Nanofabrication using focused ion and electron beams: principles and applications
Saved in:
| Format: | Electronic eBook |
|---|---|
| Language: | English |
| Published: |
Oxford ; New York
Oxford University Press
2011
|
| Series: | Nanomanufacturing series
v. 1 |
| Subjects: | |
| Item Description: | Print version record |
| Physical Description: | 1 online resource |
| ISBN: | 9780199920990 0199920990 |
Staff View
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| 245 | 1 | 0 | |a Nanofabrication using focused ion and electron beams |b principles and applications |c edited by Ivo Utke, Stanislav Moshkalev, Phillip Russell |
| 264 | 1 | |a Oxford ; New York |b Oxford University Press |c 2011 | |
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| 505 | 8 | |a Nanofabrication Using Focused Ion and Electron Beams presents fundamentals of the interaction of focused ion and electron beams (FIB/FEB) with surfaces, as well as numerous applications of these techniques for nanofabrication involving different materials and devices. The book begins by describing the historical evolution of FIB and FEB systems, applied first for micro- and more recently for nanofabrication and prototyping, practical solutions available in the market for different applications, and current trends in development of tools and their integration in a fast growing field of nanofabr | |
| 650 | 7 | |a TECHNOLOGY & ENGINEERING / Material Science |2 bisacsh | |
| 650 | 7 | |a Electron beams / Industrial applications |2 fast | |
| 650 | 7 | |a Ion bombardment / Industrial applications |2 fast | |
| 650 | 7 | |a Nanostructured materials |2 fast | |
| 650 | 7 | |a Nanotechnology |2 fast | |
| 650 | 4 | |a Nanostructured materials |a Nanotechnology |a Electron beams |x Industrial applications |a Ion bombardment |x Industrial applications | |
| 700 | 1 | |a Utke, Ivo |e Sonstige |4 oth | |
| 700 | 1 | |a Moshkalev, Stanislav |e Sonstige |4 oth | |
| 700 | 1 | |a Russell, Phillip |d 1955- |e Sonstige |4 oth | |
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| contents | Nanofabrication Using Focused Ion and Electron Beams presents fundamentals of the interaction of focused ion and electron beams (FIB/FEB) with surfaces, as well as numerous applications of these techniques for nanofabrication involving different materials and devices. The book begins by describing the historical evolution of FIB and FEB systems, applied first for micro- and more recently for nanofabrication and prototyping, practical solutions available in the market for different applications, and current trends in development of tools and their integration in a fast growing field of nanofabr |
| ctrlnum | (ZDB-4-ENC)ocn777268040 (OCoLC)777268040 (DE-599)BVBBV045344718 |
| dewey-full | 620.1/15 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 620 - Engineering and allied operations |
| dewey-raw | 620.1/15 |
| dewey-search | 620.1/15 |
| dewey-sort | 3620.1 215 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik |
| format | Electronic eBook |
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| id | DE-604.BV045344718 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T08:15:31Z |
| institution | BVB |
| isbn | 9780199920990 0199920990 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-030731422 |
| oclc_num | 777268040 |
| open_access_boolean | |
| physical | 1 online resource |
| psigel | ZDB-4-ENC |
| publishDate | 2011 |
| publishDateSearch | 2011 |
| publishDateSort | 2011 |
| publisher | Oxford University Press |
| record_format | marc |
| series2 | Nanomanufacturing series |
| spelling | Nanofabrication using focused ion and electron beams principles and applications edited by Ivo Utke, Stanislav Moshkalev, Phillip Russell Oxford ; New York Oxford University Press 2011 1 online resource txt rdacontent c rdamedia cr rdacarrier Nanomanufacturing series v. 1 Print version record Nanofabrication Using Focused Ion and Electron Beams presents fundamentals of the interaction of focused ion and electron beams (FIB/FEB) with surfaces, as well as numerous applications of these techniques for nanofabrication involving different materials and devices. The book begins by describing the historical evolution of FIB and FEB systems, applied first for micro- and more recently for nanofabrication and prototyping, practical solutions available in the market for different applications, and current trends in development of tools and their integration in a fast growing field of nanofabr TECHNOLOGY & ENGINEERING / Material Science bisacsh Electron beams / Industrial applications fast Ion bombardment / Industrial applications fast Nanostructured materials fast Nanotechnology fast Nanostructured materials Nanotechnology Electron beams Industrial applications Ion bombardment Industrial applications Utke, Ivo Sonstige oth Moshkalev, Stanislav Sonstige oth Russell, Phillip 1955- Sonstige oth Erscheint auch als Druck-Ausgabe Nanofabrication using focused ion and electron beams Oxford ; New York : Oxford University Press, 2011 9780199734214 |
| spellingShingle | Nanofabrication using focused ion and electron beams principles and applications Nanofabrication Using Focused Ion and Electron Beams presents fundamentals of the interaction of focused ion and electron beams (FIB/FEB) with surfaces, as well as numerous applications of these techniques for nanofabrication involving different materials and devices. The book begins by describing the historical evolution of FIB and FEB systems, applied first for micro- and more recently for nanofabrication and prototyping, practical solutions available in the market for different applications, and current trends in development of tools and their integration in a fast growing field of nanofabr TECHNOLOGY & ENGINEERING / Material Science bisacsh Electron beams / Industrial applications fast Ion bombardment / Industrial applications fast Nanostructured materials fast Nanotechnology fast Nanostructured materials Nanotechnology Electron beams Industrial applications Ion bombardment Industrial applications |
| title | Nanofabrication using focused ion and electron beams principles and applications |
| title_auth | Nanofabrication using focused ion and electron beams principles and applications |
| title_exact_search | Nanofabrication using focused ion and electron beams principles and applications |
| title_full | Nanofabrication using focused ion and electron beams principles and applications edited by Ivo Utke, Stanislav Moshkalev, Phillip Russell |
| title_fullStr | Nanofabrication using focused ion and electron beams principles and applications edited by Ivo Utke, Stanislav Moshkalev, Phillip Russell |
| title_full_unstemmed | Nanofabrication using focused ion and electron beams principles and applications edited by Ivo Utke, Stanislav Moshkalev, Phillip Russell |
| title_short | Nanofabrication using focused ion and electron beams |
| title_sort | nanofabrication using focused ion and electron beams principles and applications |
| title_sub | principles and applications |
| topic | TECHNOLOGY & ENGINEERING / Material Science bisacsh Electron beams / Industrial applications fast Ion bombardment / Industrial applications fast Nanostructured materials fast Nanotechnology fast Nanostructured materials Nanotechnology Electron beams Industrial applications Ion bombardment Industrial applications |
| topic_facet | TECHNOLOGY & ENGINEERING / Material Science Electron beams / Industrial applications Ion bombardment / Industrial applications Nanostructured materials Nanotechnology Nanostructured materials Nanotechnology Electron beams Industrial applications Ion bombardment Industrial applications |
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