Fundamental principles of optical lithography: the science of microfabrication
Saved in:
| Main Author: | |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Chichester, West Sussex, England ; Hoboken, NJ, USA
Wiley
2007
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| Subjects: | |
| Item Description: | Print version record |
| Physical Description: | 1 online resource (xvii, 515 pages) illustrations |
| ISBN: | 9780470723869 0470723866 |
Staff View
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| 100 | 1 | |a Mack, Chris A. |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Fundamental principles of optical lithography |b the science of microfabrication |c Chris Mack |
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| 505 | 8 | |a The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used to connect and isolate transistors and their components. By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. Fundamental to all of these processes is lithography, ie, the formatio | |
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Record in the Search Index
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| any_adam_object | |
| author | Mack, Chris A. |
| author_facet | Mack, Chris A. |
| author_role | aut |
| author_sort | Mack, Chris A. |
| author_variant | c a m ca cam |
| building | Verbundindex |
| bvnumber | BV045343670 |
| collection | ZDB-4-ENC |
| contents | The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used to connect and isolate transistors and their components. By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. Fundamental to all of these processes is lithography, ie, the formatio |
| ctrlnum | (ZDB-4-ENC)ocn608624290 (OCoLC)608624290 (DE-599)BVBBV045343670 |
| dewey-full | 621.3815/31 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/31 |
| dewey-search | 621.3815/31 |
| dewey-sort | 3621.3815 231 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic eBook |
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| id | DE-604.BV045343670 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T08:15:29Z |
| institution | BVB |
| isbn | 9780470723869 0470723866 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-030730373 |
| oclc_num | 608624290 |
| open_access_boolean | |
| physical | 1 online resource (xvii, 515 pages) illustrations |
| psigel | ZDB-4-ENC |
| publishDate | 2007 |
| publishDateSearch | 2007 |
| publishDateSort | 2007 |
| publisher | Wiley |
| record_format | marc |
| spelling | Mack, Chris A. Verfasser aut Fundamental principles of optical lithography the science of microfabrication Chris Mack Chichester, West Sussex, England ; Hoboken, NJ, USA Wiley 2007 1 online resource (xvii, 515 pages) illustrations txt rdacontent c rdamedia cr rdacarrier Print version record The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used to connect and isolate transistors and their components. By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. Fundamental to all of these processes is lithography, ie, the formatio TECHNOLOGY & ENGINEERING / Imaging Systems bisacsh Integrated circuits / Design and construction fast Microlithography / Industrial applications fast Integrated circuits Design and construction Microlithography Industrial applications Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd rswk-swf Fotolithografie Halbleitertechnologie (DE-588)4174516-4 s 1\p DE-604 Erscheint auch als Druck-Ausgabe Mack, Chris A. Fundamental principles of optical lithography Chichester, West Sussex, England ; Hoboken, NJ, USA : Wiley, 2007 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Mack, Chris A. Fundamental principles of optical lithography the science of microfabrication The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used to connect and isolate transistors and their components. By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. Fundamental to all of these processes is lithography, ie, the formatio TECHNOLOGY & ENGINEERING / Imaging Systems bisacsh Integrated circuits / Design and construction fast Microlithography / Industrial applications fast Integrated circuits Design and construction Microlithography Industrial applications Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd |
| subject_GND | (DE-588)4174516-4 |
| title | Fundamental principles of optical lithography the science of microfabrication |
| title_auth | Fundamental principles of optical lithography the science of microfabrication |
| title_exact_search | Fundamental principles of optical lithography the science of microfabrication |
| title_full | Fundamental principles of optical lithography the science of microfabrication Chris Mack |
| title_fullStr | Fundamental principles of optical lithography the science of microfabrication Chris Mack |
| title_full_unstemmed | Fundamental principles of optical lithography the science of microfabrication Chris Mack |
| title_short | Fundamental principles of optical lithography |
| title_sort | fundamental principles of optical lithography the science of microfabrication |
| title_sub | the science of microfabrication |
| topic | TECHNOLOGY & ENGINEERING / Imaging Systems bisacsh Integrated circuits / Design and construction fast Microlithography / Industrial applications fast Integrated circuits Design and construction Microlithography Industrial applications Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd |
| topic_facet | TECHNOLOGY & ENGINEERING / Imaging Systems Integrated circuits / Design and construction Microlithography / Industrial applications Integrated circuits Design and construction Microlithography Industrial applications Fotolithografie Halbleitertechnologie |
| work_keys_str_mv | AT mackchrisa fundamentalprinciplesofopticallithographythescienceofmicrofabrication |