Computer-aided-design (CAD) of semiconductor microtransducers is relatively new in contrast to their counterparts in the integrated circuit world. Integrated silicon microtransducers are realized using microfabrication techniques similar to those for standard integrated circuits (ICs). Unlike IC dev...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Nathan, Arokia 1957- (VerfasserIn), Baltes, Henry 1941- (VerfasserIn)
Format:	Elektronisch E-Book
Sprache:	English
Veröffentlicht:	Vienna Springer Vienna 1999
Schriftenreihe:	Computational Microelectronics
Schlagworte:	Engineering Electronics and Microelectronics, Instrumentation Nanotechnology Optical and Electronic Materials Simulation and Modeling Numerical Analysis Computer simulation Numerical analysis Electronics Microelectronics Optical materials Electronic materials Mikrosystemtechnik Halbleiterschaltung CAD
Online-Zugang:	DE-634 Volltext
Zusammenfassung:	Computer-aided-design (CAD) of semiconductor microtransducers is relatively new in contrast to their counterparts in the integrated circuit world. Integrated silicon microtransducers are realized using microfabrication techniques similar to those for standard integrated circuits (ICs). Unlike IC devices, however, microtransducers must interact with their environment, so their numerical simulation is considerably more complex. While the design of ICs aims at suppressing "parasitic" effects, microtransducers thrive on optimizing the one or the other such effect. The challenging quest for physical models and simulation tools enabling microtransducer CAD is the topic of this book. The book is intended as a text for graduate students in Electrical Engineering and Physics and as a reference for CAD engineers in the microsystems industry
Beschreibung:	1 Online-Ressource (XVIII, 427 p. 44 illus)
ISBN:	9783709164280
DOI:	10.1007/978-3-7091-6428-0