Microtransducer CAD: Physical and Computational Aspects

Computer-aided-design (CAD) of semiconductor microtransducers is relatively new in contrast to their counterparts in the integrated circuit world. Integrated silicon microtransducers are realized using microfabrication techniques similar to those for standard integrated circuits (ICs). Unlike IC dev...

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Bibliographic Details
Main Authors: Nathan, Arokia 1957- (Author), Baltes, Henry 1941- (Author)
Format: Electronic eBook
Language:English
Published: Vienna Springer Vienna 1999
Series:Computational Microelectronics
Subjects:
Online Access:DE-634
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Summary:Computer-aided-design (CAD) of semiconductor microtransducers is relatively new in contrast to their counterparts in the integrated circuit world. Integrated silicon microtransducers are realized using microfabrication techniques similar to those for standard integrated circuits (ICs). Unlike IC devices, however, microtransducers must interact with their environment, so their numerical simulation is considerably more complex. While the design of ICs aims at suppressing "parasitic" effects, microtransducers thrive on optimizing the one or the other such effect. The challenging quest for physical models and simulation tools enabling microtransducer CAD is the topic of this book. The book is intended as a text for graduate students in Electrical Engineering and Physics and as a reference for CAD engineers in the microsystems industry
Physical Description:1 Online-Ressource (XVIII, 427 p. 44 illus)
ISBN:9783709164280
DOI:10.1007/978-3-7091-6428-0

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