APA (7th ed.) Citation

Oliver, M. R. (2004). Chemical-Mechanical Planarization of Semiconductor Materials. Springer Berlin Heidelberg. https://doi.org/10.1007/978-3-662-06234-0

Chicago Style (17th ed.) Citation

Oliver, Michael R. Chemical-Mechanical Planarization of Semiconductor Materials. Berlin, Heidelberg: Springer Berlin Heidelberg, 2004. https://doi.org/10.1007/978-3-662-06234-0.

MLA (9th ed.) Citation

Oliver, Michael R. Chemical-Mechanical Planarization of Semiconductor Materials. Springer Berlin Heidelberg, 2004. https://doi.org/10.1007/978-3-662-06234-0.