MEMS mechanical sensors:
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Bibliographic Details
Format: Electronic eBook
Language:English
Published: Boston Artech House 2004
Series:Microelectromechanical systems series
Subjects:
Item Description:Print version record
Physical Description:1 online resource (x, 269 pages) illustrations
ISBN:1580538738
9781580538732
1580535364
9781580535366

There is no print copy available.

Interlibrary loan Place Request Caution: Not in THWS collection!