Acoustic wave and electromechanical resonators: concept to key applications = Acoustic wave & electromechanical resonators
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| Main Author: | |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Norwood, MA.
Artech House
2010
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| Series: | Artech House integrated microsystems series
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| Subjects: | |
| Item Description: | Print version record |
| Physical Description: | 1 online resource (xv, 345 pages) illustrations |
| ISBN: | 9781607839781 1607839784 9781607839774 1607839776 |
Staff View
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| 245 | 1 | 0 | |a Acoustic wave and electromechanical resonators |b concept to key applications = Acoustic wave & electromechanical resonators |c Humberto Campanella |
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| 300 | |a 1 online resource (xv, 345 pages) |b illustrations | ||
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| 505 | 8 | |a This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensin | |
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| 650 | 7 | |a TECHNOLOGY & ENGINEERING / Electronics / Digital |2 bisacsh | |
| 650 | 7 | |a Acoustic surface wave devices |2 fast | |
| 650 | 7 | |a Electric resonators |2 fast | |
| 650 | 4 | |a Acoustic surface wave devices |a Electric resonators | |
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Record in the Search Index
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| author | Campanella, Humberto |
| author_facet | Campanella, Humberto |
| author_role | aut |
| author_sort | Campanella, Humberto |
| author_variant | h c hc |
| building | Verbundindex |
| bvnumber | BV045344004 |
| classification_rvk | ZN 3600 ZN 3700 |
| collection | ZDB-4-ENC |
| contents | This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensin |
| ctrlnum | (ZDB-4-ENC)ocn659579814 (OCoLC)659579814 (DE-599)BVBBV045344004 |
| dewey-full | 621.381 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381 |
| dewey-search | 621.381 |
| dewey-sort | 3621.381 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic eBook |
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| id | DE-604.BV045344004 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T08:15:30Z |
| institution | BVB |
| isbn | 9781607839781 1607839784 9781607839774 1607839776 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-030730708 |
| oclc_num | 659579814 |
| open_access_boolean | |
| physical | 1 online resource (xv, 345 pages) illustrations |
| psigel | ZDB-4-ENC |
| publishDate | 2010 |
| publishDateSearch | 2010 |
| publishDateSort | 2010 |
| publisher | Artech House |
| record_format | marc |
| series2 | Artech House integrated microsystems series |
| spelling | Campanella, Humberto Verfasser aut Acoustic wave and electromechanical resonators concept to key applications = Acoustic wave & electromechanical resonators Humberto Campanella Acoustic wave & electromechanical resonators Norwood, MA. Artech House 2010 1 online resource (xv, 345 pages) illustrations txt rdacontent c rdamedia cr rdacarrier Artech House integrated microsystems series Print version record This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensin TECHNOLOGY & ENGINEERING / Electronics / Microelectronics bisacsh TECHNOLOGY & ENGINEERING / Electronics / Digital bisacsh Acoustic surface wave devices fast Electric resonators fast Acoustic surface wave devices Electric resonators Erscheint auch als Druck-Ausgabe Campanella, Humberto Acoustic wave and electromechanical resonators Norwood, MA. : Artech House, 2010 9781607839774 |
| spellingShingle | Campanella, Humberto Acoustic wave and electromechanical resonators concept to key applications = Acoustic wave & electromechanical resonators This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensin TECHNOLOGY & ENGINEERING / Electronics / Microelectronics bisacsh TECHNOLOGY & ENGINEERING / Electronics / Digital bisacsh Acoustic surface wave devices fast Electric resonators fast Acoustic surface wave devices Electric resonators |
| title | Acoustic wave and electromechanical resonators concept to key applications = Acoustic wave & electromechanical resonators |
| title_alt | Acoustic wave & electromechanical resonators |
| title_auth | Acoustic wave and electromechanical resonators concept to key applications = Acoustic wave & electromechanical resonators |
| title_exact_search | Acoustic wave and electromechanical resonators concept to key applications = Acoustic wave & electromechanical resonators |
| title_full | Acoustic wave and electromechanical resonators concept to key applications = Acoustic wave & electromechanical resonators Humberto Campanella |
| title_fullStr | Acoustic wave and electromechanical resonators concept to key applications = Acoustic wave & electromechanical resonators Humberto Campanella |
| title_full_unstemmed | Acoustic wave and electromechanical resonators concept to key applications = Acoustic wave & electromechanical resonators Humberto Campanella |
| title_short | Acoustic wave and electromechanical resonators |
| title_sort | acoustic wave and electromechanical resonators concept to key applications acoustic wave electromechanical resonators |
| title_sub | concept to key applications = Acoustic wave & electromechanical resonators |
| topic | TECHNOLOGY & ENGINEERING / Electronics / Microelectronics bisacsh TECHNOLOGY & ENGINEERING / Electronics / Digital bisacsh Acoustic surface wave devices fast Electric resonators fast Acoustic surface wave devices Electric resonators |
| topic_facet | TECHNOLOGY & ENGINEERING / Electronics / Microelectronics TECHNOLOGY & ENGINEERING / Electronics / Digital Acoustic surface wave devices Electric resonators Acoustic surface wave devices Electric resonators |
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