APA-Zitierstil (7. Ausg.)

Mack, C. A. (2007). Fundamental principles of optical lithography: The science of microfabrication. Wiley.

Chicago-Zitierstil (17. Ausg.)

Mack, Chris A. Fundamental Principles of Optical Lithography: The Science of Microfabrication. Chichester, West Sussex, England ; Hoboken, NJ, USA: Wiley, 2007.

MLA-Zitierstil (9. Ausg.)

Mack, Chris A. Fundamental Principles of Optical Lithography: The Science of Microfabrication. Wiley, 2007.