A guide to hands-on MEMS design and prototyping:
"Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fa...
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Cambridge ; New York
Cambridge University Press
2011
|
| Schlagworte: | |
| Zusammenfassung: | "Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well and exercises and design challenges at the end of every chapter. Additional resources are provided online, including solutions to the design challenge problems and a selection of case studies of MEMS devices"-- |
| Beschreibung: | xi, 166 p. col. ill |
Internformat
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| 520 | |a "Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well and exercises and design challenges at the end of every chapter. Additional resources are provided online, including solutions to the design challenge problems and a selection of case studies of MEMS devices"-- | ||
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Datensatz im Suchindex
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| any_adam_object | |
| author | Kubby, Joel A. |
| author_facet | Kubby, Joel A. |
| author_role | aut |
| author_sort | Kubby, Joel A. |
| author_variant | j a k ja jak |
| building | Verbundindex |
| bvnumber | BV045255092 |
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| dewey-full | 621.381 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381 |
| dewey-search | 621.381 |
| dewey-sort | 3621.381 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic eBook |
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| illustrated | Not Illustrated |
| indexdate | 2024-07-10T08:12:57Z |
| institution | BVB |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-030643067 |
| oclc_num | 759114739 |
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| physical | xi, 166 p. col. ill |
| psigel | ZDB-30-PAD |
| publishDate | 2011 |
| publishDateSearch | 2011 |
| publishDateSort | 2011 |
| publisher | Cambridge University Press |
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| spelling | Kubby, Joel A. Verfasser aut A guide to hands-on MEMS design and prototyping Joel Kubby Cambridge ; New York Cambridge University Press 2011 xi, 166 p. col. ill txt rdacontent c rdamedia cr rdacarrier "Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well and exercises and design challenges at the end of every chapter. Additional resources are provided online, including solutions to the design challenge problems and a selection of case studies of MEMS devices"-- Microelectromechanical systems MEMS (DE-588)4824724-8 gnd rswk-swf MEMS (DE-588)4824724-8 s 1\p DE-604 ProQuest (Firm) Sonstige oth 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Kubby, Joel A. A guide to hands-on MEMS design and prototyping Microelectromechanical systems MEMS (DE-588)4824724-8 gnd |
| subject_GND | (DE-588)4824724-8 |
| title | A guide to hands-on MEMS design and prototyping |
| title_auth | A guide to hands-on MEMS design and prototyping |
| title_exact_search | A guide to hands-on MEMS design and prototyping |
| title_full | A guide to hands-on MEMS design and prototyping Joel Kubby |
| title_fullStr | A guide to hands-on MEMS design and prototyping Joel Kubby |
| title_full_unstemmed | A guide to hands-on MEMS design and prototyping Joel Kubby |
| title_short | A guide to hands-on MEMS design and prototyping |
| title_sort | a guide to hands on mems design and prototyping |
| topic | Microelectromechanical systems MEMS (DE-588)4824724-8 gnd |
| topic_facet | Microelectromechanical systems MEMS |
| work_keys_str_mv | AT kubbyjoela aguidetohandsonmemsdesignandprototyping AT proquestfirm aguidetohandsonmemsdesignandprototyping |