APA (7th ed.) Citation

Krimmel, E. F., Hezel, R., Nohl, U., & Bohrer, R. (1991). Si Silicon: Silicon Nitride in Microelectronics and Solar Cells (8th Edition.). Springer Berlin Heidelberg. https://doi.org/10.1007/978-3-662-09901-8

Chicago Style (17th ed.) Citation

Krimmel, Eberhard F., Rudolf Hezel, Uwe Nohl, and Rainer Bohrer. Si Silicon: Silicon Nitride in Microelectronics and Solar Cells. 8th Edition. Berlin, Heidelberg: Springer Berlin Heidelberg, 1991. https://doi.org/10.1007/978-3-662-09901-8.

MLA (9th ed.) Citation

Krimmel, Eberhard F., et al. Si Silicon: Silicon Nitride in Microelectronics and Solar Cells. 8th Edition. Springer Berlin Heidelberg, 1991. https://doi.org/10.1007/978-3-662-09901-8.