(2008). Rapid thermal processing and beyond: Applications in semiconductor processing : special topic volume : selected papers from RTP specialists all over the world, Dornstadt, Germany. Trans-Tech Publications.
Chicago-Zitierstil (17. Ausg.)Rapid Thermal Processing and Beyond: Applications in Semiconductor Processing : Special Topic Volume : Selected Papers from RTP Specialists All over the World, Dornstadt, Germany. Stafa-Zurich, Switzerland ; United Kingdom ; Enfield, NH: Trans-Tech Publications, 2008.
MLA-Zitierstil (9. Ausg.)Rapid Thermal Processing and Beyond: Applications in Semiconductor Processing : Special Topic Volume : Selected Papers from RTP Specialists All over the World, Dornstadt, Germany. Trans-Tech Publications, 2008.
Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.