Si Silicon: Silicon Nitride in Microelectronics and Solar Cells
This is the first of three Gmelin Handbook volumes in the silicon se ries that will cover silicon nitride, a normaUy solid material with the idealized formula Si N . This volume, 3 4 "Silicon" Supplement Volume B Sc, is devoted to applications of silicon nitride in microelec tronics and s...
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| Main Authors: | , , , |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Berlin, Heidelberg
Springer Berlin Heidelberg
1991
|
| Edition: | 8th Edition |
| Series: | Si. Silicium. Silicon (System-Nr. 15)
S-i / B / 1-5 / 5 / c |
| Subjects: | |
| Online Access: | BTU01 Volltext |
| Summary: | This is the first of three Gmelin Handbook volumes in the silicon se ries that will cover silicon nitride, a normaUy solid material with the idealized formula Si N . This volume, 3 4 "Silicon" Supplement Volume B Sc, is devoted to applications of silicon nitride in microelec tronics and solar ceUs. The compendium is the product of a critical selection among more than 17600 publications on silicon nitride issued up to January 1990. Out of a total of 5900 publications dealing with the fabrication and use of microelectronic devices (including 2400 Japanese patent applications), about 4000 papers have been selected for this volume. The current volume is grouped into three parts. Chapters 2 to 8 deal with general, non specific microelectronic applications of silicon nitride, Chapters 9 to 31 cover applications of silicon nitride in specific devices and device components, and Chapter 32 is devoted exclusively to applications in solar ceUs, including information on our general understanding of the role of silicon nitride in photovoltaic devices. Experimental results on the preparation of silicon nitride layers for application in unspeci fied devices are in Chapter 2. Whenever the preparation is in connection with specific devices, the information is presented in the respective chapters. The general preparation of silicon nitride layers is not covered in this volume, but will appear in "Silicon" Supplement Volume B 5a. See also the Introductory Remarks, Chapter 1, p. 1 |
| Physical Description: | 1 Online-Ressource (XV, 401 p. 32 illus. in color) |
| ISBN: | 9783662099018 |
| DOI: | 10.1007/978-3-662-09901-8 |
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| 520 | |a This is the first of three Gmelin Handbook volumes in the silicon se ries that will cover silicon nitride, a normaUy solid material with the idealized formula Si N . This volume, 3 4 "Silicon" Supplement Volume B Sc, is devoted to applications of silicon nitride in microelec tronics and solar ceUs. The compendium is the product of a critical selection among more than 17600 publications on silicon nitride issued up to January 1990. Out of a total of 5900 publications dealing with the fabrication and use of microelectronic devices (including 2400 Japanese patent applications), about 4000 papers have been selected for this volume. The current volume is grouped into three parts. Chapters 2 to 8 deal with general, non specific microelectronic applications of silicon nitride, Chapters 9 to 31 cover applications of silicon nitride in specific devices and device components, and Chapter 32 is devoted exclusively to applications in solar ceUs, including information on our general understanding of the role of silicon nitride in photovoltaic devices. Experimental results on the preparation of silicon nitride layers for application in unspeci fied devices are in Chapter 2. Whenever the preparation is in connection with specific devices, the information is presented in the respective chapters. The general preparation of silicon nitride layers is not covered in this volume, but will appear in "Silicon" Supplement Volume B 5a. See also the Introductory Remarks, Chapter 1, p. 1 | ||
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| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| doi_str_mv | 10.1007/978-3-662-09901-8 |
| edition | 8th Edition |
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| id | DE-604.BV045186076 |
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| indexdate | 2024-07-10T08:10:56Z |
| institution | BVB |
| isbn | 9783662099018 |
| language | English |
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| series2 | Si. Silicium. Silicon (System-Nr. 15) |
| spelling | Krimmel, Eberhard F. Verfasser aut Si Silicon Silicon Nitride in Microelectronics and Solar Cells by Eberhard F. Krimmel, Rudolf Hezel, Uwe Nohl, Rainer Bohrer ; edited by Alfred Pebler, Friedrich Schröder 8th Edition Berlin, Heidelberg Springer Berlin Heidelberg 1991 1 Online-Ressource (XV, 401 p. 32 illus. in color) txt rdacontent c rdamedia cr rdacarrier Si. Silicium. Silicon (System-Nr. 15) S-i / B / 1-5 / 5 / c This is the first of three Gmelin Handbook volumes in the silicon se ries that will cover silicon nitride, a normaUy solid material with the idealized formula Si N . This volume, 3 4 "Silicon" Supplement Volume B Sc, is devoted to applications of silicon nitride in microelec tronics and solar ceUs. The compendium is the product of a critical selection among more than 17600 publications on silicon nitride issued up to January 1990. Out of a total of 5900 publications dealing with the fabrication and use of microelectronic devices (including 2400 Japanese patent applications), about 4000 papers have been selected for this volume. The current volume is grouped into three parts. Chapters 2 to 8 deal with general, non specific microelectronic applications of silicon nitride, Chapters 9 to 31 cover applications of silicon nitride in specific devices and device components, and Chapter 32 is devoted exclusively to applications in solar ceUs, including information on our general understanding of the role of silicon nitride in photovoltaic devices. Experimental results on the preparation of silicon nitride layers for application in unspeci fied devices are in Chapter 2. Whenever the preparation is in connection with specific devices, the information is presented in the respective chapters. The general preparation of silicon nitride layers is not covered in this volume, but will appear in "Silicon" Supplement Volume B 5a. See also the Introductory Remarks, Chapter 1, p. 1 Engineering Electronics and Microelectronics, Instrumentation Gmelin Chemistry, Physical and theoretical Electronics Microelectronics Hezel, Rudolf aut Nohl, Uwe aut Bohrer, Rainer aut Erscheint auch als Druck-Ausgabe 9783662099032 https://doi.org/10.1007/978-3-662-09901-8 Verlag URL des Erstveröffentlichers Volltext |
| spellingShingle | Krimmel, Eberhard F. Hezel, Rudolf Nohl, Uwe Bohrer, Rainer Si Silicon Silicon Nitride in Microelectronics and Solar Cells Engineering Electronics and Microelectronics, Instrumentation Gmelin Chemistry, Physical and theoretical Electronics Microelectronics |
| title | Si Silicon Silicon Nitride in Microelectronics and Solar Cells |
| title_auth | Si Silicon Silicon Nitride in Microelectronics and Solar Cells |
| title_exact_search | Si Silicon Silicon Nitride in Microelectronics and Solar Cells |
| title_full | Si Silicon Silicon Nitride in Microelectronics and Solar Cells by Eberhard F. Krimmel, Rudolf Hezel, Uwe Nohl, Rainer Bohrer ; edited by Alfred Pebler, Friedrich Schröder |
| title_fullStr | Si Silicon Silicon Nitride in Microelectronics and Solar Cells by Eberhard F. Krimmel, Rudolf Hezel, Uwe Nohl, Rainer Bohrer ; edited by Alfred Pebler, Friedrich Schröder |
| title_full_unstemmed | Si Silicon Silicon Nitride in Microelectronics and Solar Cells by Eberhard F. Krimmel, Rudolf Hezel, Uwe Nohl, Rainer Bohrer ; edited by Alfred Pebler, Friedrich Schröder |
| title_short | Si Silicon |
| title_sort | si silicon silicon nitride in microelectronics and solar cells |
| title_sub | Silicon Nitride in Microelectronics and Solar Cells |
| topic | Engineering Electronics and Microelectronics, Instrumentation Gmelin Chemistry, Physical and theoretical Electronics Microelectronics |
| topic_facet | Engineering Electronics and Microelectronics, Instrumentation Gmelin Chemistry, Physical and theoretical Electronics Microelectronics |
| url | https://doi.org/10.1007/978-3-662-09901-8 |
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