Multimethod metrology of multilayer mirrors using EUV and X-Ray radiation:
Saved in:
| Main Author: | |
|---|---|
| Format: | Thesis Electronic eBook |
| Language: | English |
| Published: |
Berlin
2017
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| Subjects: | |
| Online Access: | Volltext |
| Physical Description: | 1 Online-Ressource (xiii, 137 Seiten) Illustrationen, Diagramme |
| DOI: | 10.14279/depositonce-6428 |
Staff View
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Record in the Search Index
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| discipline | Physik |
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| spelling | Haase, Anton Verfasser (DE-588)1166419207 aut Multimethod metrology of multilayer mirrors using EUV and X-Ray radiation vorgelegt von Diplom-Physiker Anton Haase geboren in Berlin Berlin 2017 1 Online-Ressource (xiii, 137 Seiten) Illustrationen, Diagramme txt rdacontent c rdamedia cr rdacarrier Dissertation Technische Universität Berlin 2017 Reflexionskoeffizient (DE-588)4177334-2 gnd rswk-swf Spiegel (DE-588)4056203-7 gnd rswk-swf Mehrschichtsystem (DE-588)4244347-7 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Spiegel (DE-588)4056203-7 s Mehrschichtsystem (DE-588)4244347-7 s Reflexionskoeffizient (DE-588)4177334-2 s DE-604 Erscheint auch als Druck-Ausgabe (DE-604)BV045170784 https://doi.org/10.14279/depositonce-6428 Resolving-System kostenfrei Volltext |
| spellingShingle | Haase, Anton Multimethod metrology of multilayer mirrors using EUV and X-Ray radiation Reflexionskoeffizient (DE-588)4177334-2 gnd Spiegel (DE-588)4056203-7 gnd Mehrschichtsystem (DE-588)4244347-7 gnd |
| subject_GND | (DE-588)4177334-2 (DE-588)4056203-7 (DE-588)4244347-7 (DE-588)4113937-9 |
| title | Multimethod metrology of multilayer mirrors using EUV and X-Ray radiation |
| title_auth | Multimethod metrology of multilayer mirrors using EUV and X-Ray radiation |
| title_exact_search | Multimethod metrology of multilayer mirrors using EUV and X-Ray radiation |
| title_full | Multimethod metrology of multilayer mirrors using EUV and X-Ray radiation vorgelegt von Diplom-Physiker Anton Haase geboren in Berlin |
| title_fullStr | Multimethod metrology of multilayer mirrors using EUV and X-Ray radiation vorgelegt von Diplom-Physiker Anton Haase geboren in Berlin |
| title_full_unstemmed | Multimethod metrology of multilayer mirrors using EUV and X-Ray radiation vorgelegt von Diplom-Physiker Anton Haase geboren in Berlin |
| title_short | Multimethod metrology of multilayer mirrors using EUV and X-Ray radiation |
| title_sort | multimethod metrology of multilayer mirrors using euv and x ray radiation |
| topic | Reflexionskoeffizient (DE-588)4177334-2 gnd Spiegel (DE-588)4056203-7 gnd Mehrschichtsystem (DE-588)4244347-7 gnd |
| topic_facet | Reflexionskoeffizient Spiegel Mehrschichtsystem Hochschulschrift |
| url | https://doi.org/10.14279/depositonce-6428 |
| work_keys_str_mv | AT haaseanton multimethodmetrologyofmultilayermirrorsusingeuvandxrayradiation |