_variant | s n sn a l al |
| author_facet | Nihtianov, Stoyan Luque, A. |
| building | Verbundindex |
| bvnumber | BV045382964 |
| collection | ZDB-33-ESD ZDB-33-EBS |
| ctrlnum | (ZDB-33-ESD)on1025341177 (ZDB-33-EBS)on1025341177 (OCoLC)1025341177 (DE-599)BVBBV045382964 |
| dewey-full | 681.2 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 681 - Precision instruments and other devices |
| dewey-raw | 681.2 |
| dewey-search | 681.2 |
| dewey-sort | 3681.2 |
| dewey-tens | 680 - Manufacture of products for specific uses |
| discipline | Handwerk und Gewerbe / Verschiedene Technologien |
| edition | Second edition |
| format | Electronic eBook |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>03620nmm a2200601zc 4500</leader><controlfield tag="001">BV045382964</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">181228s2018 |||| o||u| ||||||eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780081020562</subfield><subfield code="9">978-0-08-102056-2</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0081020562</subfield><subfield code="9">0-08-102056-2</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780081020555</subfield><subfield code="9">978-0-08-102055-5</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0081020554</subfield><subfield code="9">0-08-102055-4</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(ZDB-33-ESD)on1025341177</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(ZDB-33-EBS)on1025341177</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)1025341177</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV045382964</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rda</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-1046</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">681.2</subfield><subfield code="2">23</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Smart sensors and MEMS</subfield><subfield code="b">intelligent devices and microsystems for industrial applications</subfield><subfield code="c">edited by Stoyan Nihtianov, Antonio Luque</subfield></datafield><datafield tag="250" ind1=" " ind2=" "><subfield code="a">Second edition</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Duxford</subfield><subfield code="b">Woodhead Publishing</subfield><subfield code="c">[2018]</subfield></datafield><datafield tag="264" ind1=" " ind2="4"><subfield code="c">© 2018</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 online resource</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Includes bibliographical references and index</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications, Second Edition highlights new, important developments in the field, including the latest on magnetic sensors, temperature sensors and microreaction chambers. The book outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, among other topics. New sections include discussions on magnetic and temperature sensors and the industrial applications of smart micro-electro-mechanical systems (MEMS). The book is an invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry. In addition, engineers looking for industrial sensing, monitoring and automation solutions will find this a comprehensive source of information</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">TECHNOLOGY & ENGINEERING / Technical & Manufacturing Industries & Trades</subfield><subfield code="2">bisacsh</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Detectors / Industrial applications</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Detectors</subfield><subfield code="x">Industrial applications</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microelectromechanical systems</subfield><subfield code="x">Industrial applications</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Mikrosystemtechnik</subfield><subfield code="0">(DE-588)4221617-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Intelligenter Sensor</subfield><subfield code="0">(DE-588)4293453-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">MEMS</subfield><subfield code="0">(DE-588)4824724-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="8">1\p</subfield><subfield code="0">(DE-588)4143413-4</subfield><subfield code="a">Aufsatzsammlung</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Intelligenter Sensor</subfield><subfield code="0">(DE-588)4293453-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Mikrosystemtechnik</subfield><subfield code="0">(DE-588)4221617-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">MEMS</subfield><subfield code="0">(DE-588)4824724-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="8">2\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Nihtianov, Stoyan</subfield><subfield code="4">edt</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Luque, A.</subfield><subfield code="4">edt</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://www.sciencedirect.com/science/book/9780081020555</subfield><subfield code="x">Verlag</subfield><subfield code="z">URL des Erstveröffentlichers</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-33-ESD</subfield><subfield code="a">ZDB-33-EBS</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-030769297</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">1\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">2\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://www.sciencedirect.com/science/book/9780081020555</subfield><subfield code="l">FAW01</subfield><subfield code="p">ZDB-33-ESD</subfield><subfield code="q">FAW_PDA_ESD</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://www.sciencedirect.com/science/book/9780081020555</subfield><subfield code="l">FLA01</subfield><subfield code="p">ZDB-33-ESD</subfield><subfield code="q">FLA_PDA_ESD</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield></record></collection> |
| genre | 1\p (DE-588)4143413-4 Aufsatzsammlung gnd-content |
| genre_facet | Aufsatzsammlung |
| id | DE-604.BV045382964 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T08:16:39Z |
| institution | BVB |
| isbn | 9780081020562 0081020562 9780081020555 0081020554 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-030769297 |
| oclc_num | 1025341177 |
| open_access_boolean | |
| owner | DE-1046 |
| owner_facet | DE-1046 |
| physical | 1 online resource |
| psigel | ZDB-33-ESD ZDB-33-EBS ZDB-33-ESD FAW_PDA_ESD ZDB-33-ESD FLA_PDA_ESD |
| publishDate | 2018 |
| publishDateSearch | 2018 |
| publishDateSort | 2018 |
| publisher | Woodhead Publishing |
| record_format | marc |
| spelling | Smart sensors and MEMS intelligent devices and microsystems for industrial applications edited by Stoyan Nihtianov, Antonio Luque Second edition Duxford Woodhead Publishing [2018] © 2018 1 online resource txt rdacontent c rdamedia cr rdacarrier Includes bibliographical references and index Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications, Second Edition highlights new, important developments in the field, including the latest on magnetic sensors, temperature sensors and microreaction chambers. The book outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, among other topics. New sections include discussions on magnetic and temperature sensors and the industrial applications of smart micro-electro-mechanical systems (MEMS). The book is an invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry. In addition, engineers looking for industrial sensing, monitoring and automation solutions will find this a comprehensive source of information TECHNOLOGY & ENGINEERING / Technical & Manufacturing Industries & Trades bisacsh Detectors / Industrial applications fast Detectors Industrial applications Microelectromechanical systems Industrial applications Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf Intelligenter Sensor (DE-588)4293453-9 gnd rswk-swf MEMS (DE-588)4824724-8 gnd rswk-swf 1\p (DE-588)4143413-4 Aufsatzsammlung gnd-content Intelligenter Sensor (DE-588)4293453-9 s Mikrosystemtechnik (DE-588)4221617-5 s MEMS (DE-588)4824724-8 s 2\p DE-604 Nihtianov, Stoyan edt Luque, A. edt https://www.sciencedirect.com/science/book/9780081020555 Verlag URL des Erstveröffentlichers Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Smart sensors and MEMS intelligent devices and microsystems for industrial applications TECHNOLOGY & ENGINEERING / Technical & Manufacturing Industries & Trades bisacsh Detectors / Industrial applications fast Detectors Industrial applications Microelectromechanical systems Industrial applications Mikrosystemtechnik (DE-588)4221617-5 gnd Intelligenter Sensor (DE-588)4293453-9 gnd MEMS (DE-588)4824724-8 gnd |
| subject_GND | (DE-588)4221617-5 (DE-588)4293453-9 (DE-588)4824724-8 (DE-588)4143413-4 |
| title | Smart sensors and MEMS intelligent devices and microsystems for industrial applications |
| title_auth | Smart sensors and MEMS intelligent devices and microsystems for industrial applications |
| title_exact_search | Smart sensors and MEMS intelligent devices and microsystems for industrial applications |
| title_full | Smart sensors and MEMS intelligent devices and microsystems for industrial applications edited by Stoyan Nihtianov, Antonio Luque |
| title_fullStr | Smart sensors and MEMS intelligent devices and microsystems for industrial applications edited by Stoyan Nihtianov, Antonio Luque |
| title_full_unstemmed | Smart sensors and MEMS intelligent devices and microsystems for industrial applications edited by Stoyan Nihtianov, Antonio Luque |
| title_short | Smart sensors and MEMS |
| title_sort | smart sensors and mems intelligent devices and microsystems for industrial applications |
| title_sub | intelligent devices and microsystems for industrial applications |
| topic | TECHNOLOGY & ENGINEERING / Technical & Manufacturing Industries & Trades bisacsh Detectors / Industrial applications fast Detectors Industrial applications Microelectromechanical systems Industrial applications Mikrosystemtechnik (DE-588)4221617-5 gnd Intelligenter Sensor (DE-588)4293453-9 gnd MEMS (DE-588)4824724-8 gnd |
| topic_facet | TECHNOLOGY & ENGINEERING / Technical & Manufacturing Industries & Trades Detectors / Industrial applications Detectors Industrial applications Microelectromechanical systems Industrial applications Mikrosystemtechnik Intelligenter Sensor MEMS Aufsatzsammlung |
| url | https://www.sciencedirect.com/science/book/9780081020555 |
| work_keys_str_mv | AT nihtianovstoyan smartsensorsandmemsintelligentdevicesandmicrosystemsforindustrialapplications AT luquea smartsensorsandmemsintelligentdevicesandmicrosystemsforindustrialapplications |