Simulation of Semiconductor Processes and Devices 2004:
This volume contains the proceedings of the 10th edition of the International Conference on Simulation of Semiconductor Processes and Devices (SISPAD 2004), held in Munich, Germany, on September 2-4, 2004. The conference program included 7 invited plenary lectures and 82 contributed papers for oral...
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| Other Authors: | , |
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| Format: | Electronic eBook |
| Language: | English |
| Published: |
Vienna
Springer Vienna
2004
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| Subjects: | |
| Online Access: | FHI01 BTU01 Volltext |
| Summary: | This volume contains the proceedings of the 10th edition of the International Conference on Simulation of Semiconductor Processes and Devices (SISPAD 2004), held in Munich, Germany, on September 2-4, 2004. The conference program included 7 invited plenary lectures and 82 contributed papers for oral or poster presentation, which were carefully selected out of a total of 151 abstracts submitted from 14 countries around the world. Like the previous meetings, SISPAD 2004 provided a world-wide forum for the presentation and discussion of recent advances and developments in the theoretical description, physical modeling and numerical simulation and analysis of semiconductor fabrication processes, device operation and system performance. The variety of topics covered by the conference contributions reflects the physical effects and technological problems encountered in consequence of the progressively shrinking device dimensions and the ever-growing complexity in device technology |
| Physical Description: | 1 Online-Ressource (XII, 379 p) |
| ISBN: | 9783709106242 |
| DOI: | 10.1007/978-3-7091-0624-2 |
Staff View
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| id | DE-604.BV045149474 |
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| isbn | 9783709106242 |
| language | English |
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| physical | 1 Online-Ressource (XII, 379 p) |
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| publisher | Springer Vienna |
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| spelling | Simulation of Semiconductor Processes and Devices 2004 edited by Gerhard Wachutka, Gabriele Schrag Vienna Springer Vienna 2004 1 Online-Ressource (XII, 379 p) txt rdacontent c rdamedia cr rdacarrier This volume contains the proceedings of the 10th edition of the International Conference on Simulation of Semiconductor Processes and Devices (SISPAD 2004), held in Munich, Germany, on September 2-4, 2004. The conference program included 7 invited plenary lectures and 82 contributed papers for oral or poster presentation, which were carefully selected out of a total of 151 abstracts submitted from 14 countries around the world. Like the previous meetings, SISPAD 2004 provided a world-wide forum for the presentation and discussion of recent advances and developments in the theoretical description, physical modeling and numerical simulation and analysis of semiconductor fabrication processes, device operation and system performance. The variety of topics covered by the conference contributions reflects the physical effects and technological problems encountered in consequence of the progressively shrinking device dimensions and the ever-growing complexity in device technology Engineering Electronics and Microelectronics, Instrumentation Optical and Electronic Materials Nanotechnology Computational Intelligence Simulation and Modeling Computer simulation Computational intelligence Electronics Microelectronics Optical materials Electronic materials Wachutka, Gerhard edt Schrag, Gabriele edt Erscheint auch als Druck-Ausgabe 9783709172124 https://doi.org/10.1007/978-3-7091-0624-2 Verlag URL des Erstveröffentlichers Volltext |
| spellingShingle | Simulation of Semiconductor Processes and Devices 2004 Engineering Electronics and Microelectronics, Instrumentation Optical and Electronic Materials Nanotechnology Computational Intelligence Simulation and Modeling Computer simulation Computational intelligence Electronics Microelectronics Optical materials Electronic materials |
| title | Simulation of Semiconductor Processes and Devices 2004 |
| title_auth | Simulation of Semiconductor Processes and Devices 2004 |
| title_exact_search | Simulation of Semiconductor Processes and Devices 2004 |
| title_full | Simulation of Semiconductor Processes and Devices 2004 edited by Gerhard Wachutka, Gabriele Schrag |
| title_fullStr | Simulation of Semiconductor Processes and Devices 2004 edited by Gerhard Wachutka, Gabriele Schrag |
| title_full_unstemmed | Simulation of Semiconductor Processes and Devices 2004 edited by Gerhard Wachutka, Gabriele Schrag |
| title_short | Simulation of Semiconductor Processes and Devices 2004 |
| title_sort | simulation of semiconductor processes and devices 2004 |
| topic | Engineering Electronics and Microelectronics, Instrumentation Optical and Electronic Materials Nanotechnology Computational Intelligence Simulation and Modeling Computer simulation Computational intelligence Electronics Microelectronics Optical materials Electronic materials |
| topic_facet | Engineering Electronics and Microelectronics, Instrumentation Optical and Electronic Materials Nanotechnology Computational Intelligence Simulation and Modeling Computer simulation Computational intelligence Electronics Microelectronics Optical materials Electronic materials |
| url | https://doi.org/10.1007/978-3-7091-0624-2 |
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